Patents by Inventor Wayne D. LeBlanc

Wayne D. LeBlanc has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Technique for ion implanting a target
    Patent number: 8937003
    Abstract: A technique for ion implanting a target is disclosed. In accordance with one exemplary embodiment, the technique may be realized as a method for ion implanting a target, the method comprising: providing a predetermined amount of processing gas in an arc chamber of an ion source, the processing gas containing implant species and implant species carrier, where the implant species carrier may be one of O and H; providing a predetermined amount of dilutant into the arc chamber, wherein the dilutant may comprise a noble species containing material; and ionizing the processing gas and the dilutant.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: January 20, 2015
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Alexander S. Perel, Craig R. Chaney, Wayne D. LeBlanc, Robert Lindberg, Antonella Cucchetti, Neil J. Bassom, David Sporleder, James Young
  • TECHNIQUE FOR ION IMPLANTING A TARGET
    Publication number: 20130072008
    Abstract: A technique for ion implanting a target is disclosed. In accordance with one exemplary embodiment, the technique may be realized as a method for ion implanting a target, the method comprising: providing a predetermined amount of processing gas in an arc chamber of an ion source, the processing gas containing implant species and implant species carrier, where the implant species carrier may be one of O and H; providing a predetermined amount of dilutant into the arc chamber, wherein the dilutant may comprise a noble species containing material; and ionizing the processing gas and the dilutant.
    Type: Application
    Filed: September 13, 2012
    Publication date: March 21, 2013
    Inventors: Alexander S. Perel, Craig R. Chaney, Wayne D. LeBlanc, Robert Lindberg, Antonella Cucchetti, Neil J. Bassom, David Sporleder, James Young