Patents by Inventor Wen-Liang Fang

Wen-Liang Fang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Liquid supplying device for providing chemical solution with a liquid level sensor
    Patent number: 6177874
    Abstract: A liquid supplying device comprising a liquid container for storing a liquid so as to supply an external device and a liquid level sensor for detecting the liquid level. As the liquid within the liquid container is gradually used up, liquid level drops. As soon as the remaining liquid in the container drops to a predetermined amount, the liquid level sensor emits a warning signal to the operator, and the operator can then replenish the liquid in the container.
    Type: Grant
    Filed: May 7, 1998
    Date of Patent: January 23, 2001
    Assignee: United Microelectronics Corp.
    Inventors: Ching-Chih Cheng, Wen-Liang Fang, Kuo-Feng Huang, Hung-Lung Ma
  • Jet-cleaning device for developing station
    Patent number: 6070601
    Abstract: A jet-cleaning device for a developing station, especially suitable for installing on a wafer back cleaning ring of a CLEAN TRACK MK-V developing station. The jet-cleaning device is used for cleaning the wafer back of a wafer mounted above a spinner. The jet-cleaning, device comprises a jet-cleaning block and a vertical nozzle. The jet-cleaning block has a nozzle groove having an inlet for pumping in a cleaning solution. The vertical nozzle is connected to the nozzle groove for forming a vertical jet of the cleaning solution so that waste liquid on a wafer back can be removed.
    Type: Grant
    Filed: April 22, 1998
    Date of Patent: June 6, 2000
    Assignee: United Microelectronics Corp.
    Inventors: Wen-Liang Fang, Ching-Chiy Cheng, Richard Leu, Kuo-Feng Huang