Patents by Inventor Wen-Chuan Lu

Wen-Chuan Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6165276
    Abstract: An apparatus for preventing plasma etching wafer clamp is disclosed in a process chamber. The apparatus comprises a pedestal, a bottom electrode, a wafer clamp, a semiconductor wafer, a quartz ring, a top electrode, a cooling plate, a anodize, and a gas hole. The wafer clamp is used to secure the semiconductor wafer. However, the wafer clamp includes a clamp ring, a concave holder, and a depression. The clamp ring is used to support the semiconductor wafer. The concave holder has a semi-elliptical surface, polymer being formed on the backside of the concave holder to prevent plasma etching in the deposition or etching process, into the clamp ring. Then The depression is designed, higher position, adjacent the concave holder.
    Type: Grant
    Filed: September 17, 1999
    Date of Patent: December 26, 2000
    Assignee: United Microelectronics Corp.
    Inventors: Wen-Chuan Lu, Chung-Chien Lu, Chih-Houng Chou, Gary Lin