Patents by Inventor Wayne L. Johson

Wayne L. Johson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6700458
    Abstract: An AC power feed device for conducting electrical power from a source to a load. The feed device has a constant characteristic impedance along its length and an outer periphery that varies in size progressively along its length, or the feed device has an input end connected to the match network and an output end connected to an electrode, and has a characteristic impedance which varies from a value substantially equal to the output impedance of a match network coupled at the input end to a value equal to the impedance of the electrode.
    Type: Grant
    Filed: August 14, 2002
    Date of Patent: March 2, 2004
    Assignee: Tokyo Electron Limited
    Inventors: Andrej S. Mitrovic, Thomas H. Windhorn, Wayne L. Johson
  • Publication number: 20030038688
    Abstract: An AC power feed device for conducting electrical power from a source to a load. The feed device has a constant characteristic impedance along its length and an outer periphery that varies in size progressively along its length, or the feed device has an input end connected to the match network and an output end connected to an electrode, and has a characteristic impedance which varies from a value substantially equal to the output impedance of a match network coupled at the input end to a value equal to the impedance of the electrode.
    Type: Application
    Filed: August 14, 2002
    Publication date: February 27, 2003
    Inventors: Andrej S. Mitrovic, Thomas H. Windhorn, Wayne L. Johson