Patents by Inventor Wen-Shan Hsu

Wen-Shan Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron microscope specimen and method for preparing the same
    Patent number: 8481968
    Abstract: A method for preparing an electron microscope specimen is provided. The method includes providing a wafer sample with an analysis region disposed thereon. A dicing process is performed to cut a sample piece from the wafer sample. The sample piece includes a target pillar structure wherein the analysis region is located on a top portion of the target pillar structure. A thinning process is performed to thin the top portion of the target pillar structure. The invention further provides an electron microscope specimen and a method of forming a 3D image.
    Type: Grant
    Filed: November 29, 2010
    Date of Patent: July 9, 2013
    Assignee: Inotera Memories, Inc.
    Inventors: Jian-Shing Luo, Wen-Shan Hsu
  • ELECTRON MICROSCOPE SPECIMEN AND METHOD FOR PREPARING THE SAME
    Publication number: 20110291008
    Abstract: A method for preparing an electron microscope specimen is provided. The method includes providing a wafer sample with an analysis region disposed thereon. A dicing process is performed to cut a sample piece from the wafer sample. The sample piece includes a target pillar structure wherein the analysis region is located on a top portion of the target pillar structure. A thinning process is performed to thin the top portion of the target pillar structure. The invention further provides an electron microscope specimen and a method of forming a 3D image.
    Type: Application
    Filed: November 29, 2010
    Publication date: December 1, 2011
    Inventors: Jian-Shing Luo, Wen-Shan Hsu