Patents by Inventor Weinan YE
Weinan YE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230366667Abstract: Disclosed is a heterodyne grating interferometry system based on secondary diffraction, including a single-frequency laser, an input optical fiber, an acousto-optic modulator, a reading head, and a measurement grating, an output optical fiber, a photoelectric conversion unit and an electronic signal processing unit, wherein the single-frequency laser emits a single-frequency laser, which enters the acousto-optic modulator through the input optical fiber, and is divided into a reference light and measurement light to be input to the reading head, wherein the reading head and the measurement grating convert the reference light and measurement light into a reference interference optical signal and a measurement interference optical signal and send them to the photoelectric conversion unit through the output optical fiber and wherein the photoelectric conversion unit converts the measurement interference optical signal and the reference interference optical signal into a measurement interference electrical signalType: ApplicationFiled: September 14, 2021Publication date: November 16, 2023Inventors: Yu ZHU, Leijie WANG, Ziwen GUO, Ming ZHANG, Rong CHENG, Weinan YE, Zhaokui CHENG
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Patent number: 11703361Abstract: A five-degree-of-freedom heterodyne grating interferometry system comprises: a single-frequency laser for emitting single-frequency laser light, the single-frequency laser light can be split into a reference light beam and a measurement light beam; an interferometer lens set and a measurement grating for converting the reference light and the measurement light into a reference interference signal and a measurement interference signal; and multiple optical fiber bundles respectively receiving the measurement interference signal and the reference interference signal, wherein each optical fiber bundle has multiple multi-mode optical fibers respectively receiving interference signals at different positions on the same plane. The system is not over-sensitive to the environment, is small and light, and is easy to arrange.Type: GrantFiled: June 26, 2019Date of Patent: July 18, 2023Assignees: BEIJING U-PRECISION TECH CO., LTD., TSINGHUA UNIVERSITYInventors: Ming Zhang, Yu Zhu, Fuzhong Yang, Leijie Wang, Rong Cheng, Xin Li, Weinan Ye, Jinchun Hu
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Patent number: 11525673Abstract: A five-degree-of-freedom heterodyne grating interferometry system, comprising a single frequency laser device (1) and an acousto-optic modulator (2); the single frequency laser device (1) emits a single frequency laser, and the single frequency laser is coupled by optical fiber and, after being split, enters the acousto-optic modulator (2) to obtain two linearly polarized lights of different frequencies, one being a reference light, and one being a measurement light; an interferometer lens group (3) and a measurement grating (4), used for forming the reference light and the measurement light into a measurement interference signal and a compensation interference signal; and multiple optical fiber bundles (5), respectively receiving the measurement interference signal and the compensation interference signal, each optical fiber bundle (5) having multiple multimode optical fibers respectively receiving signals at different positions on the same plane.Type: GrantFiled: November 16, 2018Date of Patent: December 13, 2022Assignee: TSINGHUA UNIVERSITYInventors: Yu Zhu, Ming Zhang, Leijie Wang, Weinan Ye, Fuzhong Yang, Yizhou Xia, Xin Li
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Patent number: 11307018Abstract: A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal.Type: GrantFiled: June 26, 2019Date of Patent: April 19, 2022Assignees: TSINGHUA UNIVERSITY, BEIJING U-PRECISION TECH CO., LTD.Inventors: Yu Zhu, Ming Zhang, Leijie Wang, Fuzhong Yang, Rong Cheng, Xin Li, Weinan Ye, Jinchun Hu
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Publication number: 20220042792Abstract: A five-degree-of-freedom heterodyne grating interferometry system, comprising a single frequency laser device (1) and an acousto-optic modulator (2); the single frequency laser device (1) emits a single frequency laser, and the single frequency laser is coupled by optical fiber and, after being split, enters the acousto-optic modulator (2) to obtain two linearly polarized lights of different frequencies, one being a reference light, and one being a measurement light; an interferometer lens group (3) and a measurement grating (4), used for forming the reference light and the measurement light into a measurement interference signal and a compensation interference signal; and multiple optical fiber bundles (5), respectively receiving the measurement interference signal and the compensation interference signal, each optical fiber bundle (5) having multiple multi-mode optical fibers respectively receiving signals at different positions on the same plane.Type: ApplicationFiled: November 16, 2018Publication date: February 10, 2022Inventors: Yu ZHU, Ming ZHANG, Leijie WANG, Weinan YE, Fuzhong YANG, Yizhou XIA, Xin LI
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Publication number: 20210262834Abstract: A five-degree-of-freedom heterodyne grating interferometry system comprises: a single-frequency laser for emitting single-frequency laser light, the single-frequency laser light can be split into a reference light beam and a measurement light beam; an interferometer lens set and a measurement grating for converting the reference light and the measurement light into a reference interference signal and a measurement interference signal; and multiple optical fiber bundles, respectively receiving the measurement interference signal and the reference interference signal, wherein each optical fiber bundle has multiple multi-mode optical fibers respectively receiving interference signals at different positions on the same plane. The measurement system is not over-sensitive to the environment, is small and light, and is easy to arrange.Type: ApplicationFiled: June 26, 2019Publication date: August 26, 2021Inventors: Ming ZHANG, Yu ZHU, Fuzhong YANG, Leijie WANG, Rong CHENG, Xin LI, Weinan YE, Jinchun HU
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Publication number: 20210164772Abstract: A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal.Type: ApplicationFiled: June 26, 2019Publication date: June 3, 2021Inventors: Yu ZHU, Ming ZHANG, Leijie WANG, Fuzhong YANG, Rong CHENG, Xin LI, Weinan YE, Jinchun HU
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Patent number: 9903704Abstract: A three-DOF (Degree of Freedom) heterodyne grating interferometer displacement measurement system comprises a dual-frequency laser, a grating interferometer, a measurement grating, receivers and an electronic signal processing component; the grating interferometer comprises a polarizing beam splitter, a reference grating and dioptric elements; the measurement system realizes displacement measurement on the basis of grating diffraction, the optical Doppler Effect and the optical beat frequency principle. Three linear displacements can be output by the system when the grating interferometer and the measurement grating perform a three-DOF linear relative motion. The measurement system can reach sub-nanometer and higher resolution and precision, and can simultaneously measure three linear displacements.Type: GrantFiled: June 5, 2014Date of Patent: February 27, 2018Assignee: TSINGHUA UNIVERSITYInventors: Yu Zhu, Leijie Wang, Ming Zhang, Zhao Liu, Rong Cheng, Kaiming Yang, Dengfeng Xu, Weinan Ye, Li Zhang, Yanpo Zhao, Huichao Qin, Li Tian, Jin Zhang, Wensheng Yin, Haihua Mu, Jinchun Hu
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Patent number: 9904183Abstract: A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.Type: GrantFiled: April 17, 2015Date of Patent: February 27, 2018Assignees: TSINGHUA UNIVERSITY, BEIJING U-PRECISION TECH CO., LTD.Inventors: Yu Zhu, Ming Zhang, Fan Zhi, Zhao Liu, Rong Cheng, Kaiming Yang, Li Zhang, Huichao Qin, Yanpo Zhao, Li Tian, Weinan Ye, Jin Zhang, Wensheng Yin, Haihua Mu, Jinchun Hu
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Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor
Patent number: 9791789Abstract: A magnetically suspended coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100), a balance mass (200), a drive motor, a mask plate (101), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.Type: GrantFiled: April 17, 2015Date of Patent: October 17, 2017Assignees: TSINGHUA UNIVERSITY, BEIJING U-PRECISION TECH CO., LTD.Inventors: Ming Zhang, Yu Zhu, Fan Zhi, Rong Cheng, Kaiming Yang, Zhao Liu, Li Zhang, Huichao Qin, Yanpo Zhao, Li Tian, Weinan Ye, Jin Zhang, Wensheng Yin, Haihua Mu, Jinchun Hu -
Publication number: 20170115580Abstract: A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.Type: ApplicationFiled: April 17, 2015Publication date: April 27, 2017Inventors: Yu ZHU, Ming ZHANG, Fan ZHI, Zhao LIU, Rong CHENG, Kaiming YANG, Li ZHANG, Huichao QIN, Yanpo ZHAO, Li TIAN, Weinan YE, Jin ZHANG, Wensheng YIN, Haihua MU, Jinchun HU
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MAGNETICALLY SUSPENDED COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PLANAR MOTOR
Publication number: 20170052461Abstract: A magnetically suspended coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100), a balance mass (200), a drive motor, a mask plate (101), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.Type: ApplicationFiled: April 17, 2015Publication date: February 23, 2017Inventors: Ming ZHANG, Yu ZHU, Fan ZHI, Rong CHENG, Kaiming YANG, Zhao LIU, Li ZHANG, Huichao QIN, Yanpo ZHAO, Li TIAN, Weinan YE, Jin ZHANG, Wensheng YIN, Haihua MU, Jinchun HU -
Publication number: 20160153764Abstract: A three-DOF (Degree of Freedom) heterodyne grating interferometer displacement measurement system comprises a dual-frequency laser, a grating interferometer, a measurement grating, receivers and an electronic signal processing component; the grating interferometer comprises a polarizing spectroscope, a reference grating and dioptric elements; the measurement system realizes displacement measurement on the basis of grating diffraction, the optical Doppler Effect and the optical beat frequency principle. Three linear displacements can be output by the system when the grating interferometer and the measurement grating perform a three-DOF linear relative motion. The measurement system can reach sub-nanometer and even higher resolution and precision, and can simultaneously measure three linear displacements. The measurement system has the advantages of being environmentally insensitive, high in measurement precision, small in size, light in weight, etc.Type: ApplicationFiled: June 5, 2014Publication date: June 2, 2016Inventors: Yu ZHU, Leijie WANG, Ming ZHANG, Zhao LIU, Rong CHENG, Kaiming YANG, Dengfeng XU, Weinan YE, Li ZHANG, Yanpo ZHAO, Huichao QIN, Li TIAN, Jin ZHANG, Wensheng YIN, Haihua MU, Jinchun HU
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Publication number: 20160138903Abstract: A two-DOF heterodyne grating interferometer displacement measurement system, comprising a dual-frequency laser, a grating interferometer, a measurement grating, receivers and an electronic signal processing component, wherein the grating interferometer comprises a polarizing spectroscope, a reference grating and dioptric elements. The measurement system achieves the displacement measurement on the basis of the grating diffraction, the optical Doppler effect and the optical beat frequency principle. When the grating interferometer and the measurement grating conduct two-DOF linear relative motion, the system can output two linear displacements. The measurement system can achieve sub-nanometer or even higher resolution and accuracy, and can simultaneously measure two linear displacements.Type: ApplicationFiled: June 5, 2014Publication date: May 19, 2016Applicant: TSINGHUA UNIVERSITYInventors: Ming ZHANG, Yu ZHU, Leijie WANG, Kaiming YANG, Zhao LIU, Rong CHENG, Hao LIU, Dengfeng XU, Weinan YE, Li ZHANG, Yanpo ZHAO, Li TIAN, Jin ZHANG, Jinchun HU, Haihua MU, Wensheng YIN, Huichao QIN