Abstract: A multi-stage dry Roots vacuum pump, including a pump body, multi-stage Roots working units and a plurality of drive components. The pump body is provided with a plurality of independent working chambers, and airflow channels communicating the various working chambers; the airflow channels are communicated with outside; the Roots working units of each stage include driving Roots rotors and driven Roots rotors; the driving Roots rotors and driven Roots rotors are positioned in the working chambers; and the various drive components are respectively used for driving the driving Roots rotors and driven Roots rotors positioned in the various working chambers to rotate towards opposite directions at the same rotating speed. The Roots working units of various stages may be randomly distributed at various positions of the pump body on premise of ensuring that the airflow channels can communicate the working chambers of each stage.

Abstract: A multi-stage dry Roots vacuum pump, including a pump body, multi-stage Roots working units and a plurality of drive components. The pump body is provided with a plurality of independent working chambers, and airflow channels communicating the various working chambers; the airflow channels are communicated with outside; the Roots working units of each stage include driving Roots rotors and driven Roots rotors; the driving Roots rotors and driven Roots rotors are positioned in the working chambers; and the various drive components are respectively used for driving the driving Roots rotors and driven Roots rotors positioned in the various working chambers to rotate towards opposite directions at the same rotating speed. The Roots working units of various stages may be randomly distributed at various positions of the pump body on premise of ensuring that the airflow channels can communicate the working chambers of each stage.