Abstract: An integrated circuit device includes a gate stack disposed over a substrate. A first L-shaped spacer is disposed along a first sidewall of the gate stack and a second L-shaped spacer is disposed along a second sidewall of the gate stack. The first L-shaped spacer and the second L-shaped spacer include silicon and carbon. A first source/drain epitaxy region and a second source/drain epitaxy region are disposed over the substrate. The gate stack is disposed between the first source/drain epitaxy region and the second source/drain epitaxy region. An interlevel dielectric (ILD) layer disposed over the substrate. The ILD layer is disposed between the first source/drain epitaxy region and a portion of the first L-shaped spacer disposed along the first sidewall of the gate stack and between the second source/drain epitaxy region and a portion of the second L-shaped spacer disposed along the second sidewall of the gate stack.

Abstract: A method and apparatus for high-throughput micro-cell culture with mechanical stimulation is disclosed. In one embodiment, the apparatus includes a cell culture vessel and a fluid pressure supply unit. The cell culture vessel has a membrane, a culture medium chamber, and a pressure chamber; and the fluid pressure supply unit that has a fluid pressure supply device and a control device is connected fluidly to the pressure chamber. When the fluid pressure in the pressure chamber changes, the membrane vibrates accordingly to generate a mechanical stimulation to the cultured cells in a controllable manner. In another embodiment, the control device can be an electro-magnetic valve.

Abstract: A method for high-throughput micro-cell culture with mechanical stimulation includes providing cells on a membrane, supplying a culture medium to the cells, and vibrating the membrane by exerting and varying a fluid pressure on the membrane such that the cells are mechanically stimulated through the membrane. An apparatus for high-throughput micro-cell culture with mechanical stimulation includes a cell culture vessel and a fluid pressure supply unit. The cell culture vessel has the membrane, a culture medium chamber, and a pressure chamber. The fluid pressure supply unit is connected fluidly to the pressure chamber, and has a fluid pressure supply device and a control device. The membrane vibrates when the fluid pressure in the pressure chamber is varied. The apparatus provides mechanical stimulation to the cultured cells in a controllable manner.