Abstract: A system including a chamber enclosing a processing region, a substrate support within the chamber and configured to retain a substrate in the processing region, a gas distribution manifold coupled to the chamber to introduce first and a second etching gases from the gas distribution manifold using first and second inlets, a first gas distribution channel coupled configured to selectively switch between directing the first etching gas along a first gas flow path towards the processing region, and directing the first etching gas towards a vent, and a second gas distribution channel configured to selectively switch between directing the second etching gas towards the vent, and directing the second etching gas along a fourth gas flow path towards the processing region, and a flow ratio controller operatively coupled to the first and second gas distribution channels and configured to direct the first or second etching gases towards the processing region.

Abstract: The emergency reline system for an automobile is used in conjunction with an air bag system and a reclining seat system. The seat is pivotally movable by a motor upon application of a reclining motor control signal. The emergency recline system includes a sensor which detects unwanted deceleration and which generates a trigger signal. The trigger signal is delayed by a delay circuit for a predetermined period of time. The delayed trigger signal is then applied as the reclining motor control signal to the motor such that after the predetermined time, the delayed trigger signal reclines the seat. This relieves the pressure developed by the deployed air bag on the driver or the passenger in the seat. A method for reclining the seat includes sensing unwanted deceleration, generating a trigger signal, delaying the trigger signal for a predetermined time, and then applying that delayed trigger signal as the reclining motor control signal to the motor or motor control.