Abstract: A method is provided. The method includes: applying a first voltage to a first test key, the first test key being positioned in a first portion of a first interconnect structure overlying an interposer and underlying an integrated circuit die, the first portion overlapping an opening defined by a plurality of bumps of the integrated circuit die; during applying the first voltage, measuring first electrical resistance of the first test key; in response to the first electrical resistance being below a first threshold value, determining that first delamination is present in the first interconnect structure; and in response to the first electrical resistance exceeding a second threshold value that exceeds the first threshold value, determining that first delamination is not present in the first interconnect structure.

Abstract: A semiconductor device includes a substrate, a seal ring, sensing devices, conductive towers, and an insulation layer. The substrate has a circuit region and a peripheral region around the circuit region. The seal ring is formed over the substrate and disposed in the peripheral region. The sensing devices are formed over the substrate and disposed between the seal ring and the circuit region. The conductive towers are formed over the substrate and disposed between the seal ring and the sensing devices. The conductive towers are configured to provide discharge paths for the sensing devices. The insulation layer is formed over the substrate. The seal ring, the sensing devices and the conductive towers are formed within the insulation layer.

Abstract: A method for inspecting a bonded structure includes: bonding a first semiconductor structure to a second semiconductor structure through a plurality of first conductive connectors between a first surface of the first semiconductor structure and the second semiconductor structure, wherein the first conductive connectors are electrically connected to each other by a plurality of first conductive lines within the second semiconductor structure; applying a voltage to the first conductive connectors through at least one of a plurality of second conductive connectors to obtain an electrical parameter, wherein the second conductive connectors are disposed at a second surface of the first semiconductor structure and electrically connected to the first conductive connectors; and evaluating a bonding status associated with the first conductive connectors according to the electrical parameter. The first conductive connectors are arranged adjacent to a corner or a periphery of the first semiconductor structure.

Abstract: A semiconductor device includes a bottom die and a top die. The includes a first test pad set, a second test pad set, a first bottom BPM set electrically connected with the first test pad set, and a second bottom BPM set electrically connected with the second test pad set. The top die includes a first top BPM set bonding to the first bottom BPM set, and a second top BPM set bonding to the second bottom BPM set. The first test pad set has a test pad area, the first bottom BPM set has a first bottom BPM area, and the second bottom BPM set has a second bottom BPM area. The test pad area is greater than the first bottom BPM area and the second bottom BPM area, and the first bottom BPM area is equal to or less than the second bottom BPM area.

Abstract: Some embodiments relate to an integrated device, including: a first interconnect structure on a first substrate; a first central bond pad coupled to the first interconnect structure; a first peripheral bond pad on a first side of the first central bond pad separated by a first distance; a second peripheral bond pad on a second side of the first central bond pad and separated by a second distance substantially equal to the first distance; a second interconnect structure on a second substrate; a first overlying bond pad coupled to the second interconnect structure and bonded to the first central bond pad; and a plurality of exposed bond pads respectively coupled to the first central bond pad, the first peripheral bond pad, the second peripheral bond pad, and the first overlying bond pad, wherein the plurality of exposed bond pads extend past outer sidewalls of the second substrate.

Abstract: An integrated circuit package includes a substrate, a semiconductor interposer on the substrate, and a first integrated circuit chip on the interposer. The interposer includes a galvanic effect test structure including a test contact pad and a detection contact pad. The interposer includes a plurality of primary contact pads electrically coupled to the first integrated circuit chip. The galvanic effect structure can be utilized to test the interposer for galvanic corrosion prior to assembling the interposer into the integrated circuit package.

Abstract: A semiconductor includes a first substrate having a device region and a ring region surrounding the device region, a first interconnect structure over the first substrate, the first interconnect structure including a first via tower and a second via tower, a first bonding layer over the first interconnect structure and including a first metal bonding feature, a second bonding layer over the first bonding layer and including a second metal bonding feature in contact with the first metal bonding feature, and a second interconnect structure over the second bonding layer and including a third via tower extending through the second interconnect structure and disposed directly over the ring region. The first via tower is electrically coupled to the second via tower by a first metal line. The first via tower is electrically coupled to the third via tower by the first metal bonding feature and the second metal bonding feature.

Abstract: A semiconductor structure includes: a first semiconductor die or wafer including a first bonding crack detection structure portion including discrete bonding crack detection structure portions that are electrically isolated, and a second semiconductor die or wafer bonded to the first semiconductor die, the second semiconductor die or wafer including a second bonding crack detection structure portion including discrete bonding crack detection structure portions that are electrically isolated, wherein the first bonding crack detection structure portion and the second bonding crack detection structure portion are bonded together to form a bonding crack detection structure.

Abstract: A method for fabricating a semiconductor device is provided. The method includes forming a transistor over a semiconductor substrate; forming an interconnect structure including a test structure; forming conductive pads respectively electrically connected with nodes of the test structure, and performing a probe test on the conductive pads. A tower of the test structure connected between the two nodes includes at least one test metal via of a first via layer, at least one test metal via of a second via layer, and at least one test metal via of a third via layer. A size of the test metal via of the second via layer is less than a size of the test metal via of the third via layer, and a number of the test metal via of the second via layer is less than a number of the test metal via of the first via layer.

Abstract: A semiconductor includes a first substrate having a device region and a ring region surrounding the device region, a first interconnect structure over the first substrate, the first interconnect structure including a first via tower and a second via tower, a first bonding layer over the first interconnect structure and including a first metal bonding feature, a second bonding layer over the first bonding layer and including a second metal bonding feature in contact with the first metal bonding feature, and a second interconnect structure over the second bonding layer and including a third via tower extending through the second interconnect structure and disposed directly over the ring region. The first via tower is electrically coupled to the second via tower by a first metal line. The first via tower is electrically coupled to the third via tower by the first metal bonding feature and the second metal bonding feature.

Abstract: A semiconductor device includes a first circuit area disposed over a substrate and enclosed by a first seal ring structure, a second circuit area disposed over the substrate and enclosed by a second seal ring structure, an internal scribe line disposed between the first circuit area and the second circuit area, and connecting seal structures connecting the first seal ring structure and the second seal ring structures such that a part of the first seal ring structure, a part of the second seal ring structure and the connecting seal structures enclose the internal scribe line.

Abstract: A method for inline inspection during semiconductor wafer fabrication is provided. The method includes forming a plurality of test structures on a semiconductor wafer along two opposite directions. An offset distance between a sample feature and a target feature of each of the test structures increases gradually along the two opposite directions. The method further includes producing an image of the test structures. The method also includes performing image analysis of the image to recognize a position with an extreme of a gray level. In addition, the method includes calculating an overlay error according to the recognized position.

Abstract: A method for inline inspection during semiconductor wafer fabrication is provided. The method includes forming a plurality of test structures on a semiconductor wafer along two opposite directions. An offset distance between a sample feature and a target feature of each of the test structures increases gradually along the two opposite directions. The method further includes producing an image of the test structures. The method also includes performing image analysis of the image to recognize a position with an extreme of a gray level. In addition, the method includes calculating an overlay error according to the recognized position.

Abstract: A method for inline inspection during semiconductor wafer fabrication is provided. The method includes forming a plurality of test structures on a semiconductor wafer along two opposite directions. An offset distance between a sample feature and a target feature of each of the test structures increases gradually along the two opposite directions. The method further includes producing an image of the test structures. The method also includes performing image analysis of the image to recognize a position with an extreme of a gray level. In addition, the method includes calculating an overlay error according to the recognized position.

Abstract: A method for inline inspection during semiconductor wafer fabrication is provided. The method includes forming a plurality of test structures on a semiconductor wafer along two opposite directions. An offset distance between a sample feature and a target feature of each of the test structures increases gradually along the two opposite directions. The method further includes producing an image of the test structures. The method also includes performing image analysis of the image to recognize a position with an extreme of a gray level. In addition, the method includes calculating an overlay error according to the recognized position.

Abstract: A method for producing capacitor-node contact plugs of a dynamic random access memory, comprising: providing a semiconductor substrate; forming at least one gate structure separated by a first isolation layer as a word line, and forming a source region and a drain region next to the word line; forming a second isolation layer to cover the first isolation layer, word line, source region, and drain region; forming a first landing pad, which passes through the second isolation layer and couples to the source region, wherein the first landing pad is offset a given distance along the word line; forming a third isolation layer to cover the second isolation layer and the first landing pad; forming a second landing pad coupled to the drain region through the second isolation layer and the third isolation layer; forming at least one bit line separated by a fourth isolation layer along the vertical direction to the word line, wherein the at least one bit line is coupled to the second landing pad; forming a fifth isolat

Abstract: A method for forming planarized isolation using a nitride hard mask and two CMP steps is described. A first nitride layer is deposited over a pad oxide layer on the surface of a semiconductor substrate. The first nitride and pad oxide layers are etched through where they are not covered by a mask to provide at least one wide opening and at least one narrow opening where the surface of the substrate is exposed. Trenches are etched into the substrate where it is exposed. An oxide layer is deposited overlying the first nitride layer and within the trenches completely filling the narrow trench wherein a trough is formed over the wide trench. A second nitride layer is deposited over the oxide layer. The second nitride layer is polished away with a polish stop at the oxide layer whereby the second nitride layer is removed except: where it lies within the trough.

Abstract: A method divides the formation of the contact plug connecting a source/drain region in the peripheral circuit area into two steps, wherein the capacitor can be fabricated at the same time so as to save one mask. Besides, at each step of forming the contact plug with low aspect ratio, a CVD method is utilized to uniformly deposited a barrier layer on the contact window and completely fill the contact window. This can thoroughly eliminate the defects found in the prior art. Consequently, the simplified process can reduce the manufacturing period time and the production cost.

Abstract: A method for fabricating self-aligned contacts using elevated trench isolation, selective contact plug deposition and planarization starting at the device level. The process begins by successively forming a gate oxide layer and a first gate electrode layer on a silicon substrate. Next, fully planarized trench isolation regions are formed using sacrificial oxide and nitride layers and selective etching. A sacrificial pad oxide layer and a first sacrificial nitride layer are formed. The first sacrificial nitride layer, the sacrificial pad oxide layer, the first gate electrode layer, the gate oxide layer, and the silicon substrate are patterned to form trenches. A fill oxide layer is deposited in the trenches and over the first sacrificial nitride layer. An oxide etch is performed which recesses the fill oxide layer in the trenches below the level of the top of the first nitride layer. A second sacrificial nitride layer is formed on the fill oxide layer and over the first sacrificial nitride layer.

Abstract: A method of fabricating a crown capacitor comprises first providing a substrate having a transistor, constituted by at least one diffused region, formed thereon and overlaid by a first insulating layer. Bit lines are formed in the first insulating layer. A first masking layer and a second insulating layer are sequentially formed over the substrate. The second insulating layer, the first masking layer and the first insulating layer are patterned to form a contact hole that exposes the diffused region. A second masking layer is conformally formed and etched back to form masking spacers on the sidewalls of the contact hole. The second insulating layer is removed. A first conductive layer is conformally formed over the first masking layer and extending to the surface of the masking spacers and the bottom of the contact hole. A third insulating layer is formed over the first conductive layer and fills the contact hole.