Patents by Inventor Wen-Hung Wu

Wen-Hung Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Overlay registration correction method for multiple product type microelectronic fabrication foundry facility
    Patent number: 6735485
    Abstract: A method for determining an overlay registration correction for a new product lot of a microelectronic product type with respect to a specific alignment tool within a foundry facility first provides for determining: (1) a first average historic overlay registration correction for historic product lots of the new product lot type with respect to the specific alignment tool; and (2) a second average historic overlay registration correction with respect to product lots of any product type with respect to the specific alignment tool. The overlay registration correction is determined as the sum of: (1) an overlay registration correction for an immediately preceding layer within the new product lot, if present; (2) a factor derived from the first average historic overlay registration correction; and (3) a factor derived from the second average historic overlay registration correction.
    Type: Grant
    Filed: November 8, 2002
    Date of Patent: May 11, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Hung Wu, Kun-Pi Cheng