Abstract: A microwave window structure for a low-pressure chamber is provided. The window structure enables microwave energy to be introduced into the chamber from a source external to the chamber. The window structure includes a fixture having electrically conductive walls. Inner portions of the walls provide a peripheral region of an aperture within such fixture. The fixture is adapted for mounting to a sidewall portion of the chamber. A solid, microwave energy transparent dielectric window is included. The window includes: a periphery portion affixed to the fixture; and, an inner region disposed within the aperture of the fixture.

Abstract: A microwave window structure for a low-pressure chamber is provided. The window structure enables microwave energy to be introduced into the chamber from a source external to the chamber. The window structure includes a fixture having electrically conductive walls. Inner portions of the walls provide a peripheral region of an aperture within such fixture. The fixture is adapted for mounting to a sidewall portion of the chamber. A solid, microwave energy transparent dielectric window is included. The window includes: a periphery portion affixed to the fixture; and, an inner region disposed within the aperture of the fixture. A first surface of the inner region is disposed in the chamber and a second, opposite surface of the inner region widow being disposed external to the chamber. The window has a sidewall portion with a first end thereof terminating in the first surface and a second end thereof terminating at the periphery portion. The sidewall portion of the window is spaced from the walls of the fixture.