Patents by Inventor Wen-Pao Tsai

Wen-Pao Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10763082
    Abstract: A chamber of a plasma system includes a chamber wall defining a plasma processing area, a substrate supporter configured to support a substrate in the plasma processing area, and a liner located in the plasma processing area and separating the chamber wall from the plasma processing area. A liner for a plasma system and a method for installing a liner to a plasma system are also provided.
    Type: Grant
    Filed: March 4, 2016
    Date of Patent: September 1, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Hsien Liao, Wen-Pao Tsai
  • Patent number: 10269544
    Abstract: A gas ring for a plasma system includes a gas ring body having a surface and an insulating protective layer covering the surface. Methods of manufacturing the gas ring are also provided.
    Type: Grant
    Filed: April 30, 2015
    Date of Patent: April 23, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wen-Pao Tsai, Tsung-Yu Huang, Chung-Hsien Liao
  • Publication number: 20170256383
    Abstract: A chamber of a plasma system includes a chamber wall defining a plasma processing area, a substrate supporter configured to support a substrate in the plasma processing area, and a liner located in the plasma processing area and separating the chamber wall from the plasma processing area. A liner for a plasma system and a method for installing a liner to a plasma system are also provided.
    Type: Application
    Filed: March 4, 2016
    Publication date: September 7, 2017
    Inventors: Chung-Hsien Liao, Wen-Pao Tsai
  • Patent number: 9483139
    Abstract: A touch device includes the following elements. A touch panel has two panel analog circuits and a panel digital circuit. Two inverting modules are assembled to two neighboring sides of the touch panel respectively, electrically coupled to the two panel analog circuits, and each electrically coupled to the panel digital circuit. A controlling module is assembled to the touch panel. The two inverting modules process analog signals transmitted from the two analog circuits into digital signals that are transmitted to the controlling module through the panel digital circuit. Therefore, the touch device may decrease a layout width that is occupied by the panel analog circuit.
    Type: Grant
    Filed: November 15, 2013
    Date of Patent: November 1, 2016
    Assignee: Young Lighting Technology Inc.
    Inventors: Wen-Pao Tsai, Chin-Lung Chen
  • Publication number: 20160148788
    Abstract: A gas ring for a plasma system includes a gas ring body having a surface and an insulating protective layer covering the surface. Methods of manufacturing the gas ring are also provided.
    Type: Application
    Filed: April 30, 2015
    Publication date: May 26, 2016
    Inventors: Wen-Pao TSAI, Tsung-Yu HUANG, Chung-Hsien LIAO
  • Publication number: 20140145865
    Abstract: A touch device includes the following elements. A touch panel has two panel analog circuits and a panel digital circuit. Two inverting modules are assembled to two neighboring sides of the touch panel respectively, electrically coupled to the two panel analog circuits, and each electrically coupled to the panel digital circuit. A controlling module is assembled to the touch panel. The two inverting modules process analog signals transmitted from the two analog circuits into digital signals that are transmitted to the controlling module through the panel digital circuit. Therefore, the touch device may decrease a layout width that is occupied by the panel analog circuit.
    Type: Application
    Filed: November 15, 2013
    Publication date: May 29, 2014
    Applicant: YOUNG LIGHTING TECHNOLOGY INC.
    Inventors: Wen-Pao Tsai, Chin-Lung Chen