Abstract: According to an aspect of the present disclosure, there is provided a III-N semiconductor structure comprising: a semiconductor-on-insulator substrate; a buffer structure comprising a superlattice including at least a first superlattice block and a second superlattice block formed on the first superlattice block, the first superlattice block including a repetitive sequence of first superlattice units, each first superlattice unit including a stack of layers of AlGaN, wherein adjacent layers of the stack have different aluminum content, the second superlattice block including a repetitive sequence of second superlattice units, each second superlattice unit including a stack of layers of AlGaN, wherein adjacent layers of the stack have different aluminum content, wherein an average aluminum content of the second superlattice block is greater than an average aluminum content of the first superlattice block; and a III-N semiconductor channel layer arranged on the buffer structure.

Abstract: The disclosed technology generally relates to semiconductor devices, and more specifically to a semiconductor device having a high aspect ratio channel layer. In one aspect, semiconductor device includes a semiconductor substrate having formed thereon a dielectric isolation layer having an opening formed therethrough. The semiconductor device additionally includes a filling isolation structure having a portion formed in the opening and a portion protruding above the dielectric isolation layer, wherein the filling isolation structure comprises a dielectric filling layer. The semiconductor device additionally includes a dielectric layer formed on the dielectric isolation layer, wherein the dielectric layer and the dielectric filling layer have top surfaces that are substantially co-planar to form a common top surface.

Abstract: According to an aspect of the present disclosure, there is provided a III-N semiconductor structure comprising: a semiconductor-on-insulator substrate; a buffer structure comprising a superlattice including at least a first superlattice block and a second superlattice block formed on the first superlattice block, the first superlattice block including a repetitive sequence of first superlattice units, each first superlattice unit including a stack of layers of AlGaN, wherein adjacent layers of the stack have different aluminum content, the second superlattice block including a repetitive sequence of second superlattice units, each second superlattice unit including a stack of layers of AlGaN, wherein adjacent layers of the stack have different aluminum content, wherein an average aluminum content of the second superlattice block is greater than an average aluminum content of the first superlattice block; and a III-N semiconductor channel layer arranged on the buffer structure.

Abstract: The disclosed technology generally relates to semiconductor devices, and more specifically to a semiconductor device having a high aspect ratio channel layer. In one aspect, semiconductor device includes a semiconductor substrate having formed thereon a dielectric isolation layer having an opening formed therethrough. The semiconductor device additionally includes a filling isolation structure having a portion formed in the opening and a portion protruding above the dielectric isolation layer, wherein the filling isolation structure comprises a dielectric filling layer. The semiconductor device additionally includes a dielectric layer formed on the dielectric isolation layer, wherein the dielectric layer and the dielectric filling layer have top surfaces that are substantially co-planar to form a common top surface.

Abstract: The disclosed technology generally relates to semiconductor devices, and more specifically to a semiconductor device having a high aspect ratio channel layer. In one aspect, semiconductor device includes a semiconductor substrate having formed thereon a dielectric isolation layer having an opening formed therethrough. The semiconductor device additionally includes a filling isolation structure having a portion formed in the opening and a portion protruding above the dielectric isolation layer, wherein the filling isolation structure comprises a dielectric filling layer. The semiconductor device additionally includes a dielectric layer formed on the dielectric isolation layer, wherein the dielectric layer and the dielectric filling layer have top surfaces that are substantially co-planar to form a common top surface.

Abstract: The disclosed technology generally relates to semiconductor devices, and more specifically to a semiconductor device having a high aspect ratio channel layer. In one aspect, semiconductor device includes a semiconductor substrate having formed thereon a dielectric isolation layer having an opening formed therethrough. The semiconductor device additionally includes a filling isolation structure having a portion formed in the opening and a portion protruding above the dielectric isolation layer, wherein the filling isolation structure comprises a dielectric filling layer. The semiconductor device additionally includes a dielectric layer formed on the dielectric isolation layer, wherein the dielectric layer and the dielectric filling layer have top surfaces that are substantially co-planar to form a common top surface.

Abstract: The invention proposed a novel hot pressing flowing sintering method to fabricate textured ceramics. The perfectly 2-dimensional textured Si3N4 ceramics (Lotgering orientation factor fL 0.9975) were fabricated by this method. During the initial sintering stage, the specimen flowed along the plane which is perpendicular to the hot pressing direction under pressure, through the controlling of the graphite die movement. The rod-like ?-Si3N4 nuclei was easily to texture during the flowing process, due to the small size of the ?-Si3N4 nuclei and the high porosity of the flowing specimen. After aligned, the ?-Si3N4 grains grew along the materials flowing direction with little constraint. textured Si3N4 ceramics fabricated by this invention also showed high aspect ratio. Compared to the conventional hot-forging technique which contained the sintering and forging processes, hot pressing flowing sintering proposed is simpler and lower cost to fabricate textured Si3N4.

Abstract: The invention proposed a novel hot pressing flowing sintering method to fabricate textured ceramics. The perfectly 2-dimensional textured Si3N4 ceramics (Lotgering orientation factor fL 0.9975) were fabricated by this method. During the initial sintering stage, the specimen flowed along the plane which is perpendicular to the hot pressing direction under pressure, through the controlling of the graphite die movement. The rod-like ?-Si3N4 nuclei was easily to texture during the flowing process, due to the small size of the ?-Si3N4 nuclei and the high porosity of the flowing specimen. After aligned, the ?-Si3N4 grains grew along the materials flowing direction with little constraint. textured Si3N4 ceramics fabricated by this invention also showed high aspect ratio. Compared to the conventional hot-forging technique which contained the sintering and forging processes, hot pressing flowing sintering proposed is simpler and lower cost to fabricate textured Si3N4.