Patents by Inventor Wen-Jet Su

Wen-Jet Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for fabricating a trench isolation
    Patent number: 6150238
    Abstract: A method for fabricating a trench isolation is disclosed. First, a first insulated layer having a void is formed within the trench of the semiconductor. Next, the upper portion of said first insulated layer is etched to remove the void of said first insulated layer. Then, a second insulated layer having a void is formed over the first insulated layer. Next, the upper portion of said second insulated layer is etched to remove the void of said second insulated layer, thereby forming a trench isolation including the remainder of said first and second insulated layers.
    Type: Grant
    Filed: May 17, 1999
    Date of Patent: November 21, 2000
    Assignee: Mosel Vitelic, Inc.
    Inventors: Chih-Ta Wu, Wen-Jet Su, Tun-Fu Hung, Ming-Ren Chi