Abstract: An electrostatic chuck is provided, the electrostatic chuck includes a base; and an insulating layer, an electrode layer, a first dielectric layer, and a second dielectric layer sequentially stacked on the base. The first dielectric layer is aluminum oxide (Al2O3) or aluminum nitride (AlN). A material of the second dielectric layer is different from a material of the first dielectric layer, and the second dielectric layer includes titanium element, IVA group element, and oxygen element.

Abstract: A bio-polyol composition, a foam composition, and a foam material are provided. The bio-polyol composition includes 25-70 parts by weight of lignin; 30-75 parts by weight of non-amine-based polyol; and, 2-17 parts by weight of amine-based polyether polyol. In particular, the sum of the weight of the lignin and the non-amine-based polyol is 100 parts by weight.

Abstract: An optical test equipment includes a chuck, a light receiving device corresponding in position to an opening of the chuck, a transparent heating plate disposed on the chuck or light receiving device in a way that the bottom surface of the transparent heating plate faces toward the light receiving device for a wafer to be disposed on the top surface of the transparent heating plate, allowing light to pass through the top and bottom surfaces and being powered to generate heat to heat the wafer, and a probing device including a seat and a probe protruding from the seat toward the top surface of the transparent heating plate for probing a light emitting chip of the wafer. The equipment can perform light emitting efficiency test to the light emitting chip on the wafer before dicing and heat the light emitting chip at the same time.

Abstract: A probing apparatus includes a carrier having an opening, a supporter disposed on the carrier in a way that its bottom surface faces toward the carrier, its top surface for disposition of a wafer, and its light permeable portion allowing light to pass through the top and bottom surfaces corresponding in position to the opening, an air heating device having a covering plate and an air supply unit, and a probing device having a probe protruding out of the bottom surface of the air heating device. A thermal air source provides thermal air to a heating space between the bottom surface of the air heating device and the top surface of the supporter through an air supply passage of the air supply unit. The probing apparatus can test light emitting efficiency of a light emitting chip in the wafer and heat the chip at the same time.

Abstract: An optical test equipment includes a chuck, a light receiving device corresponding in position to an opening of the chuck, a transparent heating plate disposed on the chuck or light receiving device in a way that the bottom surface of the transparent heating plate faces toward the light receiving device for a wafer to be disposed on the top surface of the transparent heating plate, allowing light to pass through the top and bottom surfaces and being powered to generate heat to heat the wafer, and a probing device including a seat and a probe protruding from the seat toward the top surface of the transparent heating plate for probing a light emitting chip of the wafer. The equipment can perform light emitting efficiency test to the light emitting chip on the wafer before dicing and heat the light emitting chip at the same time.

Abstract: A probing apparatus includes a carrier having an opening, a supporter disposed on the carrier in a way that its bottom surface faces toward the carrier, its top surface for disposition of a wafer, and its light permeable portion allowing light to pass through the top and bottom surfaces corresponding in position to the opening, an air heating device having a covering plate and an air supply unit, and a probing device having a probe protruding out of the bottom surface of the air heating device. A thermal air source provides thermal air to a heating space between the bottom surface of the air heating device and the top surface of the supporter through an air supply passage of the air supply unit. The probing apparatus can test light emitting efficiency of a light emitting chip in the wafer and heat the chip at the same time.

Abstract: A method for fabricating a MEMS sensor device. The method can include providing a substrate, forming an IC layer overlying the substrate, forming an oxide layer overlying the IC layer, forming a metal layer coupled to the IC layer through the oxide layer, forming a MEMS layer having a pair of designated sense electrode portions and a designated proof mass portion overlying the oxide layer, forming a via structure within each of the designated sense electrode portions, and etching the MEMS layer to form a pair of sense electrodes and a proof mass from the designated sense electrode portions and proof mass portions, respectively. The via structure can include a ground post and the proof mass can include a sense comb. The MEMS sensor device formed using this method can result is more well-defined edges of the proof mass structure.

Abstract: A polycarbonate diol is provided. The polycarbonate diol includes repeating units represented by formula (A) and formula (B), and hydroxyl groups located at both ends of the polycarbonate diol. The molar ratio of formula (A) to formula (B) is in a range from 1:99 to 99:1. R1 is a linear, branched or cyclic C2-20 alkylene group. R2 is a linear or branched C2-10 alkylene group; m and n are independently and can be an integer from 0 to 10, and m+n?1. A is a C2-20 alicyclic hydrocarbon, aromatic ring or a structure represented by formula (C). R3 and R4 are independently and can be a hydrogen atom or a C1-6 alkyl group; S is 0 or 1; and Z is selected from R5 and R6 are independently and can be a hydrogen atom or a C1-12 hydrocarbon group.

Abstract: A biomass-based thermoplastic polyurethane is provided. The biomass-based thermoplastic polyurethane is a reaction product of a composition. The composition includes 1-50 parts by weight of a modified lignin, 50-99 parts by weight of a first polyol, and 40-60 parts by weight of a diisocyanate. The modified lignin has an OH value of less than 3.0 mmol/g. The sum of the modified lignin and the first polyol is 100 parts by weight.

Abstract: A biomass-based thermoplastic polyurethane is provided. The biomass-based thermoplastic polyurethane is a reaction product of a composition. The composition includes 1-50 parts by weight of a modified lignin, 50-99 parts by weight of a first polyol, and 40-60 parts by weight of a diisocyanate. The modified lignin has an OH value of less than 3.0 mmol/g. The sum of the modified lignin and the first polyol is 100 parts by weight.

Abstract: A bio-polyol composition and a bio-polyurethane foam are provided. The bio-polyol composition includes polyol, a surface-modified lignin, and a surfactant represented by formula 1. wherein R is represented by CnH2n+1, n is an integer of 0 to 3; x/y is between 5 and 13; a is an integer of 1 to 100; b is an integer of 1 to 100.

Abstract: A bio-polyol composition and a bio-polyurethane foam material are provided. By using the modifier and applying the dispersing and grinding process, the modified lignin is uniformly dispersed in the polyol solution and a bio-polyol composition is obtained. The obtained bio-polyol composition may be used to prepare the bio-polyurethane foam material with a high lignin content, a high compression strength and superior flame-resistance.

Abstract: A method of forming a lignin-based biomass epoxy resin is provided, which includes: (a) mixing a lignin, an acid anhydride compound, and a solvent to react for forming a first intermediate product, (b) reacting the first intermediate compound with a first polyol to form a second intermediate compound, and (c) reacting the second intermediate compound with an epoxy compound to form a lignin-based biomass epoxy resin.

Abstract: A bio-polyol composition and a bio-polyurethane foam are provided. The bio-polyol composition includes polyol, a surface-modified lignin, and a surfactant represented by formula 1. wherein R is represented by CnH2n+1, n is an integer of 0 to 3; x/y is between 5 and 13; a is an integer of 1 to 100; b is an integer of 1 to 100.

Abstract: A method for fabricating a MEMS sensor device. The method can include providing a substrate, forming an IC layer overlying the substrate, forming an oxide layer overlying the IC layer, forming a metal layer coupled to the IC layer through the oxide layer, forming a MEMS layer having a pair of designated sense electrode portions and a designated proof mass portion overlying the oxide layer, forming a via structure within each of the designated sense electrode portions, and etching the MEMS layer to form a pair of sense electrodes and a proof mass from the designated sense electrode portions and proof mass portions, respectively. The via structure can include a ground post and the proof mass can include a sense comb. The MEMS sensor device formed using this method can result is more well-defined edges of the proof mass structure.

Abstract: A method of forming a lignin-based biomass epoxy resin is provided, which includes: (a) mixing a lignin, an acid anhydride compound, and a solvent to react for forming a first intermediate product, (b) reacting the first intermediate compound with a first polyol to form a second intermediate compound, and (c) reacting the second intermediate compound with an epoxy compound to form a lignin-based biomass epoxy resin.

Abstract: A bio-polyol composition and a bio-polyurethane foam material are provided. By using the modifier and applying the dispersing and grinding process, the modified lignin is uniformly dispersed in the polyol solution and a bio-polyol composition is obtained. The obtained bio-polyol composition may be used to prepare the bio-polyurethane foam material with a high lignin content, a high compression strength and superior flame-resistance.

Abstract: A photo-sensitive adhesive for a flexible liquid crystal display is provided, comprising the following components: an urethane oligomer; a reactive monomer with phenyl group; and a photo-initiator. In an embodiment, the phenyl group of the reactive monomer has a weight ratio of 40 wt %, base on the total weight of the reactive monomer.

Abstract: A photo-sensitive adhesive for a flexible liquid crystal display is provided, comprising the following components: an urethane oligomer; a reactive monomer with phenyl group; and a photo-initiator. In an embodiment, the phenyl group of the reactive monomer has a weight ratio of 40 wt %, base on the total weight of the reactive monomer.

Abstract: A method for forming a fluid injection apparatus is disclosed. A first photosensitive macromolecule layer is formed on a substrate. The first photosensitive macromolecule layer is exposed to light of a first wavelength range using a first mask with pattern of a fluid chamber. A second photosensitive macromolecule layer is formed overlying the first photosensitive macromolecule layer. The second photosensitive macromolecule layer is exposed to light of a second wavelength range using a second mask with pattern of a nozzle, wherein the first wavelength range does not substantially interfere with the second wavelength range. The first photosensitive macromolecule layer and the second photosensitive macromolecule layer are developed to define a fluid chamber overlying the substrate and a nozzle in the second photosensitive macromolecule layer in a single development step.