Abstract: A semiconductor wafer packaging system to cushion semiconductor wafers from damage from shock and vibration during transportation is described. The semiconductor wafer packaging system has at least one a wafer case to enclose the semiconductor wafers. Each wafer case is placed within a wafer case padding unit. Each padding unit includes a rectangular cushioning block and a plurality of trapezoidal spacer blocks affixed to the four sides of the rectangular cushioning block. The rectangular cushioning block has an opening to accept the wafer case and a plurality of trapezoidal notches on two adjoining sides of the rectangular cushioning block. The wafer case padding unit is placed within a packaging canister for transportation.

Abstract: An improved container for storing large diameter semiconductor wafers. The container has a body member and an enclosure member that are secured together with complimentary threaded portions. The top of the enclosure member has a circular upstanding flange spaced from a circular upstanding protrusion. Upstanding radially ribs are provided between the flange and protrusion to strengthen the enclosure member and provide a means for engagement with a wrench that will apply a torque force.

Abstract: A cushioned holder for a cylindrical container for a semiconductor wafer is formed of a stack of layers of a cushioning material that each have a rectangular opening for receiving the container; the layers are spaced from the box by several absorbers having a mirrored pyramidal frustum shape. The shape is easy to manufacture and it provides improved cushioning without increasing the space occupied by the layers.