Patents by Inventor Wen-Tsai Yen
Wen-Tsai Yen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11735446Abstract: A substrate carrier, includes: a unitary body fabricated from a single block of graphite, wherein the body comprises a back plate, and a pair of spaced apart, substantially parallel, side rails, wherein each of the side rails comprises: an inwardly facing surface extending outwardly of the back plate; a longitudinally extending selenium vapor bore formed therein, a top end of the selenium vapor bore being open and configured for coupling to a selenium supply container for receiving selenium vapor by gravity, a bottom end of the selenium vapor bore being closed; an inwardly directed selenium vapor channel; a plurality of selenium vapor outlets disposed between the selenium vapor bore and the inwardly directed selenium vapor channel so as provide a plurality of conduits between the selenium vapor bore and the selenium vapor channel; and, a longitudinally extending engagement slot formed in the inwardly facing surface of each side rail adjacent the back plate to engage and hold a substrate in proximity to the baType: GrantFiled: March 25, 2019Date of Patent: August 22, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei-Lun Lu, Jyh-Lih Wu, Wen-Tsai Yen
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Publication number: 20200373443Abstract: A solar cell device with improved performance and a method of fabricating the same is described. The solar cell includes a back contact layer formed on a substrate, an absorber layer formed on the back contact layer, a buffer layer formed on the absorber layer, and a front contact layer formed by depositing a transparent conductive oxide layer on the buffer layer and annealing the deposited TCO layer.Type: ApplicationFiled: August 10, 2020Publication date: November 26, 2020Inventors: Chi-Yu CHIANG, Yung-Sheng CHIU, Wen-Tsai YEN
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Patent number: 10840400Abstract: A device and method of improving efficiency of a thin film solar cell by providing a back reflector between a back electrode layer and an absorber layer. Back reflector reflects sunlight photons back into the absorber layer to generate additional electrical energy. The device is a photovoltaic device comprising a substrate, a back electrode layer, a back reflector, an absorber layer, a buffer layer, and a front contact layer. The back reflector is formed as a plurality of parallel lines.Type: GrantFiled: August 29, 2013Date of Patent: November 17, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jyh-Lih Wu, Li Xu, Wen-Tsai Yen, Chung-Hsien Wu
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Patent number: 10672925Abstract: A solar cell device with improved performance and a method of fabricating the same is described. The solar cell includes a back contact layer formed on a substrate, an absorber layer formed on the back contact layer, a buffer layer formed on the absorber layer, and a front contact layer formed by depositing a transparent conductive oxide layer on the buffer layer and annealing the deposited TCO layer.Type: GrantFiled: June 14, 2013Date of Patent: June 2, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chi-Yu Chiang, Yung-Sheng Chiu, Wen-Tsai Yen
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Patent number: 10546964Abstract: A solar cell with a molybdenum back electrode layer and a molybdenum selenide ohmic contact layer over the molybdenum back electrode, is provided. The molybdenum selenide layer includes an accurately controlled thickness. A distinct interface exists between the molybdenum back electrode layer and the molybdenum silicide layer. The molybdenum silicide layer is produced by forming a molybdenum layer or a molybdenum nitride layer or a molybdenum oxide layer over an initially formed molybdenum layer such that an interface exists between the two layers. A selenization and sulfurization process is carried out to selectively convert the molybdenum-containing layer to molybdenum selenide but not the original molybdenum back electrode layer which remains as a molybdenum layer.Type: GrantFiled: November 15, 2012Date of Patent: January 28, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shih-Wei Chen, Wen-Chin Lee, Wen-Tsai Yen, Chung-Hsien Wu, Kuan-Chu Chen
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Publication number: 20190221459Abstract: A substrate carrier, includes: a unitary body fabricated from a single block of graphite, wherein the body comprises a back plate, and a pair of spaced apart, substantially parallel, side rails, wherein each of the side rails comprises: an inwardly facing surface extending outwardly of the back plate; a longitudinally extending selenium vapor bore formed therein, a top end of the selenium vapor bore being open and configured for coupling to a selenium supply container for receiving selenium vapor by gravity, a bottom end of the selenium vapor bore being closed; an inwardly directed selenium vapor channel; a plurality of selenium vapor outlets disposed between the selenium vapor bore and the inwardly directed selenium vapor channel so as provide a plurality of conduits between the selenium vapor bore and the selenium vapor channel; and, a longitudinally extending engagement slot formed in the inwardly facing surface of each side rail adjacent the back plate to engage and hold a substrate in proximity to the baType: ApplicationFiled: March 25, 2019Publication date: July 18, 2019Inventors: Wei-Lun LU, Jyh-Lih WU, Wen-Tsai YEN
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Patent number: 10032944Abstract: A solar cell device and a method of fabricating the same are described. The method of fabricating a solar cell includes forming a photovoltaic substructure including a substrate, back contact, absorber and buffer, forming a transparent cover separate from the photovoltaic substructure including a transparent layer and a plasmonic nanostructured layer in contact with the transparent layer, and adhering the transparent cover on top of the photovoltaic substructure. The plasmonic nanostructured layer can include metal nanoparticles.Type: GrantFiled: October 25, 2013Date of Patent: July 24, 2018Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jyh-Lih Wu, Wen-Tsai Yen, Wei-Lun Xu
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Patent number: 9410236Abstract: A sputtering apparatus comprises a chamber configured to contain at least one sputter target and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one sputter target and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape.Type: GrantFiled: November 29, 2012Date of Patent: August 9, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wen-Tsai Yen, Chung-Hsien Wu, Shih-Wei Chen, Ying-Hsin Wu, Jui-Fu Hsueh, Kuan-Chu Chen
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Patent number: 9178103Abstract: A method and system for forming chalcogenide semiconductor absorber materials with sodium impurities is provided. The system includes a sodium vaporizer in which a solid sodium source material is vaporized. The sodium vapor is added to reactant gases and/or annealing gases and directed to a furnace that includes a substrate with a metal precursor material. The precursor material reacts with reactant gases such as S-containing gases and Se-containing gases according to various process sequences. In one embodiment, a selenization operation is followed by an annealing operation and a sulfurization operation and the sodium vapor is caused to react with the metal precursor during at least one of the annealing and the sulfurization steps to produce a chalcogenide semiconductor absorber material that includes sodium dopant impurities.Type: GrantFiled: August 9, 2013Date of Patent: November 3, 2015Assignee: TSMC Solar Ltd.Inventors: Chung-Hsien Wu, Wen-Tsai Yen, Jyh-Lih Wu
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Patent number: 9178088Abstract: A method for fabricating a solar cell generally comprises delivering a solar cell substructure to a chamber. Electromagnetic radiation is generated using a wave generating device that is coupled to the chamber such that the wave generating device is positioned proximate to the solar cell substructure. The electromagnetic radiation is applied onto at least a portion of the solar cell substructure to facilitate the diffusion of at least one metal element through at least a portion of the solar cell substructure such that a semiconductor interface is formed between at least two different types of semiconductor materials of the solar cell substructure.Type: GrantFiled: September 13, 2013Date of Patent: November 3, 2015Assignee: TSMC Solar Ltd.Inventors: Wen-Tsai Yen, Jyh-Lih Wu, Wei-Lun Xu, Chung-Hsien Wu
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Patent number: 9166094Abstract: A method for forming a thin film solar cell that includes one or more moisture barrier layer made of a water-insoluble material for protection against water and oxygen damage to the top electrode layer material is disclosed.Type: GrantFiled: April 22, 2014Date of Patent: October 20, 2015Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wen-Chin Lee, Yung-Sheng Chiu, Wen-Tsai Yen, Liang-Sheng Yu
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Patent number: 9048373Abstract: An evaporation apparatus comprises a chamber configured to contain at least one dispensing nozzle and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one dispensing nozzle and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape. The at least one adjustable shielding member has a heater.Type: GrantFiled: June 13, 2013Date of Patent: June 2, 2015Assignee: TSMC Solar Ltd.Inventors: Chung-Hsien Wu, Chi-Yu Chiang, Shih-Wei Chen, Wen-Tsai Yen
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Publication number: 20150114445Abstract: A solar cell device and a method of fabricating the same are described. The method of fabricating a solar cell includes forming a photovoltaic substructure including a substrate, back contact, absorber and buffer, forming a transparent cover separate from the photovoltaic substructure including a transparent layer and a plasmonic nanostructured layer in contact with the transparent layer, and adhering the transparent cover on top of the photovoltaic substructure. The plasmonic nanostructured layer can include metal nanoparticles.Type: ApplicationFiled: October 25, 2013Publication date: April 30, 2015Applicant: TSMC SOLAR LTD.Inventors: Jyh-Lih WU, Wen-Tsai YEN, Wei-Lun XU
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Publication number: 20150079717Abstract: A method for fabricating a solar cell generally comprises delivering a solar cell substructure to a chamber. Electromagnetic radiation is generated using a wave generating device that is coupled to the chamber such that the wave generating device is positioned proximate to the solar cell substructure. The electromagnetic radiation is applied onto at least a portion of the solar cell substructure to facilitate the diffusion of at least one metal element through at least a portion of the solar cell substructure such that a semiconductor interface is formed between at least two different types of semiconductor materials of the solar cell substructure.Type: ApplicationFiled: September 13, 2013Publication date: March 19, 2015Applicant: TSMC SOLAR LTD.Inventors: Wen-Tsai YEN, Jyh-Lih WU, Wei-Lun XU, Chung-Hsien WU
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Publication number: 20150059850Abstract: A device and method of improving efficiency of a thin film solar cell by providing a back reflector between a back electrode layer and an absorber layer. Back reflector reflects sunlight photons back into the absorber layer to generate additional electrical energy. The device is a photovoltaic device comprising a substrate, a back electrode layer, a back reflector, an absorber layer, a buffer layer, and a front contact layer. The back reflector is formed as a plurality of parallel lines.Type: ApplicationFiled: August 29, 2013Publication date: March 5, 2015Applicant: TSMC SOLAR LTD.Inventors: Jyh-Lih WU, Li XU, Wen-Tsai YEN, Chung-Hsien WU
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Publication number: 20150044814Abstract: A method and system for forming chalcogenide semiconductor absorber materials with sodium impurities is provided. The system includes a sodium vaporizer in which a solid sodium source material is vaporized. The sodium vapor is added to reactant gases and/or annealing gases and directed to a furnace that includes a substrate with a metal precursor material. The precursor material reacts with reactant gases such as S-containing gases and Se-containing gases according to various process sequences. In one embodiment, a selenization operation is followed by an annealing operation and a sulfurization operation and the sodium vapor is caused to react with the metal precursor during at least one of the annealing and the sulfurization steps to produce a chalcogenide semiconductor absorber material that includes sodium dopant impurities.Type: ApplicationFiled: August 9, 2013Publication date: February 12, 2015Applicant: TSMC Solar Ltd.Inventors: Chung-Hsien WU, Wen-Tsai YEN, Jyh-Lih WU
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Publication number: 20150034160Abstract: A photovoltaic device includes a substrate; a back contact layer disposed on the substrate; an absorber layer for photo absorption disposed above the back contact layer; a buffer layer disposed above the absorber layer; a front contact layer disposed above the buffer layer; and a plasmonic nanostructured layer having a plurality of nano-particles, wherein the plasmonic nanostructured layer is between a topmost back contact layer surface and the absorber layer.Type: ApplicationFiled: August 2, 2013Publication date: February 5, 2015Applicant: TSMC SOLAR LTD.Inventors: Jyh-Lih WU, Wen-Tsai YEN
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Publication number: 20150011025Abstract: A system for depositing selenium on a substrate comprises includes a substrate carrier including a body, means for holding the substrate, and a plurality of selenium vapor outlets formed in the body to direct a flux of selenium vapor onto the substrate. A selenium supply container provides selenium vapor to the selenium vapor outlets. At least one temperature sensor is coupled to the substrate carrier to sense temperature of the substrate. A heat source is positioned to heat the substrate. A controller is coupled to the temperature sensor and the heat source.Type: ApplicationFiled: July 3, 2013Publication date: January 8, 2015Inventors: Wei-Lun LU, Jyh-Lih WU, Wen-Tsai YEN
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Publication number: 20140366935Abstract: A solar cell device with improved performance and a method of fabricating the same is described. The solar cell includes a back contact layer formed on a substrate, an absorber layer formed on the back contact layer, a buffer layer formed on the absorber layer, and a front contact layer formed by depositing a transparent conductive oxide layer on the buffer layer and annealing the deposited TCO layer.Type: ApplicationFiled: June 14, 2013Publication date: December 18, 2014Inventors: Chi-Yu CHIANG, Yung-Sheng CHIU, Wen-Tsai YEN
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Publication number: 20140370623Abstract: An evaporation apparatus comprises a chamber configured to contain at least one dispensing nozzle and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one dispensing nozzle and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape. The at least one adjustable shielding member has a heater.Type: ApplicationFiled: June 13, 2013Publication date: December 18, 2014Inventors: Chung-Hsien WU, Chi-Yu CHIANG, Shih-Wei CHEN, Wen-Tsai YEN