Abstract: Methods and apparatus for measuring and controlling the flow rates of processing solutions to a CMP machine during the polishing and planarization process. The apparatus comprises a processing solution source, a processing solution dispensing system for applying the solution to the CMP machine, a mechanism for transferring the processing solution from the solution source to the dispensing system, and a metering or sensing system for accurately measuring the amount of processing solution actually dispensed to the CMP machine. Preferably, the metering system comprises a coriolis mass flow meter and a controller for controlling its operation. The metering system may interface with the CMP machine controller in a feed-back loop configuration so that the actual flow rates of the solutions may be controlled in real time.

Abstract: Apparatus for measuring the mass flow of a fluid within a defined fluid stream including a conduit having two substantially parallel, flexible and continuous flow tubes fixedly mounted at their ends to a centrally positioned housing forming a flow splitter and a flow converger for directing the flow from the inlet and for directing the flow into the outlet between the apparatus and the fluid stream. The ends of each flow tube positioned proximal to one another and to the center of gravity formed by the shape of the flow tube. Each flow tube substantially forming a "B" shape having a first loop, a connecting portion and a second loop. The first and second loops being symmetrical with respect to the connecting portion and extending laterally from the center of gravity at a greater distance than the displacement of the connecting portion to the center of gravity.

Abstract: A conduit having two substantially parallel, flexible and continuous flow tubes fixedly mounted at their ends to a centrally positioned housing The ends of each flow tube positioned proximal to one another and to the center of gravity formed by the shape of the flow tube. Each flow tube substantially forming a "B" shape having a first loop, a connecting portion and a second loop. The first and second loops being symmetrical with respect to the connecting portion and extending laterally from the center of gravity at a greater distance than the displacement of the connecting portion to the center of gravity. The flow tubes being oscillated in opposing modes at the connecting portion so as to produce a measurable Coriolis reaction force by the fluid on the flow tubes.

Abstract: A Coriolis mass flow meter of the type including a continuous flexible flow tube fixedly mounted at its ends and adapted for receiving fluid flow. A driver oscillates the flow tube at a fixed frequency. A drive brace is attached at one end to the flow tube mount and at the opposite end to the flow tube substantially at the position of the applied oscillation of the driver. The brace limits the displacement of the flow tube transverse to the direction of the applied oscillation without substantially restricting the motion of the flow tube due to the Coriolis reaction of the fluid to the driver oscillation. The mounting of the flow tube being made by the engagement of gripping portions having bushings therein. The mount limiting transfer of forces acting on the inlet and outlet ends of the flow tube. Resonant pins are provided at each end of the flow tube adjacent the fixed mounting to resiliently clamp the flow tube and fix the resonant frequency thereof throughout its useful life.

Abstract: A method for increasing stability of a Coriolis mass flow meter by relieving residual and internal stress within the flow tube and related structures of the meter. The method including the steps of bending the flow tube in the desired form, fixing related flow tube structures onto the flow tube, clamping the flow tube so as to maintain the desired form during subsequent processes, annealing the flow tube, and cryogenically cooling the flow tube. An apparatus to be utilized along with the method of the present invention fixes the flow tube during the annealing and cryogenic cooling treatment processes to maintain the desired shape of the flow tube. The invention also contemplates the flow tube made in accordance with the method of the present invention.

Abstract: A method and apparatus for determining mass flow of fluid flowing within a conduit. The conduit is oscillated periodically transverse to the flow therein, and sensors sense the movement of the conduit at discrete, spaced locations on the conduit. The sensors generate periodic signals representative of the movement of the conduit at said locations. The method of the present invention comprises the steps of determining the instantaneous amplitude difference between the signals at a plurality of discrete adjacent intervals (which may or may not be of equal width), determining the product of the absolute value of the instantaneous amplitude difference and the amplitude of the interval for each said interval, determining the sum of said products for each interval over a cycle of oscillation, and generating from the sum a signal representative of mass flow.

Abstract: A mass flow meter for placement in line within a pre-existing process line. The flow meter having a conduit forming a substantially free floating spiral or circular loop which is symmetrical about the axis line defined by the process line. A driving transducer extending radially from a bracket on a support beam which is positioned along the axis line and attached to the inlet and outlet end of the conduit. The driver imparting an alternating deflection to the loop which is substantially perpendicular to the fluid flow within the loop and parallel to the axis line. Sensing transducers are positioned along the periphery of the loop, displaced equidistant from the driving transducer along its circumference for determining the deflection signature of the loop. The deflection of the loop in response to the fluid reaction forces is measured without reference to a specific fixed axis or position of the loop. This acceleration signature is correlated to the mass flow rate of the fluid through the conduit.