Abstract: The present disclosure provides an inspection system and a method of stray field mitigation. The system includes an array of electron beam columns, a first permanent magnet array, and a plurality of shielding plates. The array of electron beam columns each includes an electron source configured to emit electrons toward a stage. The first permanent magnet array is configured to condense the electrons from each electron source into an array of electron beams. The first permanent magnet array is arranged at a first end of the array of electron beam columns. The plurality of shielding plates extend across the array electron beam columns downstream of the first permanent magnet array in a direction of electron emission. The array of electron beams pass through a plurality of apertures in each of the plurality of shielding plates, which reduces stray magnetic field in a radial direction of the array of electron beams.

Abstract: The present disclosure provides an inspection system and a method of stray field mitigation. The system includes an array of electron beam columns, a first permanent magnet array, and a plurality of shielding plates. The array of electron beam columns each includes an electron source configured to emit electrons toward a stage. The first permanent magnet array is configured to condense the electrons from each electron source into an array of electron beams. The first permanent magnet array is arranged at a first end of the array of electron beam columns. The plurality of shielding plates extend across the array electron beam columns downstream of the first permanent magnet array in a direction of electron emission. The array of electron beams pass through a plurality of apertures in each of the plurality of shielding plates, which reduces stray magnetic field in a radial direction of the array of electron beams.

Abstract: A system and a method for organizing and retrieving information are provided. The system is running on a computer system accessible for interactive communication with users. The computer system runs a crosslink database stored therein. The crosslink database includes a crosslink data structure comprising at least a connecting node and at least a first element and a second element connected to the connecting node by a link; and a browser for interactively communicating with the users for organizing and retrieving/revising information in the cross link database. The first element is related to the second element and can be traced via the connecting node. The second element is related to the first element and can be traced via the connecting node. The connecting node may correspond to a context of information, and wherein the first element and the second element constitute different topics of information related to the context of information.