Patents by Inventor Weifeng CHENG

Weifeng CHENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SHOWERHEAD FACEPLATE CONFIGURATIONS
    Publication number: 20250054734
    Abstract: A showerhead for processing a substrate comprises a backplate and a faceplate attached to the backplate. The faceplate comprises a first surface facing the backplate, a second surface opposite to the first surface, and a plurality of through holes extending between the first and second surfaces. At least one of the first and second surfaces is at least partially contoured.
    Type: Application
    Filed: November 17, 2022
    Publication date: February 13, 2025
    Inventors: Bin LUO, Stephen TOPPING, Keith Joseph MARTIN, Weifeng CHENG, Yogesh BABBAR, Pramod SUBRAMONIUM