Patents by Inventor Wayne Chen

Wayne Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250226211
    Abstract: A process to generate an etch-resistant nitride layer is provided. The process may include providing a substrate, the substrate including a silicon nitride layer formed by PECVD at an elevated deposition temperature, heating the substrate to an elevated implant temperature, and performing a hot implant by implanting the substrate at the elevated implant temperature, wherein an implanted silicon nitride layer is formed. The process may also include annealing the substrate after the hot implant at an elevated anneal temperature, wherein a relative etch rate of the implanted silicon nitride layer is reduced with respect to an unimplanted silicon nitride layer.
    Type: Application
    Filed: January 2, 2025
    Publication date: July 10, 2025
    Applicant: Applied Materials, Inc.
    Inventors: Rajesh PRASAD, Fernando Antonio REBOLLEDO USCANGA, Shan TANG, Wayne CHEN, Godwin John NTUK, Jialiang WANG, Guangyan ZHONG, Aditya SUNDARAM, Shweta HARDIKAR, Edwin A. AREVALO, Kyu-Ha SHIM
  • Publication number: 20250226226
    Abstract: Techniques for generating and maintaining a low stress nitride layer after a low temperature anneal, including the operations of providing a substrate, the substrate including a nitride layer formed by PECVD; heating the substrate to an elevated temperature; and performing a hot implant by implanting the substrate at the elevated temperature between 150° C. and 700° C.
    Type: Application
    Filed: January 2, 2025
    Publication date: July 10, 2025
    Applicant: Applied Materials, Inc.
    Inventors: Rajesh PRASAD, Fernando Antonio REBOLLEDO USCANGA, Shan TANG, Wayne CHEN, Godwin John NTUK, Jialiang WANG, Guangyan ZHONG, Aditya SUNDARAM, Shweta HARDIKAR, Edwin A. AREVALO, Kyu-Ha SHIM
  • Patent number: 12334352
    Abstract: A method of manufacturing a vertical FET device includes providing a semiconductor substrate structure including a marker layer; forming a hardmask layer coupled to the semiconductor substrate structure, wherein the hardmask layer comprises a set of openings operable to expose an upper surface portion of the semiconductor substrate structure; etching the upper surface portion of the semiconductor substrate structure to form a plurality of fins; etching at least a portion of the marker layer; detecting the etching of the at least a portion of the marker layer; epitaxially growing a semiconductor layer in recess regions disposed between adjacent fins of the plurality of fins; forming a source metal layer on each of the plurality of fins; and forming a gate metal layer coupled to the semiconductor layer.
    Type: Grant
    Filed: March 28, 2024
    Date of Patent: June 17, 2025
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Wayne Chen, Andrew P. Edwards, Clifford Drowley, Subhash Srinivas Pidaparthi
  • Patent number: 12278124
    Abstract: A load lock in which the pumping speed is controlled so as to minimize the possibility of condensation is disclosed. The load lock is in communication with a vacuum pump and a valve. A controller is used to control the valve such that the supersaturation ratio within the load lock does not exceed a predetermined threshold, which is less than or equal to the critical value at which vapor condenses. In certain embodiments, a computer model is used to generate a profile, which may be a pumping speed profile or a pressure profile, and the valve is controlled according to the profile. In another embodiment, the load lock comprises a temperature sensor and a pressure sensor. The controller may calculate the supersaturation ratio based on these parameters and control the valve accordingly.
    Type: Grant
    Filed: October 28, 2021
    Date of Patent: April 15, 2025
    Assignee: Applied Materials, Inc.
    Inventors: D. Jeffrey Lischer, Bon-Woong Koo, Dawei Sun, Chi-Yang Cheng, Paul Joseph Murphy, Frank Sinclair, Gregory Edward Stratoti, Tseh-Jen Hsieh, Wayne Chen, Guy Oteri
  • Publication number: 20240358682
    Abstract: Methods of using the alpha-2-adrenergic receptor agonist of Formula I: for improving vision such as in the treatment of ocular conditions such as presbyopia, poor night vision, visual glare, visual starbursts, visual halos, and some forms of myopia (e.g. night myopia) are described.
    Type: Application
    Filed: March 8, 2024
    Publication date: October 31, 2024
    Inventors: Mohammed Dibas, Daniel W. Gil, Wayne Chen, Miguel Alcantara
  • Patent number: 12091408
    Abstract: The present invention provides compounds having store overload-induced Ca2+ release (SOICR) inhibitory activity and methods for producing and using the same. In particular, compounds of the invention is of the formula: R1—X1-L-X2—R2, wherein R1, X1, L, X2, and R2 are those defined herein.
    Type: Grant
    Filed: September 27, 2014
    Date of Patent: September 17, 2024
    Assignee: UTI Limited Partnership
    Inventors: Tom Back, Wayne Chen, Chris Smith, Dawei Jiang
  • Publication number: 20240242969
    Abstract: A method of manufacturing a vertical FET device includes providing a semiconductor substrate structure including a marker layer; forming a hardmask layer coupled to the semiconductor substrate structure, wherein the hardmask layer comprises a set of openings operable to expose an upper surface portion of the semiconductor substrate structure; etching the upper surface portion of the semiconductor substrate structure to form a plurality of fins; etching at least a portion of the marker layer; detecting the etching of the at least a portion of the marker layer; epitaxially growing a semiconductor layer in recess regions disposed between adjacent fins of the plurality of fins; forming a source metal layer on each of the plurality of fins; and forming a gate metal layer coupled to the semiconductor layer.
    Type: Application
    Filed: March 28, 2024
    Publication date: July 18, 2024
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Wayne CHEN, Andrew P. EDWARDS, Clifford DROWLEY, Subhash Srinivas PIDAPARTHI
  • Patent number: 11948801
    Abstract: A method of manufacturing a vertical FET device includes providing a semiconductor substrate structure including a marker layer; forming a hardmask layer coupled to the semiconductor substrate structure, wherein the hardmask layer comprises a set of openings operable to expose an upper surface portion of the semiconductor substrate structure; etching the upper surface portion of the semiconductor substrate structure to form a plurality of fins; etching at least a portion of the marker layer; detecting the etching of the at least a portion of the marker layer; epitaxially growing a semiconductor layer in recess regions disposed between adjacent fins of the plurality of fins; forming a source metal layer on each of the plurality of fins; and forming a gate metal layer coupled to the semiconductor layer.
    Type: Grant
    Filed: June 23, 2021
    Date of Patent: April 2, 2024
    Assignee: Nexgen Power Systems, Inc.
    Inventors: Wayne Chen, Andrew P. Edwards, Clifford Drowley, Subhash Srinivas Pidaparthi
  • Publication number: 20230138326
    Abstract: A load lock in which the pumping speed is controlled so as to minimize the possibility of condensation is disclosed. The load lock is in communication with a vacuum pump and a valve. A controller is used to control the valve such that the supersaturation ratio within the load lock does not exceed a predetermined threshold, which is less than or equal to the critical value at which vapor condenses. In certain embodiments, a computer model is used to generate a profile, which may be a pumping speed profile or a pressure profile, and the valve is controlled according to the profile. In another embodiment, the load lock comprises a temperature sensor and a pressure sensor. The controller may calculate the supersaturation ratio based on these parameters and control the valve accordingly.
    Type: Application
    Filed: October 28, 2021
    Publication date: May 4, 2023
    Inventors: D. Jeffrey Lischer, Bon-Woong Koo, Dawei Sun, Chi-Yang Cheng, Paul Joseph Murphy, Frank Sinclair, Gregory Edward Stratoti, Tseh-Jen Hsieh, Wayne Chen, Guy Oteri
  • Publication number: 20220288031
    Abstract: Methods of using the alpha-2-adrenergic receptor agonist of Formula I: for improving vision such as in the treatment of ocular conditions such as presbyopia, poor night vision, visual glare, visual starbursts, visual halos, and some forms of myopia (e.g. night myopia) are described.
    Type: Application
    Filed: October 29, 2021
    Publication date: September 15, 2022
    Inventors: Mohammed Dibas, Daniel W. Gil, Wayne Chen, Miguel Alcantara
  • Publication number: 20220160623
    Abstract: Methods of using the alpha-2-adrenergic receptor agonist of Formula I: for improving vision such as in the treatment of ocular conditions such as presbyopia, poor night vision, visual glare, visual starbursts, visual halos, and some forms of myopia (e.g. night myopia) are described.
    Type: Application
    Filed: June 30, 2021
    Publication date: May 26, 2022
    Inventors: Mohammed Dibas, Daniel W. Gil, Wayne Chen, Miguel Alcantara
  • Publication number: 20210407815
    Abstract: A method of manufacturing a vertical FET device includes providing a semiconductor substrate structure including a marker layer; forming a hardmask layer coupled to the semiconductor substrate structure, wherein the hardmask layer comprises a set of openings operable to expose an upper surface portion of the semiconductor substrate structure; etching the upper surface portion of the semiconductor substrate structure to form a plurality of fins; etching at least a portion of the marker layer; detecting the etching of the at least a portion of the marker layer; epitaxially growing a semiconductor layer in recess regions disposed between adjacent fins of the plurality of fins; forming a source metal layer on each of the plurality of fins; and forming a gate metal layer coupled to the semiconductor layer.
    Type: Application
    Filed: June 23, 2021
    Publication date: December 30, 2021
    Applicant: NEXGEN POWER SYSTEMS, INC.
    Inventors: Wayne Chen, Andrew P. Edwards, Clifford Drowley, Subhash Srinivas Pidaparthi
  • Patent number: 11159053
    Abstract: Coupled inductor systems are disclosed in which transmitter and receiver inductors, or coils, are coupled in a configuration for wirelessly transferring power and/or data among them. In preferred implementations, the systems are used for transmitting both power and data in pairs of coupled coils. Primary side circuits in preferred embodiments of the systems of the invention employ Class D or Class G amplifiers.
    Type: Grant
    Filed: July 8, 2019
    Date of Patent: October 26, 2021
    Assignee: TRIUNE SYSTEMS, LLC
    Inventors: Ross E. Teggatz, Amer Atrash, Wayne Chen
  • Patent number: 11077053
    Abstract: Methods of using the alpha-2-adrenergic receptor agonist of Formula I: for improving vision such as in the treatment of ocular conditions such as presbyopia, poor night vision, visual glare, visual starbursts, visual halos, and some forms of myopia (e.g. night myopia) are described.
    Type: Grant
    Filed: November 17, 2020
    Date of Patent: August 3, 2021
    Assignee: ALLERGAN, INC.
    Inventors: Mohammed Dibas, Daniel W. Gil, Wayne Chen, Miguel Alcantara
  • Publication number: 20210205273
    Abstract: Methods of using the alpha-2-adrenergic receptor agonist of Formula I: for improving vision such as in the treatment of ocular conditions such as presbyopia, poor night vision, visual glare, visual starbursts, visual halos, and some forms of myopia (e.g. night myopia) are described.
    Type: Application
    Filed: August 20, 2019
    Publication date: July 8, 2021
    Inventors: Mohammed Dibas, Daniel W. Gil, Wayne Chen, Miguel Alcantara
  • Publication number: 20210059930
    Abstract: Methods of using the alpha-2-adrenergic receptor agonist of Formula I: for improving vision such as in the treatment of ocular conditions such as presbyopia, poor night vision, visual glare, visual starbursts, visual halos, and some forms of myopia (e.g. night myopia) are described.
    Type: Application
    Filed: November 17, 2020
    Publication date: March 4, 2021
    Inventors: Mohammed Dibas, Daniel W. Gil, Wayne Chen, Miguel Alcantara
  • Publication number: 20190334381
    Abstract: Coupled inductor systems are disclosed in which transmitter and receiver inductors, or coils, are coupled in a configuration for wirelessly transferring power and/or data among them. In preferred implementations, the systems are used for transmitting both power and data in pairs of coupled coils. Primary side circuits in preferred embodiments of the systems of the invention employ Class D or Class G amplifiers.
    Type: Application
    Filed: July 8, 2019
    Publication date: October 31, 2019
    Applicant: Triune Systems, LLC
    Inventors: Ross E. Teggatz, Amer Atrash, Wayne Chen
  • Publication number: 20190288507
    Abstract: Disclosed are advances in the arts with novel methods and apparatus for detecting faulty connections in an electrical system. Exemplary preferred embodiments include monitoring techniques and systems for monitoring signals at one or more device loads and analyzing the monitored signals for determining fault conditions at the device loads and/or at the main transmission lines. The invention preferably provides the capability to test and monitor electrical interconnections without fully activating the host system.
    Type: Application
    Filed: June 3, 2019
    Publication date: September 19, 2019
    Applicant: TRIUNE SYSTEMS, LLC
    Inventors: Ross E. Teggatz, Wayne Chen, Brett Smith, James Kohout
  • Patent number: 10348131
    Abstract: Coupled inductor systems are disclosed in which transmitter and receiver inductors, or coils, are coupled in a configuration for wirelessly transferring power and/or data among them. In preferred implementations, the systems are used for transmitting both power and data in pairs of coupled coils. Primary side circuits in preferred embodiments of the systems of the invention employ Class D or Class G amplifiers.
    Type: Grant
    Filed: September 13, 2016
    Date of Patent: July 9, 2019
    Assignee: TRIUNE SYSTEMS, LLC
    Inventors: Ross E. Teggatz, Amer Atrash, Wayne Chen
  • Patent number: 10332676
    Abstract: Coupled inductor signal transfer systems are disclosed in which transmitter and receiver coils are inductively coupled in a configuration for wirelessly transferring power and/or data signals. In preferred implementations, the systems may be used for transmitting both power and data. Preferred embodiments of the invention have at least one multi-tap coil on the primary side and/or secondary side of the system. The selection of taps enables the effective size and/or number of coils to be dynamically changed according to operational needs.
    Type: Grant
    Filed: March 26, 2012
    Date of Patent: June 25, 2019
    Assignee: TRIUNE SYSTEMS, LLC
    Inventors: Ross Teggatz, Wayne Chen, Amer Atrash, Jonathan Knight