Abstract: The invention provides a material surface treatment equipment, which is applied to a material substrate. The material surface treatment equipment includes a surface treatment device and at least one waveguide device. The surface treatment device is used to carry the material substrate to perform a surface treatment process. Each waveguide device is used for introducing electromagnetic waves to the material substrate to assist in performing the surface treatment process. Through the introduction of electromagnetic waves, the surface treatment process of the material substrate is easy to perform and can achieve the strengthening effect.

Abstract: A humidity sensor includes a substrate, at least two elongated electrodes formed respectively on the substrate where each of the elongated electrodes has a first end and a second end, at least a pair of comb-like electrodes each contacting with the first end of the elongated electrode, and a humidity sensitive film which contains hydrophilic ionic polymer and is formed respectively on the at least a pair of comb-like electrodes but not on the second ends of the elongated electrodes. In addition, the present invention further comprises a method for making such a humidity sensor.