Patent number: 6887523
Abstract: An MOCVD process is provided for forming metal-containing films having the general formula M?xM?(1?x)MyOz, wherein M? is a metal selected from the group consisting of La, Ce, Pr, Nd, Pm, Sm, Y, Sc, Yb, Lu, and Gd; M? is a metal selected from the group consisting of Mg, Ca, Sr, Ba, Pb, Zn, and Cd; M is a metal selected from the group consisting of Mn, Ce, V, Fe, Co, Nb, Ta, Cr, Mo, W, Zr, Hf and Ni; x has a value from 0 to 1; y has a value of 0, 1 or 2; and z has an integer value of 1 through 7. The MOCVD process uses precursors selected from alkoxide precursors, ?-diketonate precursors, and metal carbonyl precursors in combination to produce metal-containing films, including resistive memory materials.
Type:
Grant
Filed:
December 20, 2002
Date of Patent:
May 3, 2005
Assignee:
Sharp Laboratories of America, Inc.
Inventors:
Wei-Wei Zhuang, Sheng Teng Hsu, Wei Pan