Patents by Inventor Wei-Li Hu

Wei-Li Hu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240047487
    Abstract: An image sensor device includes a semiconductor substrate having a first side, and a trench isolation structure dividing the substrate into sensing units. Each sensing unit includes a first gate electrode and a second gate electrode disposed on the first side, and a first pixel and a second pixel extending into the substrate and disposed between the first and second gate electrodes from a top view perspective. The first pixel is disposed under the second pixel and electrically connected to the first gate electrode, and the second pixel is electrically connected to the second gate electrode. A method of manufacturing a semiconductor structure includes forming a trench isolation in a semiconductor substrate; forming a first pixel in the substrate; forming a second pixel in the substrate over the first pixel; forming a first gate structure over the substrate; and forming a second gate structure over the second pixel.
    Type: Application
    Filed: August 8, 2022
    Publication date: February 8, 2024
    Inventors: FENG-CHIEN HSIEH, YUN-WEI CHENG, WEI-LI HU, KUO-CHENG LEE, CHENG-MING WU
  • Publication number: 20240021009
    Abstract: An image sensing apparatus is disclosed. The image sensing apparatus includes a pixel array and micro lenses disposed above the pixel array. The pixel array includes sensing pixels configured to capture minutia points of a fingerprint and positioning pixels configured to provide positioning codes.
    Type: Application
    Filed: March 22, 2023
    Publication date: January 18, 2024
    Inventors: Feng-Chien Hsieh, Yun-Wei Cheng, Kuo-Cheng Lee, Cheng-Ming Wu, Wei-Li Hu
  • Publication number: 20240006458
    Abstract: An image sensor device is disclosed which includes a semiconductor layer having a first surface and a second surface, where the second surface is opposite to the first surface. The device includes a conductive structure disposed over the first surface, with a dielectric layer disposed between the conductive structure and the first surface. The device includes a first dielectric layer disposed over the second surface of the semiconductor substrate. The device includes a second dielectric layer disposed over the first dielectric layer. The device includes a color filter layer disposed over the second dielectric layer. In some embodiments, the thickness, refractive index, or both of the first dielectric layer and the thickness, refractive index, or both of the second dielectric layer may be collectively determined to cause incident radiation passing through the first dielectric layer and the second dielectric layer and to the plurality of pixels to have destructive interference.
    Type: Application
    Filed: August 4, 2023
    Publication date: January 4, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Feng-Chien Hsieh, Chia-Yen Hsu, Yun-Wei Cheng, Wei-Li Hu, Kuo-Cheng Lee, Hsin-Chi Chen
  • Patent number: 11837614
    Abstract: A subpixel including at least one second-conductivity-type pinned photodiode layer that forms a p-n junction with a substrate semiconductor layer, at least one floating diffusion region, and at least one transfer gate stack structure. The at least one transfer gate stack structure may at least partially laterally surround the at least one second-conductivity-type pinned photodiode layer with a total azimuthal extension angle in a range from 240 degrees to 360 degrees around a geometrical center of the second-conductivity-type pinned photodiode layer. The at least one transfer gate stack structure may include multiple edges that overlie different segments of a periphery of the at least one second-conductivity-type pinned photodiode layer, and the floating diffusion region includes a portion located between the first edge and the second edge. In addition, multiple transfer gate stack structures and multiple floating diffusion regions may be present in the subpixel.
    Type: Grant
    Filed: February 23, 2021
    Date of Patent: December 5, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Feng-Chien Hsieh, Yun-Wei Cheng, Wei-Li Hu, Kuo-Cheng Lee, Hsin-Chi Chen
  • Publication number: 20230387152
    Abstract: A pixel sensor includes a transfer fin field effect transistor (finFET) to transfer a photocurrent from a photodiode to a drain region. The transfer finFET includes at least a portion of the photodiode, an extension region associated with the drain region, a plurality of channel fins, and a transfer gate at least partially surrounding the channel fins to control the operation of the transfer finFET. In the transfer finFET, the transfer gate is wrapped around (e.g., at least three sides) of each of the channel fins, which provides a greater surface area over which the transfer gate is enabled to control the transfer of electrons. The greater surface area results in greater control over operation of the finFET, which may reduce switching times of the pixel sensor (which enables faster pixel sensor performance) and may reduce leakage current of the pixel sensor relative to a planar transfer transistor.
    Type: Application
    Filed: August 10, 2023
    Publication date: November 30, 2023
    Inventors: Feng-Chien HSIEH, Yun-Wei CHENG, Wei-Li HU, Kuo-Cheng LEE, Cheng-Ming WU
  • Publication number: 20230369361
    Abstract: A subpixel including at least one second-conductivity-type pinned photodiode layer that forms a p-n junction with a substrate semiconductor layer, at least one floating diffusion region, and at least one transfer gate stack structure. The at least one transfer gate stack structure may at least partially laterally surround the at least one second-conductivity-type pinned photodiode layer with a total azimuthal extension angle in a range from 240 degrees to 360 degrees around a geometrical center of the second-conductivity-type pinned photodiode layer. The at least one transfer gate stack structure may include multiple edges that overlie different segments of a periphery of the at least one second-conductivity-type pinned photodiode layer, and the floating diffusion region includes a portion located between the first edge and the second edge. In addition, multiple transfer gate stack structures and multiple floating diffusion regions may be present in the subpixel.
    Type: Application
    Filed: July 25, 2023
    Publication date: November 16, 2023
    Inventors: Feng-Chien Hsieh, Yun-Wei Cheng, Wei-Li Hu, Kuo-Cheng Lee, Hsin-Chi Chen
  • Publication number: 20230369369
    Abstract: Some implementations described herein provide pixel sensor configurations and methods of forming the same. In some implementations, one or more transistors of a pixel sensor are included on a circuitry die (e.g., an application specific integrated circuit (ASIC) die or another type of circuitry die) of an image sensor device. The one or more transistors may include a source follower transistor, a row select transistor, and/or another transistor that is used to control the operation of the pixel sensor. Including the one or more transistors of the pixel sensor (and other pixel sensors of the image sensor device) on the circuitry die reduces the area occupied by transistors in the pixel sensor on the sensor die. This enables the area for photon collection in the pixel sensor to be increased.
    Type: Application
    Filed: May 11, 2022
    Publication date: November 16, 2023
    Inventors: Feng-Chien HSIEH, Yun-Wei CHENG, Wei-Li HU, Kuo-Cheng LEE, Cheng-Ming WU
  • Patent number: 11810933
    Abstract: A method for fabricating an image sensor device is provided. The method includes forming a plurality of photosensitive pixels in a substrate; depositing a dielectric layer over the substrate; etching the dielectric layer, resulting in a first trench in the dielectric layer and laterally surrounding the photosensitive pixels; and forming a light blocking structure in the first trench, such that the light blocking structure laterally surrounds the photosensitive pixels.
    Type: Grant
    Filed: September 2, 2020
    Date of Patent: November 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Feng-Chien Hsieh, Yun-Wei Cheng, Wei-Li Hu, Kuo-Cheng Lee, Ying-Hao Chen
  • Publication number: 20230054664
    Abstract: The present invention is a multi-component fiber includes a core and a sheathing surrounding the core. The core includes a first aliphatic polyester or copolymer of an aliphatic polyester. The sheathing includes a second aliphatic polyester or copolymer of an aliphatic polyester or a polyamide, and a hydrophobic agent. The second aliphatic polyester or copolymer of an aliphatic polyester or a polyamide has a melt flow index of between about 0.5 and about 19.5 g/10 min using a 2.16 Kg weight at 190° C.
    Type: Application
    Filed: January 22, 2021
    Publication date: February 23, 2023
    Inventors: Mark V. Riofski, Ignatius A. Kadoma, Mikhail A, Belkin, Kristy A. Jost, Colby W. Dotseth, Kenneth A. Cox, Michael P. Mandanas, Xiaoling Huang, Wei Li Hu
  • Patent number: 11527563
    Abstract: A semiconductor structure includes a photodetector, which includes a substrate semiconductor layer having a doping of a first conductivity type, a second-conductivity-type photodiode layer that forms a p-n junction with the substrate semiconductor layer, a floating diffusion region that is laterally spaced from the second-conductivity-type photodiode layer, and a transfer gate electrode including a lower transfer gate electrode portion that is formed within the substrate semiconductor layer and located between the second-conductivity-type photodiode layer and the floating diffusion region. The transfer gate electrode may laterally surround the p-n junction, and may provide enhanced electron transmission efficiency from the p-n junction to the floating diffusion region. An array of photodetectors may be used to provide an image sensor.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: December 13, 2022
    Inventors: Feng-Chien Hsieh, Yun-Wei Cheng, Wei-Li Hu, Kuo-Cheng Lee, Hsin-Chi Chen
  • Publication number: 20220367546
    Abstract: A semiconductor structure includes a photodetector, which includes a substrate semiconductor layer having a doping of a first conductivity type, a second-conductivity-type photodiode layer that forms a p-n junction with the substrate semiconductor layer, a floating diffusion region that is laterally spaced from the second-conductivity-type photodiode layer, and a transfer gate electrode including a lower transfer gate electrode portion that is formed within the substrate semiconductor layer and located between the second-conductivity-type photodiode layer and the floating diffusion region. The transfer gate electrode may laterally surround the p-n junction, and may provide enhanced electron transmission efficiency from the p-n junction to the floating diffusion region. An array of photodetectors may be used to provide an image sensor.
    Type: Application
    Filed: July 19, 2022
    Publication date: November 17, 2022
    Inventors: Feng-Chien Hsieh, Yun-Wei Cheng, Wei-Li Hu, Kuo-Cheng Lee, Hsin-Chi Chen
  • Publication number: 20220367549
    Abstract: An image sensor device includes a substrate, photosensitive pixels, an interconnect structure, a dielectric layer, and a light blocking element. The photosensitive pixels are in the substrate. The interconnect structure is over a first side of the substrate. The dielectric layer is over a second side of the substrate opposite the first side of the substrate. The light blocking element has a first portion extending over a top surface of the dielectric layer and a second portion extending in the dielectric layer. The second portion of the light blocking element laterally surrounds the photosensitive pixels.
    Type: Application
    Filed: July 29, 2022
    Publication date: November 17, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Feng-Chien HSIEH, Yun-Wei CHENG, Wei-Li HU, Kuo-Cheng LEE, Ying-Hao CHEN
  • Publication number: 20220310687
    Abstract: A pixel sensor includes a transfer fin field effect transistor (finFET) to transfer a photocurrent from a photodiode to a drain region. The transfer finFET includes at least a portion of the photodiode, an extension region associated with the drain region, a plurality of channel fins, and a transfer gate at least partially surrounding the channel fins to control the operation of the transfer finFET. In the transfer finFET, the transfer gate is wrapped around (e.g., at least three sides) of each of the channel fins, which provides a greater surface area over which the transfer gate is enabled to control the transfer of electrons. The greater surface area results in greater control over operation of the finFET, which may reduce switching times of the pixel sensor (which enables faster pixel sensor performance) and may reduce leakage current of the pixel sensor relative to a planar transfer transistor.
    Type: Application
    Filed: March 26, 2021
    Publication date: September 29, 2022
    Inventors: Feng-Chien HSIEH, Yun-Wei CHENG, Wei-Li HU, Kuo-Cheng LEE, Cheng-Ming WU
  • Publication number: 20220285422
    Abstract: An image sensor device is disclosed which includes a semiconductor layer having a first surface and a second surface, where the second surface is opposite to the first surface. The device includes a conductive structure disposed over the first surface, with a dielectric layer disposed between the conductive structure and the first surface. The device includes a first dielectric layer disposed over the second surface of the semiconductor substrate. The device includes a second dielectric layer disposed over the first dielectric layer. The device includes a color filter layer disposed over the second dielectric layer. In some embodiments, the thickness, refractive index, or both of the first dielectric layer and the thickness, refractive index, or both of the second dielectric layer may be collectively determined to cause incident radiation passing through the first dielectric layer and the second dielectric layer and to the plurality of pixels to have destructive interference.
    Type: Application
    Filed: March 4, 2021
    Publication date: September 8, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Feng-Chien Hsieh, Chia-Yen Hsu, Yun-Wei Cheng, Wei-Li Hu, Kuo-Cheng Lee, Hsin-Chi Chen
  • Publication number: 20220271075
    Abstract: A subpixel including at least one second-conductivity-type pinned photodiode layer that forms a p-n junction with a substrate semiconductor layer, at least one floating diffusion region, and at least one transfer gate stack structure. The at least one transfer gate stack structure may at least partially laterally surround the at least one second-conductivity-type pinned photodiode layer with a total azimuthal extension angle in a range from 240 degrees to 360 degrees around a geometrical center of the second-conductivity-type pinned photodiode layer. The at least one transfer gate stack structure may include multiple edges that overlie different segments of a periphery of the at least one second-conductivity-type pinned photodiode layer, and the floating diffusion region includes a portion located between the first edge and the second edge. In addition, multiple transfer gate stack structures and multiple floating diffusion regions may be present in the subpixel.
    Type: Application
    Filed: February 23, 2021
    Publication date: August 25, 2022
    Inventors: Feng-Chien Hsieh, Yun-Wei Cheng, Wei-Li Hu, Kuo-Cheng Lee, Hsin-Chi Chen
  • Patent number: 11258971
    Abstract: A photodetector circuit includes a photodetector and a sensing circuit located over a substrate semiconductor layer having a doping of a first conductivity type. The photodetector includes a second-conductivity-type pinned photodiode layer that forms a p-n junction with the substrate semiconductor layer, at least one floating diffusion region that is laterally spaced from a periphery of the second-conductivity-type pinned photodiode layer, and at least one transfer gate electrode. At least two different operations may be performed by applying at least two different pulse patterns to the at least one transfer gate electrode. The at least two different pulse patterns differ from one another or from each other by at least one of pulse duration, pulse magnitude, and delay time between a control signal applied to the sensing circuit and pulse initiation at a respective one of the at least one transfer gate electrode.
    Type: Grant
    Filed: May 28, 2020
    Date of Patent: February 22, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Feng-Chien Hsieh, Wei-Li Hu, Kuo-Cheng Lee, Hsin-Chi Chen, Yun-Wei Cheng
  • Publication number: 20210377481
    Abstract: A photodetector circuit includes a photodetector and a sensing circuit located over a substrate semiconductor layer having a doping of a first conductivity type. The photodetector includes a second-conductivity-type pinned photodiode layer that forms a p-n junction with the substrate semiconductor layer, at least one floating diffusion region that is laterally spaced from a periphery of the second-conductivity-type pinned photodiode layer, and at least one transfer gate electrode. At least two different operations may be performed by applying at least two different pulse patterns to the at least one transfer gate electrode. The at least two different pulse patterns differ from one another or from each other by at least one of pulse duration, pulse magnitude, and delay time between a control signal applied to the sensing circuit and pulse initiation at a respective one of the at least one transfer gate electrode.
    Type: Application
    Filed: May 28, 2020
    Publication date: December 2, 2021
    Inventors: Feng-Chien HSIEH, Wei-Li HU, Kuo-Cheng LEE, Hsin-Chi CHEN, Yun-Wei CHENG
  • Publication number: 20210327932
    Abstract: A semiconductor structure includes a photodetector, which includes a substrate semiconductor layer having a doping of a first conductivity type, a second-conductivity-type photodiode layer that forms a p-n junction with the substrate semiconductor layer, a floating diffusion region that is laterally spaced from the second-conductivity-type photodiode layer, and a transfer gate electrode including a lower transfer gate electrode portion that is formed within the substrate semiconductor layer and located between the second-conductivity-type photodiode layer and the floating diffusion region. The transfer gate electrode may laterally surround the p-n junction, and may provide enhanced electron transmission efficiency from the p-n junction to the floating diffusion region. An array of photodetectors may be used to provide an image sensor.
    Type: Application
    Filed: April 20, 2020
    Publication date: October 21, 2021
    Inventors: Feng-Chien Hsieh, Yun-Wei Cheng, Wei-Li Hu, Kuo-Cheng Lee, Hsin-Chi Chen
  • Publication number: 20210225916
    Abstract: A method for fabricating an image sensor device is provided. The method includes forming a plurality of photosensitive pixels in a substrate; depositing a dielectric layer over the substrate; etching the dielectric layer, resulting in a first trench in the dielectric layer and laterally surrounding the photosensitive pixels; and forming a light blocking structure in the first trench, such that the light blocking structure laterally surrounds the photosensitive pixels.
    Type: Application
    Filed: September 2, 2020
    Publication date: July 22, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Feng-Chien HSIEH, Yun-Wei CHENG, Wei-Li HU, Kuo-Cheng LEE, Ying-Hao CHEN
  • Patent number: 10109668
    Abstract: A pixel structure of an image sensor and fabrication methods thereof are provided. The pixel structure includes a semiconductor substrate and plural pixel units disposed on the semiconductor substrate. The pixel units are electrically connected to each other, and each of the pixel units includes a light-sensitive region, a transfer gate and a protection layer. A terminal portion of the protection layer is covered by the transfer gate, and a width of the terminal portion of the protection layer is progressively decreased along a depthwise direction of the terminal portion of the protection layer. In the fabrication methods of the pixel structure, the protection layers of the pixel units are formed by doping with a tilt angle, so as to form the terminal portion of the protection layer.
    Type: Grant
    Filed: March 20, 2017
    Date of Patent: October 23, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Bo-Tsung Tsai, Hung-Da Dai, Mao-Yi Sun, Wei-Li Hu