Patents by Inventor Weichun LUO

Weichun LUO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for adjusting effective work function of metal gate
    Patent number: 9831089
    Abstract: A method for adjusting an effective work function of a metal gate. The method includes forming a metal gate arrangement comprising at least a metal work function layer, and performing plasma treatment on at least one layer in the metal gate arrangement. In this way, it is possible to adjust the effective work function of the metal gate in a relatively flexible way.
    Type: Grant
    Filed: August 30, 2013
    Date of Patent: November 28, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Hong Yang, Wenwu Wang, Jiang Yan, Weichun Luo
  • METHOD FOR ADJUSTING EFFECTIVE WORK FUNCTION OF METAL GATE
    Publication number: 20160240382
    Abstract: A method for adjusting an effective work function of a metal gate. The method includes forming a metal gate arrangement comprising at least a metal work function layer, and performing plasma treatment on at least one layer in the metal gate arrangement. In this way, it is possible to adjust the effective work function of the metal gate in a relatively flexible way.
    Type: Application
    Filed: August 30, 2013
    Publication date: August 18, 2016
    Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Hong YANG, Wenwu WANG, Jiang YAN, Weichun LUO