Abstract: A milliactuator integrated with driver and relative position error sensor circuits formed on a single silicon substrate. The integrated milliactuator/electronics module is positioned between the suspension and the slider/transducer assembly to provide rapid, small motion position control of the slider/transducer over data tracks on the disk of a magnetic disk drive. Integration of the milliactuator electronics with the milliactuator reduces parasitic loading and interference problems with the magnetic transducer signals. Electronic circuits are built on a silicon wafer followed by deposition of a planarization layer and a ground plane layer for isolation from the milliactuator which is then built on top of the circuits.