Abstract: An apparatus for holding work pieces during electroless plating has certain improved features designed for use at relatively high temperatures (e.g., at least about 50 degrees C.). Cup and cone components of a “clamshell” apparatus that engage a work piece are made from dimensionally stable materials with relatively low coefficients of thermal expansion. Further, O-rings are removed from positions that come in contact with the work piece. This avoids the difficulty caused by O-rings sticking to work piece surfaces during high temperature processing. In place of the O-ring, a cantilever member is provided on the portion of the cone that contacts the work piece. Still further, the apparatus makes use of a heat transfer system for controlling the temperature of the work piece backside during plating.

Abstract: An apparatus for electroplating a wafer surface includes a cup having a central aperture defined by an inner perimeter, a compliant seal adjacent the inner perimeter, contacts adjacent the compliant seal and a cone attached to a rotatable spindle. The compliant seal forms a seal with the perimeter region of the wafer surface preventing plating solution from contaminating the wafer edge, wafer backside and the contacts. As a further measure to prevent contamination, the region behind the compliant seal is pressurized. By rotating the wafer during electroplating, bubble entrapment on the wafer surface is prevented. Further, the contacts can be arranged into banks of contacts and the resistivity between banks can be tested to detect poor electrical connections between the contacts and the wafer surface.

Abstract: An apparatus for electroplating a wafer surface includes a cup having a central aperture defined by an inner perimeter, a compliant seal adjacent the inner perimeter, contacts adjacent the compliant seal and a cone attached to a rotatable spindle. The compliant seal forms a seal with the perimeter region of the wafer surface preventing plating solution from contaminating the wafer edge, wafer backside and the contacts. As a further measure to prevent contamination, the region behind the compliant seal is pressurized. By rotating the wafer during electroplating, bubble entrapment on the wafer surface is prevented. Further, the contacts can be arranged into banks of contacts and the resistivity between banks can be tested to detect poor electrical connections between the contacts and the wafer surface.

Abstract: A rotary union for use with an electroplating apparatus includes a shaft having a first surface area and an extended surface area, the first surface area having a first aperture therein, the extended surface area having a second aperture therein. The rotary union further includes an outer face seal and an inner face seal. The outer face seal is pressed against, and forms a seal with, the first surface area. The inner face seal is pressed against, and forms a seal with, the extended surface area. A pressure passage coupled to the first aperture passes through the outer face seal and around the outside of the inner face seal. A pressure/vacuum passage coupled to the second aperture passes through the inner face seal.

Abstract: An apparatus for electroplating a wafer surface includes a cup having a central aperture defined by an inner perimeter, a compliant seal adjacent the inner perimeter, contacts adjacent the compliant seal and a cone attached to a rotatable spindle. The compliant seal forms a seal with the perimeter region of the wafer surface preventing plating solution from contaminating the wafer edge, wafer backside and the contacts. As a further measure to prevent contamination, the region behind the compliant seal is pressurized. By rotating the wafer during electroplating, bubble entrapment on the wafer surface is prevented. Further, the contacts can be arranged into banks of contacts and the resistivity between banks can be tested to detect poor electrical connections between the contacts and the wafer surface.

Abstract: An apparatus for electroplating a wafer surface includes a cup having a central aperture defined by an inner perimeter, a compliant seal adjacent the inner perimeter, contacts adjacent the compliant seal and a cone attached to a rotatable spindle. The compliant seal forms a seal with the perimeter region of the wafer surface preventing plating solution from contaminating the wafer edge, wafer backside and the contacts. As a further measure to prevent contamination, the region behind the compliant seal is pressurized. By rotating the wafer during electroplating, bubble entrapment on the wafer surface is prevented. Further, the contacts can be arranged into banks of contacts and the resistivity between banks can be tested to detect poor electrical connections between the contacts and the wafer surface.

Abstract: An improved machinery mount for supporting a load on a substructure such as a building floor, having a support member engagable with at least a portion of said load, and a bearing member disposed beneath said support member and spaced therefrom. A damper disposed between the bearing member and the substructure includes a plurality of compressible resilient members and at least one rigid member interposed between the resilient members, the uppermost resilient member disposed adjacent the bearing member and the lowermost resilient member disposed adjacent the substructure. The resilient members, being preferably rubber or plastic, are bonded to the adjacent rigid member, preferably being a metal. Preferably, the damper is secured to the bearing member, and the bearing member is secured to the support member, the three components thereby forming an integral unit.

Abstract: The apparatus includes a reaction chamber which in operation uses an organic fuel input, typically in the form of substantially uniform-sized pellets, to produce a tar-free fuel gas. Prior to initiating operation, the lower end of the reaction chamber is filled with a charge of charcoal, forming a charcoal bed. A portion of the charcoal bed is then ignited, typically near the top, with air from the atmosphere being drawn substantially uniformly down through the reaction chamber by a pump on the outlet line leading from the reaction chamber, creating a thin pyrolysis zone near the top of the charcoal bed. The substantially uniform-size fuel pellets are added to the top of the charcoal bed, and are pyrolized as they move down through the pyrolysis zone.

Abstract: A base frame supports pairs of parallel compressing arms having a pivoted depending support on an upper extension. These arms are operated between open and bale forming positions by fluid operated cylinders. An article holding cartridge has upstanding ribs arranged to confine articles therebetween for baling. The ribs are spaced such that upon moving the loaded cartridge into place on a cross conveyor, the compressing arms thread through the ribs and compress the articles. The upper extension has powered lifting and lowering means for operation of the compressing arms in a baling sequence and also to open the arms rearwardly for ejecting the bale. Upper straps are associated with the compressing arms to compress the top portion of the bale, and banding mechanism is supported on the frame for applying bands around the bale. The base frame is supported on a wheeled chassis and has longitudinal adjustment on the chassis for positioning between a rear baling position and a forward road traveling position.

Abstract: A cutter vehicle is arranged to be moved along a row of trees by a powdered drive vehicle. A boom assembly is secured between the cutter vehicle and the drive vehicle and has relatively movable parts which can extend and retract to vary the longitudinal length of the boom assembly. The cutter vehicle has a powered cutter arranged to cut a tree off adjacent the ground. The mechanism has controls capable of actuating the power cutter substantially simultaneously with release of the power for the boom assembly whereby the movable parts of the boom assembly can have free relative movement to allow the powered drive vehicle to advance while the cutter vehicle has stopped momentarily to cut a tree, this providing an arrangement which allows a drive vehicle to maintain a steady advancing movement even though the cutter vehicle has stopped to cut a tree. The boom assembly has pivot support which provides lateral positioning of the cutter vehicle to bypass a tree if desired.