Abstract: The present invention relates to a method of assembling a scrubber which includes a motor, a shaft rotatably coupled to and extending through the motor, a shaft pin detachably connected to the shaft, and a disk coupled to the shaft and having a notch located relative to the shaft pin at a predetermined angle with respect to a longitudinal axis of the shaft when properly assembled. In one embodiment, the method comprises providing a tool body configured to partially receive the scrubber, the tool body including a first recess and a protrusion; and placing the tool body adjacent the scrubber to at least partially receive the shaft pin into the first recess of the tool body and to at least partially insert the protrusion of the tool body into the notch of the disk. The first recess and the protrusion are arranged at the predetermined angle to position the notch of the disk and the shaft pin of the scrubber for proper assembly at the predetermined angle with respect to the longitudinal axis of the shaft.

Abstract: The present invention relates to an auxiliary tool for assembling a scrubber which includes a motor, a shaft rotatably coupled to and extending through the motor, a shaft pin detachably connected to the shaft, and a disk coupled to the shaft and having a notch located relative to the shaft pin at a predetermined angle with respect to a longitudinal axis of the shaft when properly assembled. In specific embodiments, the auxiliary tool comprises a tool body configured to at least partially receive the motor, the shaft pin, the disk, and the notch of the disk. The tool body includes a first recess configured to at least partially receive the shaft pin and a protrusion configured to be at least partially received into the notch of the disk. The first recess and the protrusion are arranged at the predetermined angle to position the notch of the disk and the shaft pin of the scrubber for proper assembly at the predetermined angle with respect to the longitudinal axis of the shaft.

Abstract: The present invention provides an auxiliary tool for assembling a motor assembly to a wafer-deposition machine for supporting a wafer. The auxiliary tool facilitates easy and quick assembly of the motor assembly to the wafer-deposition machine. An aspect of the present invention is directed to an auxiliary tool for assembling a motor assembly to a wafer-deposition machine, wherein the motor assembly includes a plurality of first screw holes and the wafer-deposition machine includes a plurality of second screw holes corresponding to the first screw holes, respectively. The auxiliary tool comprises a plurality of locking members each having a substantially uniform dimension in a longitudinal direction and being configured to be inserted through one of the plurality of first screw holes of the motor assembly with a corresponding one of the plurality of second screw holes of the wafer-deposition machine to align the first screw hole with the corresponding second screw hole.

Abstract: The present invention relates to an auxiliary tool for assembling a scrubber which includes a motor, a shaft rotatably coupled to and extending through the motor, a shaft pin detachably connected to the shaft, and a disk coupled to the shaft and having a notch located relative to the shaft pin at a predetermined angle with respect to a longitudinal axis of the shaft when properly assembled. In specific embodiments, the auxiliary tool comprises a tool body configured to at least partially receive the motor, the shaft pin, the disk, and the notch of the disk. The tool body includes a first recess configured to at least partially receive the shaft pin and a protrusion configured to be at least partially received into the notch of the disk. The first recess and the protrusion are arranged at the predetermined angle to position the notch of the disk and the shaft pin of the scrubber for proper assembly at the predetermined angle with respect to the longitudinal axis of the shaft.

Abstract: The present invention provides an auxiliary tool for assembling a motor assembly to a wafer-deposition machine for supporting a wafer. The auxiliary tool facilitates easy and quick assembly of the motor assembly to the wafer-deposition machine. An aspect of the present invention is directed to an auxiliary tool for assembling a motor assembly to a wafer-deposition machine, wherein the motor assembly includes a plurality of first screw holes and the wafer-deposition machine includes a plurality of second screw holes corresponding to the first screw holes, respectively. The auxiliary tool comprises a plurality of locking members each having a substantially uniform dimension in a longitudinal direction and being configured to be inserted through one of the plurality of first screw holes of the motor assembly with a corresponding one of the plurality of second screw holes of the wafer-deposition machine to align the first screw hole with the corresponding second screw hole.

Abstract: The present invention relates to an auxiliary tool for assembling a scrubber which includes a motor, a shaft rotatably coupled to and extending through the motor, a shaft pin detachably connected to the shaft, and a disk coupled to the shaft and having a notch located relative to the shaft pin at a predetermined angle with respect to a longitudinal axis of the shaft when properly assembled. In specific embodiments, the auxiliary tool comprises a tool body configured to at least partially receive the motor, the shaft pin, the disk, and the notch of the disk. The tool body includes a first recess configured to at least partially receive the shaft pin and a protrusion configured to be at least partially received into the notch of the disk. The first recess and the protrusion are arranged at the predetermined angle to position the notch of the disk and the shaft pin of the scrubber for proper assembly at the predetermined angle with respect to the longitudinal axis of the shaft.