Abstract: A transport system is provided. The transport system includes a stocker configured to store an assigned wafer carrier and having a gate port. The transport system also includes a semiconductor apparatus configured to transmit a request signal including a processed time according to a processing wafer carrier loaded on the semiconductor apparatus. The transport system further includes a vehicle configured to transport the assigned wafer carrier from the gate port to the semiconductor apparatus and a control system configured to control the vehicle. When the control system receives the request signal, the control system controls the stocker to transport the assigned wafer carrier inside of the stocker to the gate port at a start time, which is earlier than the processed time, and the control system controls the vehicle to transport the assigned wafer carrier from the gate port to the semiconductor apparatus.

Abstract: A transport system is provided. The transport system includes a stocker configured to store an assigned wafer carrier and having a gate port. The transport system also includes a semiconductor apparatus configured to transmit a request signal including a processed time according to a processing wafer carrier loaded on the semiconductor apparatus. The transport system further includes a vehicle configured to transport the assigned wafer carrier from the gate port to the semiconductor apparatus and a control system configured to control the vehicle. When the control system receives the request signal, the control system controls the stocker to transport the assigned wafer carrier inside of the stocker to the gate port at a start time, which is earlier than the processed time, and the control system controls the vehicle to transport the assigned wafer carrier from the gate port to the semiconductor apparatus.

Abstract: A transport system is provided. The transport system includes a stocker configured to store an assigned wafer carrier and having a gate port. The transport system also includes a semiconductor apparatus configured to transmit a request signal including a processed time according to a processing wafer carrier loaded on the semiconductor apparatus. The transport system further includes a vehicle configured to transport the assigned wafer carrier from the gate port to the semiconductor apparatus and a control system configured to control the vehicle. When the control system receives the request signal, the control system controls the stocker to transport the assigned wafer carrier inside of the stocker to the gate port at a start time, which is earlier than the processed time, and the control system controls the vehicle to transport the assigned wafer carrier from the gate port to the semiconductor apparatus.

Abstract: A transport system is provided. The transport system includes a stocker configured to store an assigned wafer carrier and having a gate port. The transport system also includes a semiconductor apparatus configured to transmit a request signal including a processed time according to a processing wafer carrier loaded on the semiconductor apparatus. The transport system further includes a vehicle configured to transport the assigned wafer carrier from the gate port to the semiconductor apparatus and a control system configured to control the vehicle. When the control system receives the request signal, the control system controls the stocker to transport the assigned wafer carrier inside of the stocker to the gate port at a start time, which is earlier than the processed time, and the control system controls the vehicle to transport the assigned wafer carrier from the gate port to the semiconductor apparatus.

Abstract: A transport system is provided. The transport system includes a stocker configured to store an assigned wafer carrier and having a gate port. The transport system also includes a semiconductor apparatus configured to transmit a request signal comprising a processed time according to a processing wafer carrier loaded on the semiconductor apparatus. The transport system further includes a vehicle configured to transport the assigned wafer carrier from the gate port to the semiconductor apparatus and a control system configured to control the vehicle. When the control system receives the request signal, the control system controls the stocker to transport the assigned wafer carrier inside of the stocker to the gate port at a start time, which is earlier than the processed time, and the control system controls the vehicle to transport the assigned wafer carrier from the gate port to the semiconductor apparatus.

Abstract: A method is provided. The method includes: assigning a buffer to a first wafer lot comprising a plurality of wafers according to a first trigger event associated with an equipment; and assigning a transporter to a second wafer lot comprising a plurality of wafers according to a second trigger event associated with the equipment.

Abstract: A method for transporting a group of semiconductor wafers and a manufacturing system are provided. A semiconductor processing facility is provided. The semiconductor processing facility includes a first destination, a second destination, and a transport system configured to transport a group of semiconductor wafers from the first destination to the second destination. Real time information is collected, where the real time information includes information on a current process executing in the semiconductor processing facility and information on a transfer time. The information on the transfer time includes data that indicates an amount of time required to transport the group of semiconductor wafers from the first destination to the second destination. A request is issued to the transport system to effect the transportation of the group of semiconductor wafers from the first destination to the second destination. A timing of the request is based on the first and second data.

Abstract: A transport system is provided. The transport system includes a stocker configured to store an assigned wafer carrier and having a gate port. The transport system also includes a semiconductor apparatus configured to transmit a request signal comprising a processed time according to a processing wafer carrier loaded on the semiconductor apparatus. The transport system further includes a vehicle configured to transport the assigned wafer carrier from the gate port to the semiconductor apparatus and a control system configured to control the vehicle. When the control system receives the request signal, the control system controls the stocker to transport the assigned wafer carrier inside of the stocker to the gate port at a start time, which is earlier than the processed time, and the control system controls the vehicle to transport the assigned wafer carrier from the gate port to the semiconductor apparatus.

Abstract: A method for transporting a group of semiconductor wafers and a manufacturing system are provided. A semiconductor processing facility is provided. The semiconductor processing facility includes a first destination, a second destination, and a transport system configured to transport a group of semiconductor wafers from the first destination to the second destination. Real time information is collected, where the real time information includes information on a current process executing in the semiconductor processing facility and information on a transfer time. The information on the transfer time includes data that indicates an amount of time required to transport the group of semiconductor wafers from the first destination to the second destination. A request is issued to the transport system to effect the transportation of the group of semiconductor wafers from the first destination to the second destination. A timing of the request is based on the first and second data.

Abstract: A method is provided. The method includes: assigning a buffer to a first wafer lot comprising a plurality of wafers according to a first trigger event associated with an equipment; and assigning a transporter to a second wafer lot comprising a plurality of wafers according to a second trigger event associated with the equipment.

Abstract: An automated materials handling system comprises a plurality of overhead hoist buffers (OHBs) for receiving a plurality of semiconductor wafer carriers. Each OHB is assigned to a respective one of a plurality of categories. Each wafer carrier is associated with one or more of the plurality of categories. Each respective category is associated with at least one of a plurality of event trigger types. An overhead transport (OHT) if provided for transporting each of the plurality of wafer carriers to a respective one of the OHBs in response to a respective trigger event. Each trigger event has one of the plurality of event trigger types. Each wafer carrier is stored in a respective one of the plurality of OHBs assigned to a respective one of the categories associated with the respective event trigger type of the trigger event causing that wafer carrier to be transported and stored.

Abstract: An automated materials handling system comprises a plurality of overhead hoist buffers (OHBs) for receiving a plurality of semiconductor wafer carriers. Each OHB is assigned to a respective one of a plurality of categories. Each wafer carrier is associated with one or more of the plurality of categories. Each respective category is associated with at least one of a plurality of event trigger types. An overhead transport (OHT) if provided for transporting each of the plurality of wafer carriers to a respective one of the OHBs in response to a respective trigger event. Each trigger event has one of the plurality of event trigger types. Each wafer carrier is stored in a respective one of the plurality of OHBs assigned to a respective one of the categories associated with the respective event trigger type of the trigger event causing that wafer carrier to be transported and stored.

Abstract: A system and method for lot priority adjustment. The system includes a database, a calculation unit and an adjustment unit. The database stores at least a committed date for a lot, a throughput rate and a cycle time for respective route operations in a production line, and Work-In-Process (WIP) information of the production line. The calculation unit calculates an x-ratio for the lot on a target route operation according to a current time, the committed date and a remaining cycle time for the lot, calculates a lot weight for the lot according to current loading of a predetermined number of route operations subsequent to the target route operation, and calculates a weighted x-ratio according to the x-ratio and the lot weight. The adjustment unit adjusts a priority for the lot according to the weighted x-ratio.

Abstract: A system and method that prioritizes product lots for fabrication and dispatching to manufacturing equipment establishes priorities for dispatching product lots based on a criticality factor and establishes a priority for dispatching product lots to manufacturing equipment based on processing capability and the efficiency of manufacturing equipment. A computer integrated manufacturing system executes a program process that functions as a lot dispatcher and a priority factor calculator. The lot dispatcher is in communication with an order entry system to receive requests for fabrication and with a process information system to receive procedures defining which manufacturing equipment is required. A manufacturing information system provides the lot dispatcher with a criticality factor and a queue level for each piece of manufacturing equipment. Then the current group of pieces of manufacturing equipment is followed with a balanced loading.

Abstract: A system and method for semiconductor work-in-process (WIP) dispatch management. Information regarding multiple wafer lots to be processed in a process node is acquired. Which wafer lot requires processing prior to the other wafer lots is determined by analyzing a load of multiple successive process nodes for each wafer lot. The analyzed quantity of the load of the successive process nodes for each wafer lots is determined contingent upon a predetermined observation time period.

Abstract: A system and method for lot priority adjustment. The system includes a database, a calculation unit and an adjustment unit. The database stores at least a committed date for a lot, a throughput rate and a cycle time for respective route operations in a production line, and Work-In-Process (WIP) information of the production line. The calculation unit calculates an x-ratio for the lot on a target route operation according to a current time, the committed date and a remaining cycle time for the lot, calculates a lot weight for the lot according to current loading of a predetermined number of route operations subsequent to the target route operation, and calculates a weighted x-ratio according to the x-ratio and the lot weight. The adjustment unit adjusts a priority for the lot according to the weighted x-ratio.

Abstract: A system and method that prioritizes product lots for fabrication and dispatching to manufacturing equipment establishes priorities for dispatching product lots based on a criticality factor and establishes a priority for dispatching product lots to manufacturing equipment based on processing capability and the efficiency of manufacturing equipment. A computer integrated manufacturing system executes a program process that functions as a lot dispatcher and a priority factor calculator. The lot dispatcher is in communication with an order entry system to receive requests for fabrication and with a process information system to receive procedures defining which manufacturing equipment is required. A manufacturing information system provides the lot dispatcher with a criticality factor and a queue level for each piece of manufacturing equipment. Then the current group of pieces of manufacturing equipment is followed with a balanced loading.