Patents by Inventor Wei-Wei Zhuang

Wei-Wei Zhuang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6911361
    Abstract: A method of applying a PCMO thin film on an iridium substrate for use in a RRAM device, includes preparing a substrate; depositing a barrier layer on the substrate; depositing a layer of iridium on the barrier layer; spin coating a layer of PCMO on the iridium; baking the PCMO and substrate in a three-step baking process; post-bake annealing the substrate and the PCMO in a RTP chamber; repeating said spin coating, baking and annealing steps until the PCMO has a desired thickness; annealing the substrate and PCMO; depositing a top electrode; and completing the RRAM device.
    Type: Grant
    Filed: March 10, 2003
    Date of Patent: June 28, 2005
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Fengyan Zhang, Wei-Wei Zhuang, Wei Pan, Sheng Teng Hsu
  • Publication number: 20050136602
    Abstract: A memory array dual-trench isolation structure and a method for forming the same have been provided.
    Type: Application
    Filed: January 19, 2005
    Publication date: June 23, 2005
    Inventors: Sheng Hsu, Wei Pan, Wei-Wei Zhuang
  • Patent number: 6905937
    Abstract: Resistive cross-point memory devices are provided, along with methods of manufacture and use. The memory devices are comprised by an active layer of resistive memory material interposed between upper electrodes and lower electrodes. A bit region located within the resistive memory material at the cross-point of an upper electrode and a lower electrode has a resistivity that can change through a range of values in response to application of one, or more, voltage pulses. Voltage pulses may be used to increase the resistivity of the bit region, decrease the resistivity of the bit region, or determine the resistivity of the bit region. A diode is formed between at the interface between the resistive memory material and the lower electrodes, which may be formed as doped regions. The resistive cross-point memory device is formed by doping lines within a substrate one polarity, and then doping regions of the lines the opposite polarity to form diodes.
    Type: Grant
    Filed: March 17, 2003
    Date of Patent: June 14, 2005
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Sheng Teng Hsu, Wei Pan, Wei-Wei Zhuang
  • Patent number: 6899858
    Abstract: A method of preparing a hafnium nitrate thin film includes placing phosphorus pentoxide in a first vessel; connecting the first vessel to a second vessel containing hafnium tetrachloride; cooling the second vessel with liquid nitrogen; dropping fuming nitric acid into the first vessel producing N2O5 gas; allowing the N2O5 gas to enter the second vessel; heating the first vessel until the reaction is substantially complete; disconnecting the two vessels; removing the second vessel from the liquid nitrogen bath; heating the second vessel; refluxing the contents of the second vessel; drying the compound in the second vessel by dynamic pumping; purifying the compound in the second vessel by sublimation to form Hf(NO3)4, and heating the Hf(NO3)4 to produce HfO2 for use in an ALCVD process.
    Type: Grant
    Filed: January 23, 2003
    Date of Patent: May 31, 2005
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Wei-Wei Zhuang, David R. Evans, Sheng Teng Hsu
  • Patent number: 6897074
    Abstract: A method for forming a doped PGO ferroelectric thin film, and related doped PGO thin film structures are described. The method comprising: forming either an electrically conductive or electrically insulating substrate; forming a doped PGO film overlying the substrate; annealing; crystallizing; and, forming a single-phase c-axis doped PGO thin film overlying the substrate, having a Curie temperature of greater than 200 degrees C. Forming a doped PGO film overlying the substrate includes depositing a doped precursor in the range between 0.1N and 0.5N, with a molecular formula of Pby-xMxGe3O11, where: M is a doping element; y=4.5 to 6; and, x=0.1 to 1. The element M can be Sn, Ba, Sr, Cd, Ca, Pr, Ho, La, Sb, Zr, or Sm.
    Type: Grant
    Filed: March 3, 2004
    Date of Patent: May 24, 2005
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Fengyan Zhang, Wei-Wei Zhuang, Jong-Jan Lee, Sheng Teng Hsu
  • Patent number: 6887523
    Abstract: An MOCVD process is provided for forming metal-containing films having the general formula M?xM?(1?x)MyOz, wherein M? is a metal selected from the group consisting of La, Ce, Pr, Nd, Pm, Sm, Y, Sc, Yb, Lu, and Gd; M? is a metal selected from the group consisting of Mg, Ca, Sr, Ba, Pb, Zn, and Cd; M is a metal selected from the group consisting of Mn, Ce, V, Fe, Co, Nb, Ta, Cr, Mo, W, Zr, Hf and Ni; x has a value from 0 to 1; y has a value of 0, 1 or 2; and z has an integer value of 1 through 7. The MOCVD process uses precursors selected from alkoxide precursors, ?-diketonate precursors, and metal carbonyl precursors in combination to produce metal-containing films, including resistive memory materials.
    Type: Grant
    Filed: December 20, 2002
    Date of Patent: May 3, 2005
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Wei-Wei Zhuang, Sheng Teng Hsu, Wei Pan
  • Publication number: 20050083757
    Abstract: Resistive cross-point memory devices are provided, along with methods of manufacture and use. The memory devices are comprised by an active layer of resistive memory material interposed between upper electrodes and lower electrodes. A bit region located within the resistive memory material at the cross-point of an upper electrode and a lower electrode has a resistivity that can change through a range of values in response to application of one, or more, voltage pulses. Voltage pulses may be used to increase the resistivity of the bit region, decrease the resistivity of the bit region, or determine the resistivity of the bit region. A diode is formed between at the interface between the resistive memory material and the lower electrodes, which may be formed as doped regions. The resistive cross-point memory device is formed by doping lines within a substrate one polarity, and then doping regions of the lines the opposite polarity to form diodes.
    Type: Application
    Filed: October 21, 2004
    Publication date: April 21, 2005
    Inventors: Sheng Hsu, Wei Pan, Wei-Wei Zhuang
  • Patent number: 6875651
    Abstract: A memory array dual-trench isolation structure and a method for forming the same have been provided.
    Type: Grant
    Filed: January 23, 2003
    Date of Patent: April 5, 2005
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Sheng Teng Hsu, Wei Pan, Wei-Wei Zhuang
  • Patent number: 6876521
    Abstract: A solid-state inductor and a method for forming a solid-state inductor are provided. The method comprises: forming a bottom electrode; forming a colossal magnetoresistance (CMR) thin film overlying the bottom electrode; forming a top electrode overlying the CMR thin film; applying an electrical field treatment to the CMR thin film in the range of 0.4 to 1 megavolts per centimeter (MV/cm) with a pulse width in the range of 100 nanoseconds (ns) to 1 millisecond (ms); in response to the electrical field treatment, converting the CMR thin film into a CMR thin film inductor; applying a bias voltage between the top and bottom electrodes; and, in response to the applied bias voltage, creating an inductance between the top and bottom electrodes. When the applied bias voltage is varied, the inductance varies in response.
    Type: Grant
    Filed: November 10, 2003
    Date of Patent: April 5, 2005
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Wei Pan, Sheng Teng Hsu, Wei-Wei Zhuang
  • Publication number: 20050054119
    Abstract: A method is provided for forming a buffered-layer memory cell. The method comprises: forming a bottom electrode; forming a colossal magnetoresistance (CMR) memory film overlying the bottom electrode; forming a memory-stable semiconductor buffer layer, typically a metal oxide, overlying the memory film; and, forming a top electrode overlying the semiconductor buffer layer. In some aspects of the method the semiconductor buffer layer is formed from YBa2Cu3O7?X (YBCO), indium oxide (In2O3), or ruthenium oxide (RuO2), having a thickness in the range of 10 to 200 nanometers (nm). The top and bottom electrodes may be TiN/Ti, Pt/TiN/Ti, In/TiN/Ti, PtRhOx compounds, or PtIrOx compounds. The CMR memory film may be a Pr1?XCaXMnO3 (PCMO) memory film, where x is in the region between 0.1 and 0.6, with a thickness in the range of 10 to 200 nm.
    Type: Application
    Filed: January 12, 2004
    Publication date: March 10, 2005
    Inventors: Sheng Hsu, Tingkai Li, Fengyan Zhang, Wei Pan, Wei-Wei Zhuang, David Evans, Masayuki Tajiri
  • Publication number: 20050054138
    Abstract: Resistive cross-point memory devices are provided, along with methods of manufacture and use. The memory devices are comprised by an active layer of resistive memory material interposed between upper electrodes and lower electrodes. A bit region located within the resistive memory material at the cross-point of an upper electrode and a lower electrode has a resistivity that can change through a range of values in response to application of one, or more, voltage pulses. Voltage pulses may be used to increase the resistivity of the bit region, decrease the resistivity of the bit region, or determine the resistivity of the bit region. A diode is formed between at the interface between the resistive memory material and the lower electrodes, which may be formed as doped regions, isolated from each other by shallow trench isolation.
    Type: Application
    Filed: October 21, 2004
    Publication date: March 10, 2005
    Inventors: Sheng Hsu, Wei Pan, Wei-Wei Zhuang
  • Publication number: 20050052942
    Abstract: Resistive cross-point memory devices are provided, along with methods of manufacture and use. The memory devices are comprised by an active layer of resistive memory material interposed between upper electrodes and lower electrodes. A bit region located within the resistive memory material at the cross-point of an upper electrode and a lower electrode has a resistivity that can change through a range of values in response to application of one, or more, voltage pulses. Voltage pulses may be used to increase the resistivity of the bit region, decrease the resistivity of the bit region, or determine the resistivity of the bit region. A diode is formed between at the interface between the resistive memory material and the lower electrodes, which may be formed as doped regions, isolated from each other by shallow trench isolation.
    Type: Application
    Filed: October 21, 2004
    Publication date: March 10, 2005
    Inventors: Sheng Hsu, Wei Pan, Wei-Wei Zhuang
  • Patent number: 6861687
    Abstract: Resistive cross point memory devices are provided, along with methods of manufacture and use. The memory device comprises an active layer of perovskite material interposed between upper electrodes and lower electrodes. A bit region located within the active layer at the cross point of an upper electrode and a lower electrode has a resistivity that can change through a range of values in response to application of one, or more, voltage pulses. Voltage pulses may be used to increase the resistivity of the bit region, decrease the resistivity of the bit region, or determine the resistivity of the bit region. Memory circuits are provided to aid in the programming and read out of the bit region.
    Type: Grant
    Filed: January 15, 2003
    Date of Patent: March 1, 2005
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Sheng Teng Hsu, Wei-Wei Zhuang
  • Patent number: 6858905
    Abstract: Low cross talk resistive cross point memory devices are provided, along with methods of manufacture and use. The memory device comprises a bit formed using a perovskite material interposed at a cross point of an upper electrode and lower electrode. Each bit has a resistivity that can change through a range of values in response to application of one, or more, voltage pulses. Voltage pulses may be used to increase the resistivity of the bit, decrease the resistivity of the bit, or determine the resistivity of the bit. Memory circuits are provided to aid in the programming and read out of the bit region.
    Type: Grant
    Filed: November 13, 2003
    Date of Patent: February 22, 2005
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Sheng Teng Hsu, Wei-Wei Zhuang
  • Publication number: 20050037520
    Abstract: A method for obtaining reversible resistance switches on a PCMO thin film when integrated with a highly crystallized seed layer includes depositing, by MOCVD, a seed layer of PCMO, in highly crystalline form, thin film, having a thickness of between about 50 ? to 300 ?, depositing a second PCMO thin film layer on the seed layer, by spin coating, having a thickness of between about 500 ? to 3000 ?, to form a combined PCMO layer; increasing the resistance of the combined PCMO film in a semiconductor device by applying a negative electric pulse of between about ?4V to ?5V, having a pulse width of between about 75 nsec to 1 ?sec; and decreasing the resistance of the combined PCMO layer in a semiconductor device by applying a positive electric pulse of between about +2.5V to +4V, having a pulse width greater than 2.0 ?sec.
    Type: Application
    Filed: August 13, 2003
    Publication date: February 17, 2005
    Inventors: Wei-Wei Zhuang, Tingkai Li, David Evans, Sheng Hsu, Wei Pan
  • Patent number: 6849891
    Abstract: A RRAM memory cell is formed on a silicon substrate having a operative junction therein and a metal plug formed thereon, includes a first oxidation resistive layer; a first refractory metal layer; a CMR layer; a second refractory metal layer; and a second oxidation resistive layer. A method of fabricating a multi-layer electrode RRAM memory cell includes preparing a silicon substrate; forming a junction in the substrate taken from the group of junctions consisting of N+ junctions and P+ junctions; depositing a metal plug on the junction; depositing a first oxidation resistant layer on the metal plug; depositing a first refractory metal layer on the first oxidation resistant layer; depositing a CMR layer on the first refractory metal layer; depositing a second refractory metal layer on the CMR layer; depositing a second oxidation resistant layer on the second refractory metal layer; and completing the RRAM memory cell.
    Type: Grant
    Filed: December 8, 2003
    Date of Patent: February 1, 2005
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Sheng Teng Hsu, Wei Pan, Fengyan Zhang, Wei-Wei Zhuang, Tingkai Li
  • Patent number: 6849564
    Abstract: A low-capacitance one-resistor/one-diode (1R1D) R-RAM array with a floating p-well is provided. The fabrication method comprises: forming an integrated circuit (IC) substrate; forming an n-doped buried layer (buried n layer) of silicon overlying the substrate; forming n-doped silicon sidewalls overlying the buried n layer; forming a p-doped well of silicon (p-well) overlying the buried n layer; and, forming a 1R1D R-RAM array overlying the p-well. Typically, the combination of the buried n layer and the n-doped sidewalls form an n-doped well (n-well) of silicon. Then, the p-well is formed inside the n-well. In other aspects, the p-well has sidewalls, and the method further comprises: forming an oxide insulator overlying the p-well sidewalls, between the n-well and the R-RAM array.
    Type: Grant
    Filed: February 27, 2003
    Date of Patent: February 1, 2005
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Sheng Teng Hsu, Wei Pan, Wei-Wei Zhuang, Fengyan Zhang
  • Publication number: 20050009286
    Abstract: A method of fabricating a nano-scale resistance cross-point memory array includes preparing a silicon substrate; depositing silicon oxide on the substrate to a predetermined thickness; forming a nano-scale trench in the silicon oxide; depositing a first connection line in the trench; depositing a memory resistor layer in the trench on the first connection line; depositing a second connection line in the trench on the memory resistor layer; and completing the memory array. A cross-point memory array includes a silicon substrate; a first connection line formed on the substrate; a colossal magnetoresistive layer formed on the first connection line; a silicon nitride layer formed on a portion of the colossal magnetoresistive layer; and a second connection line formed adjacent the silicon nitride layer and on the colossal magnetoresistive layer.
    Type: Application
    Filed: July 29, 2004
    Publication date: January 13, 2005
    Inventors: Sheng Hsu, Wei-Wei Zhuang, Wei Pan, Fengyan Zhang
  • Patent number: 6841833
    Abstract: A drain loaded 1T1R resistive memory device and 1T1R resistive memory array are provided. The resistive memory array comprises an array of drain loaded 1T1R resistive memory device structures. Word lines are connected across transistor gates, while a resistive elements are connected between transistor gates and bit lines. The resistive element comprises a material with a resistance that is changed electrically, for example using a sequence of electric pulses. The resistive element may comprise PCMO.
    Type: Grant
    Filed: June 3, 2003
    Date of Patent: January 11, 2005
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Sheng Teng Hsu, Wei-Wei Zhuang
  • Patent number: 6825058
    Abstract: Resistive cross-point memory devices are provided, along with methods of manufacture and use. The memory devices are comprised by an active layer of resistive memory material interposed between upper electrodes and lower electrodes. A bit region located within the resistive memory material at the cross-point of an upper electrode and a lower electrode has a resistivity that can change through a range of values in response to application of one, or more, voltage pulses. Voltage pulses may be used to increase the resistivity of the bit region, decrease the resistivity of the bit region, or determine the resistivity of the bit region. A diode is formed between at the interface between the resistive memory material and the lower electrodes, which may be formed as doped regions, isolated from each other by shallow trench isolation.
    Type: Grant
    Filed: March 17, 2003
    Date of Patent: November 30, 2004
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Sheng Teng Hsu, Wei Pan, Wei-Wei Zhuang