Patents by Inventor Wei-Jhe Tzai

Wei-Jhe Tzai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Measurement method of overlay mark
    Patent number: 9007571
    Abstract: A measurement method of an overlay mark is provided. An overlay mark on a wafer is measured with a plurality of different wavelength regions of an optical measurement tool, so as to obtain a plurality of overlay values corresponding to the wavelength regions. The overlay mark on the wafer is measured with an electrical measurement tool to obtain a reference overlay value. The wavelength region that corresponds to the overlay value closest to the reference overlay value is determined as a correct wavelength region for the overlay mark.
    Type: Grant
    Filed: August 20, 2013
    Date of Patent: April 14, 2015
    Assignee: United Microelectronics Corp.
    Inventors: Wei-Jhe Tzai, Kuei-Chun Hung, Chun-Chi Yu, Chien-Hao Chen, Chia-Ching Lin
  • MEASUREMENT METHOD OF OVERLAY MARK
    Publication number: 20150055125
    Abstract: A measurement method of an overlay mark is provided. An overlay mark on a wafer is measured with a plurality of different wavelength regions of an optical measurement tool, so as to obtain a plurality of overlay values corresponding to the wavelength regions. The overlay mark on the wafer is measured with an electrical measurement tool to obtain a reference overlay value. The wavelength region that corresponds to the overlay value closest to the reference overlay value is determined as a correct wavelength region for the overlay mark.
    Type: Application
    Filed: August 20, 2013
    Publication date: February 26, 2015
    Applicant: United Microelectronics Corp.
    Inventors: Wei-Jhe Tzai, Kuei-Chun Hung, Chun-Chi Yu, Chien-Hao Chen, Chia-Ching Lin