Patents by Inventor Wen-Dar Liu

Wen-Dar Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130061882
    Abstract: A water-rich hydroxylamine formulation for photoresist and post-etch/post-ash residue removal in applications wherein a semiconductor substrate comprises aluminum. The cleaning composition comprises from about 2 to about 15% by wt. of hydroxylamine; from about 50 to about 80% by wt. of water; from about 0.01 to about 5.0% by wt. of a corrosion inhibitor; from about 5 to about 45% by wt. of a component selected from the group consisting of: an alkanolamine having a pKa<9.0, a water-miscible solvent, and a mixture thereof. Employment of such composition exhibits efficient cleaning capability for Al substrates, minimal silicon etch while protecting aluminum for substrates comprising both materials.
    Type: Application
    Filed: March 7, 2012
    Publication date: March 14, 2013
    Applicant: Air Products and Chemicals, Inc.
    Inventors: Aiping Wu, Yi-Chia Lee, Wen Dar Liu, Machukar Bhaskara Rao, Gautam Banerjee
  • Patent number: 8357646
    Abstract: The present invention, in a preferred embodiment, is a photoresist stripper formulation, comprising: Hydroxylamine ; Water; a solvent selected from the group consisting of dimethylsulfoxide; N-methylpyrrrolidine; dimethylacetamide; dipropylene glycol monomethyl ether; monoethanolamine and mixtures thereof; a base selected from the group consisting of choline hydroxide, monoethanolamine, tetramethylammonium hydroxide; aminoethylethanolamine and mixtures thereof; a metal corrosion inhibitor selected from the group consisting of catechol, gallic acid, lactic acid, benzotriazole and mixtures thereof; and a bath life extending agent selected from the group consisting of glycerine, propylene glycol and mixtures thereof. The present invention is also a method for using formulations as exemplified in the preferred embodiment.
    Type: Grant
    Filed: February 27, 2009
    Date of Patent: January 22, 2013
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Wen Dar Liu, Yi Chia Lee, Archie Liao, Madhukar Bhaskara Rao, Matthew I. Egbe, Chimin Sheu, Michael Walter Legenza
  • Publication number: 20110212866
    Abstract: The present invention relates to water-rich formulations and the method using same, to remove bulk photoresists, post-etched and post-ashed residues, residues from Al back-end-of-the-line interconnect structures, as well as contaminations. The formulation comprises: hydroxylamine; corrosion inhibitor containing a mixture of alkyl dihydroxybenzene and hydroxyquinoline; an alkanolamine, a water-soluble solvent or the combination of the two; and at least 50% by weight of water.
    Type: Application
    Filed: August 19, 2010
    Publication date: September 1, 2011
    Applicant: AIR PRODUCTS AND CHEMICALS, INC.
    Inventors: Madhukar Bhaskara Rao, Gautam Banerjee, Thomas Michael Wieder, Yi-Chia Lee, Wen Dar Liu, Aiping Wu
  • Publication number: 20090229629
    Abstract: The present invention is a chemical stripper formulation for removing photoresist and the residue of etching and ashing of electronic device substrates, comprising: deionized water, acetic acid, polyethylene glycol, dipropylene glycol monomethyl ether and ammonium fluoride. The present invention is also a process for removing photoresist and the residue of etching and ashing of electronic device substrates by contacting the substrate with a formulation, comprising: deionized water, acetic acid, polyethylene glycol, dipropylene glycol monomethyl ether and ammonium fluoride.
    Type: Application
    Filed: March 9, 2009
    Publication date: September 17, 2009
    Applicant: AIR PRODUCTS AND CHEMICALS, INC.
    Inventors: Yi-Chia Lee, Wen Dar Liu, Archie Liao, Matthew I. Egbe, Madhukar Bhaskara Rao, Michael Walter Legenza, Chimin Sheu
  • Publication number: 20090227483
    Abstract: The present invention, in a preferred embodiment, is a photoresist stripper formulation, comprising: Hydroxylamine ; Water; a solvent selected from the group consisting of dimethylsulfoxide; N-methylpyrrrolidine; dimethylacetamide; dipropylene glycol monomethyl ether; monoethanolamine and mixtures thereof; a base selected from the group consisting of choline hydroxide, monoethanolamine, tetramethylammonium hydroxide; aminoethylethanolamine and mixtures thereof; a metal corrosion inhibitor selected from the group consisting of catechol, gallic acid, lactic acid, benzotriazole and mixtures thereof; and a bath life extending agent selected from the group consisting of glycerine, propylene glycol and mixtures thereof. The present invention is also a method for using formulations as exemplified in the preferred embodiment.
    Type: Application
    Filed: February 27, 2009
    Publication date: September 10, 2009
    Applicant: AIR PRODUCTS AND CHEMICALS, INC.
    Inventors: Wen Dar Liu, Yi Chia Lee, Archie Liao, Madhukar Bhaskara Rao, Matthew I. Egbe, Chimin Sheu, Michael Walter Legenza
  • Patent number: 7078149
    Abstract: A method for fabricating an optical recording medium is provided. A dye layer is formed on a molded substrate by spin-coating. A reflection layer is formed on the dye layer by sputtering so that the optical disc has enough reflection rate. The dye layer comprises a cyanine type dye and an azo metal chelate compound selected from the formula (I): wherein M is a metal ion; R1 is a hydrogen atom, a linear or branched alkyl group containing 1 to 6 carbon atoms, amino group, alkyl amino group or toluidinyl group; R2 is a hydrogen atom, a hydroxyl group, a halogen atom, an ether group, an ester group or a linear or branched alkyl group containing 1 to 6 carbon atoms; R3 is a hydrogen atom or a linear or branched alkyl group containing 1 to 6 carbon atoms; R4 is a hydrogen atom, a halogen atom or a linear or branched alkyl group containing 1 to 6 carbon atoms; A1 is a heterocyclic derivative group constituted by carbon atoms and nitrogen atoms.
    Type: Grant
    Filed: October 3, 2002
    Date of Patent: July 18, 2006
    Assignee: Ritek Corporation
    Inventors: Wen-Dar Liu, Nae-Jen Wang, Wan-Chun Chen, Biing-Hwang Lin, Hui-Jen Chen, Hsin-Te Kuo
  • Patent number: 6689872
    Abstract: An optical recording medium dye is described. The optical recording medium dye is an azo metal chelate compound, wherein the azo metal chelate compound comprises the following structure: wherein R1 is a hydrogen atom, a C1-6 straight chain or branched alkyl group, an amino group, an alkylamino group or a tolylamino group; R2 is a hydrogen atom, a hydroxyl group, a halogen atom, an ether group, a C1-6 straight chain or branched alkyl group; R3 is a hydrogen atom, a C1-6 straight chain or branched alkyl group; R4 is a hydrogen atom, a C1-6 straight chain or branched alkyl group or a halogen atom; A3 is a residue forming a heterocyclic ring derivative together with a carbon atom and a nitrogen atom.
    Type: Grant
    Filed: September 17, 2002
    Date of Patent: February 10, 2004
    Assignee: Ritek Corporation
    Inventors: Nae-Jen Wang, Ching-Huang Chen, Li-Ling Lin, Chao-Nan Kuo, Wen-Dar Liu, Wan-Chun Chen, Shyh-yeu Wang
  • Publication number: 20030235783
    Abstract: A method for fabricating an optical recording medium is provided. A dye layer is formed on a molded substrate by spin-coating. A reflection layer is formed on the dye layer by sputtering so that the optical disc has enough reflection rate.
    Type: Application
    Filed: October 3, 2002
    Publication date: December 25, 2003
    Inventors: Wen-Dar Liu, Nae-Jen Wang, Wan-Chun Chen, Biing-Hwang Lin, Hui-Jen Chen, Hsin-Te Kuo
  • Publication number: 20030148216
    Abstract: An optical recording medium dye is described.
    Type: Application
    Filed: September 17, 2002
    Publication date: August 7, 2003
    Inventors: Nae-Jen Wang, Ching-Huang Chen, Li-Ling Lin, Chao-Nan Kuo, Wen-Dar Liu, Wan-Chun Chen, Shyh-yeu Wang