Abstract: An integrated circuit device that includes a plurality of multiple gate FinFETs (MuGFETs) is disclosed. Fins of different crystal orientations for PMOS and NMOS MuGFETs are formed through amorphization and crystal regrowth on a direct silicon bonded (DSB) hybrid orientation technology (HOT) substrate. PMOS MuGFET fins are formed with channels defined by fin sidewall surfaces having (110) crystal orientations. NMOS MuGFET fins are formed with channels defined by fin sidewall surfaces having (100) crystal orienations in a Manhattan layout with the sidewall channels of the different PMOS and NMOS MuGFETs aligned at 0° or 90° rotations.

Abstract: An integrated circuit device that includes a plurality of multiple gate FinFETs (MuGFETs) is disclosed. Fins of different crystal orientations for PMOS and NMOS MuGFETs are formed through amorphization and crystal regrowth on a direct silicon bonded (DSB) hybrid orientation technology (HOT) substrate. PMOS MuGFET fins are formed with channels defined by fin sidewall surfaces having (110) crystal orientations. NMOS MuGFET fins are formed with channels defined by fin sidewall surfaces having (100) crystal orienations in a Manhattan layout with the sidewall channels of the different PMOS and NMOS MuGFETs aligned at 0° or 90° rotations.

Abstract: An integrated circuit device that includes a plurality of multiple gate FinFETs (MuGFETs) is disclosed. Fins of different crystal orientations for PMOS and NMOS MuGFETs are formed through amorphization and crystal regrowth on a direct silicon bonded (DSB) hybrid orientation technology (HOT) substrate. PMOS MuGFET fins are formed with channels defined by fin sidewall surfaces having (110) crystal orientations. NMOS MuGFET fins are formed with channels defined by fin sidewall surfaces having (100) crystal orientations in a Manhattan layout with the sidewall channels of the different PMOS and NMOS MuGFETs aligned at 0° or 90° rotations.

Abstract: A semiconductor device comprises a first multi-gate device and a second multi-gate device on a semiconductor substrate. The first multi-gate device comprises a first gate structure and the second multi-gate device comprises a second gate structure. An effective width of the first gate structure is greater than an effective width of the second gate structure.

Abstract: Embodiments provide a method of fabricating a plurality of planar nanowires surround gate semiconductor device. The planar nanowires can be formed between a source and a drain over an insulating layer of a semiconductor substrate. A gate stack can be grown or deposited all-around the planar nanowires. The gate stack can then be etched and patterned. During this process, the planar nanowires are severed between the gate and the source, and between the gate and the drain, leaving portions of the gate-all-around planar nanowires remain between the source and the drain and serve as the active region of the channel. The remaining gate-all-around planar nanowires can be epitaxially regrown to reconnect to the source and the drain.