Patents by Inventor Wen-Pin Lu

Wen-Pin Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7776690
    Abstract: A method of forming a contact on a semiconductor device is provided. First, a substrate is provided. A plurality of gate structures defined by a plurality of word lines in a first direction, and a plurality of diffusion regions covered by a first dielectric layer in a second direction are provided over the substrate. The gate structures located underneath the word lines and isolated by the diffusion regions. Then, an etching stop layer is formed. The etching stop layer and the first dielectric layer have different etching selectivity. A second dielectric layer is formed over the substrate. Furthermore, a plurality of contact holes to the diffusion regions between the word lines are formed by using the etching stop layer as a self-aligned mask.
    Type: Grant
    Filed: March 27, 2007
    Date of Patent: August 17, 2010
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Tzung-Ting Han, Ming-Shang Chen, Wen-Pin Lu, Meng-Hsuan Weng
  • Publication number: 20100202179
    Abstract: A memory device is provided. The memory device comprises a substrate, a plurality of word lines, a plurality of conductive regions and at least a shielding plug. The substrate has a memory region and a peripheral region. The word lines are disposed on the substrate and at least a dummy word line disposed in the peripheral region and adjacent to the word lines. The conductive regions are disposed in the substrate and between the word lines respectively. The shielding plug is located on the substrate and adjacent to the dummy word line and between the dummy word line and the word lines and there is no self-aligned source region around the dummy word line.
    Type: Application
    Filed: February 6, 2009
    Publication date: August 12, 2010
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chun-Yuan Lo, Cheng-Ming Yih, Wen-Pin Lu
  • Patent number: 7596028
    Abstract: Methods for programming and program verification of a flash memory are described that ease the buried drain contact induced operation and increase the retention window. In a first aspect of the invention, a program operation method provides varying program biases which are applied to different groups of memory cells. The program biases can be supplied as drain bias voltages or gate bias voltages. The program biases vary depending on which group of memory cells is programmed. In one embodiment, a first drain voltage VD1 is applied to the first group of memory cells M0 and Mn. A second drain voltage VD2 is applied to the second group of memory cells M1 and Mn-1, where VD2=VD1+?VD. In a second aspect of the invention, a plurality of program verification voltage levels are selected to verify that the memory cells pass the program voltage levels.
    Type: Grant
    Filed: December 28, 2006
    Date of Patent: September 29, 2009
    Assignee: Macronix International Co., Ltd.
    Inventors: Ming Shiang Chen, Wen Pin Lu, I-Jen Huang, Chi Yuan Chin, Nian-Kai Zous
  • Publication number: 20090091983
    Abstract: A non-volatile memory structure including a substrate, stacked patterns and stress patterns is provided. The stacked patterns are disposed on the substrate. Each of the stacked patterns includes a charge storage structure and a gate from bottom to top. Here, the charge storage structure at least includes a charge storage layer. The stress patterns are disposed on the substrate between the two adjacent stacked patterns, respectively.
    Type: Application
    Filed: October 3, 2007
    Publication date: April 9, 2009
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Shaw-Hung Ku, Shih-Chin Lee, Chia-Wei Wu, Shang-Wei Lin, Tzung-Ting Han, Ming-Shang Chen, Wen-Pin Lu
  • Publication number: 20080224200
    Abstract: Methods are described for fabricating NAND-type EEPROMs without field oxide isolation. P+ implantations are employed to isolate adjacent memory cells.
    Type: Application
    Filed: May 30, 2008
    Publication date: September 18, 2008
    Inventors: Ming-Shang Chen, Wen-Pin Lu
  • Patent number: 7399674
    Abstract: Methods are described for fabricating NAND-type EEPROMs without field oxide isolation. P+ implantations are employed to isolate adjacent memory cells.
    Type: Grant
    Filed: October 22, 2004
    Date of Patent: July 15, 2008
    Assignee: Macronix International Co., Ltd.
    Inventors: Ming-Shang Chen, Wen-Pin Lu
  • Publication number: 20080158966
    Abstract: Methods for programming and program verification of a flash memory are described that ease the buried drain contact induced operation and increase the retention window. In a first aspect of the invention, a program operation method provides varying program biases which are applied to different groups of memory cells. The program biases can be supplied as drain bias voltages or gate bias voltages. The program biases vary depending on which group of memory cells is programmed. In one embodiment, a first drain voltage VD1 is applied to the first group of memory cells M0 and Mn. A second drain voltage VD2 is applied to the second group of memory cells M1 and Mn-1, where VD2=VD1+?VD. In a second aspect of the invention, a plurality of program verification voltage levels are selected to verify that the memory cells pass the program voltage levels.
    Type: Application
    Filed: December 28, 2006
    Publication date: July 3, 2008
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Ming-Shiang Chen, Wen-Pin Lu, I-Jen Huang, Chi Yuan Chin, Nian-Kai Zous
  • Publication number: 20070297445
    Abstract: A protocol translating device (20) for protocols translating, includes a protocol parsing module (200), an endpoint management module (210), a call control state machine (220), and a protocol primitive module (230). The protocol parsing module is used for parsing notices, and sending call events corresponding to the notices. The endpoint management module is used for translating the call events to endpoint management call events. The call control state machine is used for receiving the endpoint management call events, retrieving corresponding call states, determining a type of endpoint management digit collected events, and sending a call make according to the corresponding call states and the type of the endpoint management digit collected events. The protocol primitive module is used for determining a type of the call make and sending a protocol call make request to a corresponding protocol sub-module according to the type of the call make.
    Type: Application
    Filed: June 20, 2007
    Publication date: December 27, 2007
    Applicant: HON HAI PRECISION INDUSTRY CO., LTD.
    Inventor: WEN-PIN LU
  • Publication number: 20070190719
    Abstract: A method of forming a contact on a semiconductor device is provided. First, a substrate is provided. A plurality of gate structures defined by a plurality of word lines in a first direction, and a plurality of diffusion regions covered by a first dielectric layer in a second direction are provided over the substrate. The gate structures located underneath the word lines and isolated by the diffusion regions. Then, an etching stop layer is formed. The etching stop layer and the first dielectric layer have different etching selectivity. A second dielectric layer is formed over the substrate. Furthermore, a plurality of contact holes to the diffusion regions between the word lines are formed by using the etching stop layer as a self-aligned mask.
    Type: Application
    Filed: March 27, 2007
    Publication date: August 16, 2007
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Tzung-Ting Han, Ming-Shang Chen, Wen-Pin Lu, Meng-Hsuan Weng
  • Patent number: 7214983
    Abstract: A method of fabricating a non-volatile memory is provided. A plurality of stack gate strips is formed on a substrate and a plurality of source/drain regions is formed in the substrate beside the stack gate strips. A plurality of dielectric strips is formed on the source/drain regions. A plurality of word lines is formed on the stack gate strips and the dielectric strips. Thereafter, the stack gate strips exposed by the word lines are removed to form a plurality of openings. A plurality of spacers is formed on the sidewalls of the openings and the word lines. A dielectric layer is formed over the substrate. A plurality of contacts is formed in the dielectric layer and the dielectric strips between two adjacent word lines.
    Type: Grant
    Filed: November 24, 2004
    Date of Patent: May 8, 2007
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Tzung-Ting Han, Ming-Shang Chen, Wen-Pin Lu, Meng-Hsuan Weng
  • Patent number: 7157360
    Abstract: A memory device with an improved passivation structure. The memory device includes a semiconductor substrate with memory units thereon, an interconnect structure over the surface of the semiconductor substrate to connect with the memory units, and a passivation structure over the surface of the interconnect structure. The passivation structure comprises a dielectric layer over the surface of the interconnect structure and a silicon-oxy-nitride (SiOxNy) layer over the surface of the dielectric layer.
    Type: Grant
    Filed: September 29, 2003
    Date of Patent: January 2, 2007
    Assignee: Macronix International Co., Ltd.
    Inventors: Hung-Yu Chiu, U-Way Tseng, Wen-Pin Lu, Cheng-Chen Huseh, Pei-Ren Jeng, Fu-Hsiang Hsu
  • Patent number: 7116606
    Abstract: A protection circuit to discharge plasma-induced charges in a semiconductor device or integrated circuit includes a PMOS transistor and a diode. The PMOS transistor includes a substrate, a drain, a source, and a gate, the source being coupled to receive the plasma-induced charges. The diode has a positive terminal coupled to the substrate of the PMOS transistor and a negative terminal coupled the gate of the PMOS transistor.
    Type: Grant
    Filed: January 14, 2005
    Date of Patent: October 3, 2006
    Assignee: Macronix International Co., Ltd.
    Inventors: Ming-Hung Chou, Wen-Pin Lu
  • Patent number: 7100583
    Abstract: Disclosed is a filter screen and the apparatus for aiding vehicle fuel combustion and purifying exhaust gas using said filter screen which has a metallic screen body treated in a treatment tank containing a discharge electrode plate and a receiving electrode plate both formed of mineral plate so as to have a memorized wave of wave length ranging 5 ?m˜20 ?m. When placed in various environments, the filter screen is able to negatively ionize the ions in the air passing therethrough by releasing an energy wave motion so as to recover the air into its original pure state thereby improving the quality of the air and enhance the human health.
    Type: Grant
    Filed: March 23, 2004
    Date of Patent: September 5, 2006
    Assignee: Eternity Trading Co., Ltd.
    Inventor: Wen-Pin Lu
  • Publication number: 20060157744
    Abstract: A protection circuit to discharge plasma-induced charges in a semiconductor device or integrated circuit includes a PMOS transistor and a diode. The PMOS transistor includes a substrate, a drain, a source, and a gate, the source being coupled to receive the plasma-induced charges. The diode has a positive terminal coupled to the substrate of the PMOS transistor and a negative terminal coupled the gate of the PMOS transistor.
    Type: Application
    Filed: January 14, 2005
    Publication date: July 20, 2006
    Inventors: Ming-Hung Chou, Wen-Pin Lu
  • Publication number: 20060110879
    Abstract: A method of fabricating a non-volatile memory is provided. A plurality of stack gate strips is formed on a substrate and a plurality of source/drain regions is formed in the substrate beside the stack gate strips. A plurality of dielectric strips is formed on the source/drain regions. A plurality of word lines is formed on the stack gate strips and the dielectric strips. Thereafter, the stack gate strips exposed by the word lines are removed to form a plurality of openings. A plurality of spacers is formed on the sidewalls of the openings and the word lines. A dielectric layer is formed over the substrate. A plurality of contacts is formed in the dielectric layer and the dielectric strips between two adjacent word lines.
    Type: Application
    Filed: November 24, 2004
    Publication date: May 25, 2006
    Inventors: Tzung-Ting Han, Ming-Shang Chen, Wen-Pin Lu, Meng-Hsuan Weng
  • Publication number: 20060086968
    Abstract: Methods are described for fabricating NAND-type EEPROMs without field oxide isolation. P+ implantations are employed to isolate adjacent memory cells.
    Type: Application
    Filed: October 22, 2004
    Publication date: April 27, 2006
    Inventors: Ming-Shang Chen, Wen-Pin Lu
  • Patent number: 7012004
    Abstract: A method of manufacturing a nonvolatile memory cell with triple spacers and the structure thereof. A gate structure is formed on a substrate. Diffusion regions are formed in the substrate on either side of the gate structure. A linear oxide layer is formed on the gate structure and the substrate. A conformal nitride layer is formed on the linear oxide layer. The nitride layer and the linear oxide layer are partially etched back to form linear oxide spacers on the sides of the gate structure and nitride spacers on the sides of the linear oxide spacers. A conformal oxide layer is formed on the linear oxide spacers, the nitride spacers, the gate structure and the substrate. The oxide layer is partially etched back to form oxide spacers on the sides of the nitride spacers.
    Type: Grant
    Filed: May 13, 2005
    Date of Patent: March 14, 2006
    Assignee: Macronix International Co., Ltd.
    Inventors: U-Way Tseng, Hung-Yu Chiu, Wen-Pin Lu, Pao-Ling Hwang
  • Publication number: 20060032483
    Abstract: Disclosed is a filter screen and the apparatus for aiding vehicle fuel combustion and purifying exhaust gas using said filter screen which has a metallic screen body treated in a treatment tank containing a discharge electrode plate and a receiving electrode plate both formed of mineral plate so as to have a memorized wave of wave length ranging 5 ?m˜20 ?m. When placed in various environments, the filter screen is able to negatively ionize the ions in the air passing therethrough by releasing an energy wave motion so as to recover the air into its original pure state thereby improving the quality of the air and enhance the human health.
    Type: Application
    Filed: March 23, 2004
    Publication date: February 16, 2006
    Inventor: Wen-Pin Lu
  • Publication number: 20050208720
    Abstract: A method of manufacturing a nonvolatile memory cell with triple spacers and the structure thereof. A gate structure is formed on a substrate. Diffusion regions are formed in the substrate on either side of the gate structure. A linear oxide layer is formed on the gate structure and the substrate. A conformal nitride layer is formed on the linear oxide layer. The nitride layer and the linear oxide layer are partially etched back to form linear oxide spacers on the sides of the gate structure and nitride spacers on the sides of the linear oxide spacers. A conformal oxide layer is formed on the linear oxide spacers, the nitride spacers, the gate structure and the substrate. The oxide layer is partially etched back to form oxide spacers on the sides of the nitride spacers.
    Type: Application
    Filed: May 13, 2005
    Publication date: September 22, 2005
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: U-Way Tseng, Hung-Yu Chiu, Wen-Pin Lu, Pau-Ling Hwang
  • Publication number: 20050130329
    Abstract: A method for predicting a source of semiconductor part deviation is disclosed. The method includes the steps of selecting at least one chart including part parameters and associating with each of the part parameters at least one fabrication process, which are stored in recipes, scanning the selected charts for deviations in the part parameters, wherein the deviations are determined by monitoring a trend of recent values of the part parameters, indicating the charts containing the part parameters wherein the part parameter values are determined as being outside of at least one trend tolerance value associated with the parameter, identifying, in each of the indicated charts at least one process associated with each of the part parameter deviations outside the at least one tread tolerance value, and determining a source of the parameter deviation by correlating each of the identified at least one processes.
    Type: Application
    Filed: December 16, 2003
    Publication date: June 16, 2005
    Inventors: Yushan Liao, Chi-Kun Yu, Wen-Pin Lu, Chun-Ching Hsieh