Abstract: An inkjet printing head 1 includes an actuator substrate, having an ink flow passage that includes a pressure chamber, a movable film formation layer, including a movable film, disposed on the pressure chamber and defining a top surface portion of the pressure chamber, a piezoelectric element 9, formed on the movable film, and a protective substrate 4, bonded to the actuator substrate so as to cover the piezoelectric element 9, and the protective substrate 4 has an ink supply passage 53 in communication with the ink flow passage, and on a surface of the protective substrate 4 at an opposite side from the actuator substrate, an alignment mark 81 is formed in each of a plurality of small regions set by dividing an entire region of the surface.

Abstract: An inkjet printing head 1 includes an actuator substrate, having an ink flow passage that includes a pressure chamber, a movable film formation layer, including a movable film, disposed on the pressure chamber and defining a top surface portion of the pressure chamber, a piezoelectric element 9, formed on the movable film, and a protective substrate 4, bonded to the actuator substrate so as to cover the piezoelectric element 9, and the protective substrate 4 has an ink supply passage 53 in communication with the ink flow passage, and on a surface of the protective substrate 4 at an opposite side from the actuator substrate, an alignment mark 81 is formed in each of a plurality of small regions set by dividing an entire region of the surface.