Abstract: Methods and semiconductor devices are provided. A method includes determining a location of a polyimide opening (PIO) corresponding to an under-bump metallization (UBM) feature in a die. The die includes a substrate and an interconnect structure over the substrate. The method also includes determining a location of a stacked via structure in the interconnect structure based on the location of the PIO. The method further includes forming, in the interconnect structure, the stacked via structure comprising at most three stacked contact vias at the location of the PIO.

Abstract: A thin film transistor includes a gate electrode embedded in an insulating layer that overlies a substrate, a gate dielectric overlying the gate electrode, an active layer comprising a compound semiconductor material and overlying the gate dielectric, and a source electrode and drain electrode contacting end portions of the active layer. The gate dielectric may have thicker portions over interfaces with the insulating layer to suppress hydrogen diffusion therethrough. Additionally or alternatively, a passivation capping dielectric including a dielectric metal oxide material may be interposed between the active layer and a dielectric layer overlying the active layer to suppress hydrogen diffusion therethrough.

Abstract: An epi-cone shell light-sheet super-resolution system and an epi-fluorescence microscope are provided. The epi-cone shell light-sheet super-resolution system includes a light-emitting element, a lens set, and an objective lens. After passing through the lens set, the excitation light emitted by the light-emitting element is refracted into ring-shaped light and focused on the objective-lens back-focal plane. The objective lens focuses the ring-shaped light to form a ring-shaped light cone which is then focused on the sample position. The ring-shaped light cone has a fixed thickness. In addition, the same objective lens is used for both excitation and imaging, thus achieving an epi-fluorescence microscope.

Abstract: An epi-cone shell light-sheet super-resolution system and an epi-fluorescence microscope are provided. The epi-cone shell light-sheet super-resolution system includes a light-emitting element, a lens set, and an objective lens. After passing through the lens set, the excitation light emitted by the light-emitting element is refracted into ring-shaped light and focused on the objective-lens back-focal plane. The objective lens focuses the ring-shaped light to form a ring-shaped light cone which is then focused on the sample position. The ring-shaped light cone has a fixed thickness. In addition, the same objective lens is used for both excitation and imaging, thus achieving an epi-fluorescence microscope.