Abstract: An apparatus for depositing thin films on a plurality of substrates has a vacuum chamber, a source of the material or materials to be deposited as the thin film, a source of energy for causing the material to be vaporized, and mechanical apparatus for imparting super-planetary and planetary motion to each substrate while the substrate is exposed to the vapors of the material. When a predetermined thickness of the film on any given substrate is reached the super-planetary motion is halted and only planetary motion and spinning are continued for the given substrate. During this process the thickness of the film being deposited is monitored accurately by an optical instrument having a linear axis of measurement which coincides with the center of the orbiting planetary motion of the substrate and is on the substrate itself.

Abstract: An apparatus for depositing thin films on a plurality of substrates has a vacuum chamber, a source of the material or materials to be deposited as the thin film, a source of energy for causing the material to be vaporized, and mechanical apparatus for imparting super-planetary and planetary motion to each substrate while the substrate is exposed to the vapors of the material. When a predetermined thickness of the film on any given substrate is reached the super-planetary motion is halted and only planetary motion and spinning are continued for the given substrate. During this process the thickness of the film being deposited is monitored accurately by an optical instrument having a linear axis of measurement which coincides with the center of the orbiting planetary motion of the substrate and is on the substrate itself.

Abstract: For use in a spectrophotometry or spectrofluorimetry system, where a fluid to be analyzed, is passed into or through a tube having at least one branch, a plastic device insertable into said branch, said device comprising a tubular plastic member the inner end of which is closed by a transparent transverse end wall, extending into the tube branch and within which an end of a fiber optic cable is removably secured with such end disposed in facing engagement with the inside of said wall, and a detector cap defining a chamber to hold some of the fluid or a dye color reactive to such fluid, is secured on the opposite side of the end wall. The tubular plastic member is removably securable in, and closes the tube branch.