Abstract: The present disclosure discloses a nano film composite strain sensor, a preparation method therefor and a use thereof, and relates to the technical field of sensors. The sensor includes a substrate layer, where the surface of the substrate layer is provided with a transition layer; the surface of the transition layer is provided with an insulating layer; the partial surface of the insulating layer is provided with a strain layer; the remained partial surface of the insulating layer is provided with a protecting layer; the partial surface of the strain layer is provided with a pad; and the remained partial surface of the strain layer is provided with the protecting layer.

Abstract: A torque-sensor strain beam structure and a torque sensor are provided. The torque-sensor strain beam structure comprises an external ring, a connecting hub and at least two strain beams. The external ring has a first joint. The connecting hub is located in the external ring and arranged coaxially with the external ring. The connecting hub has a second joint. A first end of each of the at least two strain beams is fixedly connected to an inner wall of the external ring and a second end of each of the at least two strain beams is fixedly connected to the connecting hub. A strain grid is provided on each of the at least two strain beams. A load inputting point is located at the first joint or the second joint. Arrangement of the torque-sensor strain beam structure allows the torque sensor to have smaller volume while having higher measurement sensitivity.

Abstract: A torque-sensor strain beam structure and a torque sensor are provided. The torque-sensor strain beam structure comprises an external ring, a connecting hub and at least two strain beams. The external ring has a first joint. The connecting hub is located in the external ring and arranged coaxially with the external ring. The connecting hub has a second joint. A first end of each of the at least two strain beams is fixedly connected to an inner wall of the external ring and a second end of each of the at least two strain beams is fixedly connected to the connecting hub. A strain grid is provided on each of the at least two strain beams. A load inputting point is located at the first joint or the second joint. Arrangement of the torque-sensor strain beam structure allows the torque sensor to have smaller volume while having higher measurement sensitivity.