Abstract: Aspects are disclosed for a piezoelectric device and a method of manufacturing a piezoelectric device. For example, the piezoelectric device can include a substrate, a piezoelectric layer, and an electrode formed on the substrate. The electrode includes a conductive layer and a conductive protective layer that is different from the conductive layer. The piezoelectric device can further include an interconnect formed on the piezoelectric layer over the conductive protective layer of the electrode. The interconnect provides an electrical path from the electrode to the piezoelectric layer.