Patents by Inventor Wen-Tsai Yen

Wen-Tsai Yen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11735446
    Abstract: A substrate carrier, includes: a unitary body fabricated from a single block of graphite, wherein the body comprises a back plate, and a pair of spaced apart, substantially parallel, side rails, wherein each of the side rails comprises: an inwardly facing surface extending outwardly of the back plate; a longitudinally extending selenium vapor bore formed therein, a top end of the selenium vapor bore being open and configured for coupling to a selenium supply container for receiving selenium vapor by gravity, a bottom end of the selenium vapor bore being closed; an inwardly directed selenium vapor channel; a plurality of selenium vapor outlets disposed between the selenium vapor bore and the inwardly directed selenium vapor channel so as provide a plurality of conduits between the selenium vapor bore and the selenium vapor channel; and, a longitudinally extending engagement slot formed in the inwardly facing surface of each side rail adjacent the back plate to engage and hold a substrate in proximity to the ba
    Type: Grant
    Filed: March 25, 2019
    Date of Patent: August 22, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Lun Lu, Jyh-Lih Wu, Wen-Tsai Yen
  • Publication number: 20200373443
    Abstract: A solar cell device with improved performance and a method of fabricating the same is described. The solar cell includes a back contact layer formed on a substrate, an absorber layer formed on the back contact layer, a buffer layer formed on the absorber layer, and a front contact layer formed by depositing a transparent conductive oxide layer on the buffer layer and annealing the deposited TCO layer.
    Type: Application
    Filed: August 10, 2020
    Publication date: November 26, 2020
    Inventors: Chi-Yu CHIANG, Yung-Sheng CHIU, Wen-Tsai YEN
  • Patent number: 10840400
    Abstract: A device and method of improving efficiency of a thin film solar cell by providing a back reflector between a back electrode layer and an absorber layer. Back reflector reflects sunlight photons back into the absorber layer to generate additional electrical energy. The device is a photovoltaic device comprising a substrate, a back electrode layer, a back reflector, an absorber layer, a buffer layer, and a front contact layer. The back reflector is formed as a plurality of parallel lines.
    Type: Grant
    Filed: August 29, 2013
    Date of Patent: November 17, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jyh-Lih Wu, Li Xu, Wen-Tsai Yen, Chung-Hsien Wu
  • Patent number: 10672925
    Abstract: A solar cell device with improved performance and a method of fabricating the same is described. The solar cell includes a back contact layer formed on a substrate, an absorber layer formed on the back contact layer, a buffer layer formed on the absorber layer, and a front contact layer formed by depositing a transparent conductive oxide layer on the buffer layer and annealing the deposited TCO layer.
    Type: Grant
    Filed: June 14, 2013
    Date of Patent: June 2, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chi-Yu Chiang, Yung-Sheng Chiu, Wen-Tsai Yen
  • Patent number: 10546964
    Abstract: A solar cell with a molybdenum back electrode layer and a molybdenum selenide ohmic contact layer over the molybdenum back electrode, is provided. The molybdenum selenide layer includes an accurately controlled thickness. A distinct interface exists between the molybdenum back electrode layer and the molybdenum silicide layer. The molybdenum silicide layer is produced by forming a molybdenum layer or a molybdenum nitride layer or a molybdenum oxide layer over an initially formed molybdenum layer such that an interface exists between the two layers. A selenization and sulfurization process is carried out to selectively convert the molybdenum-containing layer to molybdenum selenide but not the original molybdenum back electrode layer which remains as a molybdenum layer.
    Type: Grant
    Filed: November 15, 2012
    Date of Patent: January 28, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shih-Wei Chen, Wen-Chin Lee, Wen-Tsai Yen, Chung-Hsien Wu, Kuan-Chu Chen
  • Publication number: 20190221459
    Abstract: A substrate carrier, includes: a unitary body fabricated from a single block of graphite, wherein the body comprises a back plate, and a pair of spaced apart, substantially parallel, side rails, wherein each of the side rails comprises: an inwardly facing surface extending outwardly of the back plate; a longitudinally extending selenium vapor bore formed therein, a top end of the selenium vapor bore being open and configured for coupling to a selenium supply container for receiving selenium vapor by gravity, a bottom end of the selenium vapor bore being closed; an inwardly directed selenium vapor channel; a plurality of selenium vapor outlets disposed between the selenium vapor bore and the inwardly directed selenium vapor channel so as provide a plurality of conduits between the selenium vapor bore and the selenium vapor channel; and, a longitudinally extending engagement slot formed in the inwardly facing surface of each side rail adjacent the back plate to engage and hold a substrate in proximity to the ba
    Type: Application
    Filed: March 25, 2019
    Publication date: July 18, 2019
    Inventors: Wei-Lun LU, Jyh-Lih WU, Wen-Tsai YEN
  • Patent number: 10032944
    Abstract: A solar cell device and a method of fabricating the same are described. The method of fabricating a solar cell includes forming a photovoltaic substructure including a substrate, back contact, absorber and buffer, forming a transparent cover separate from the photovoltaic substructure including a transparent layer and a plasmonic nanostructured layer in contact with the transparent layer, and adhering the transparent cover on top of the photovoltaic substructure. The plasmonic nanostructured layer can include metal nanoparticles.
    Type: Grant
    Filed: October 25, 2013
    Date of Patent: July 24, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jyh-Lih Wu, Wen-Tsai Yen, Wei-Lun Xu
  • Patent number: 9410236
    Abstract: A sputtering apparatus comprises a chamber configured to contain at least one sputter target and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one sputter target and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape.
    Type: Grant
    Filed: November 29, 2012
    Date of Patent: August 9, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Tsai Yen, Chung-Hsien Wu, Shih-Wei Chen, Ying-Hsin Wu, Jui-Fu Hsueh, Kuan-Chu Chen
  • Patent number: 9178103
    Abstract: A method and system for forming chalcogenide semiconductor absorber materials with sodium impurities is provided. The system includes a sodium vaporizer in which a solid sodium source material is vaporized. The sodium vapor is added to reactant gases and/or annealing gases and directed to a furnace that includes a substrate with a metal precursor material. The precursor material reacts with reactant gases such as S-containing gases and Se-containing gases according to various process sequences. In one embodiment, a selenization operation is followed by an annealing operation and a sulfurization operation and the sodium vapor is caused to react with the metal precursor during at least one of the annealing and the sulfurization steps to produce a chalcogenide semiconductor absorber material that includes sodium dopant impurities.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: November 3, 2015
    Assignee: TSMC Solar Ltd.
    Inventors: Chung-Hsien Wu, Wen-Tsai Yen, Jyh-Lih Wu
  • Patent number: 9178088
    Abstract: A method for fabricating a solar cell generally comprises delivering a solar cell substructure to a chamber. Electromagnetic radiation is generated using a wave generating device that is coupled to the chamber such that the wave generating device is positioned proximate to the solar cell substructure. The electromagnetic radiation is applied onto at least a portion of the solar cell substructure to facilitate the diffusion of at least one metal element through at least a portion of the solar cell substructure such that a semiconductor interface is formed between at least two different types of semiconductor materials of the solar cell substructure.
    Type: Grant
    Filed: September 13, 2013
    Date of Patent: November 3, 2015
    Assignee: TSMC Solar Ltd.
    Inventors: Wen-Tsai Yen, Jyh-Lih Wu, Wei-Lun Xu, Chung-Hsien Wu
  • Patent number: 9166094
    Abstract: A method for forming a thin film solar cell that includes one or more moisture barrier layer made of a water-insoluble material for protection against water and oxygen damage to the top electrode layer material is disclosed.
    Type: Grant
    Filed: April 22, 2014
    Date of Patent: October 20, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Chin Lee, Yung-Sheng Chiu, Wen-Tsai Yen, Liang-Sheng Yu
  • Patent number: 9048373
    Abstract: An evaporation apparatus comprises a chamber configured to contain at least one dispensing nozzle and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one dispensing nozzle and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape. The at least one adjustable shielding member has a heater.
    Type: Grant
    Filed: June 13, 2013
    Date of Patent: June 2, 2015
    Assignee: TSMC Solar Ltd.
    Inventors: Chung-Hsien Wu, Chi-Yu Chiang, Shih-Wei Chen, Wen-Tsai Yen
  • Publication number: 20150114445
    Abstract: A solar cell device and a method of fabricating the same are described. The method of fabricating a solar cell includes forming a photovoltaic substructure including a substrate, back contact, absorber and buffer, forming a transparent cover separate from the photovoltaic substructure including a transparent layer and a plasmonic nanostructured layer in contact with the transparent layer, and adhering the transparent cover on top of the photovoltaic substructure. The plasmonic nanostructured layer can include metal nanoparticles.
    Type: Application
    Filed: October 25, 2013
    Publication date: April 30, 2015
    Applicant: TSMC SOLAR LTD.
    Inventors: Jyh-Lih WU, Wen-Tsai YEN, Wei-Lun XU
  • Publication number: 20150079717
    Abstract: A method for fabricating a solar cell generally comprises delivering a solar cell substructure to a chamber. Electromagnetic radiation is generated using a wave generating device that is coupled to the chamber such that the wave generating device is positioned proximate to the solar cell substructure. The electromagnetic radiation is applied onto at least a portion of the solar cell substructure to facilitate the diffusion of at least one metal element through at least a portion of the solar cell substructure such that a semiconductor interface is formed between at least two different types of semiconductor materials of the solar cell substructure.
    Type: Application
    Filed: September 13, 2013
    Publication date: March 19, 2015
    Applicant: TSMC SOLAR LTD.
    Inventors: Wen-Tsai YEN, Jyh-Lih WU, Wei-Lun XU, Chung-Hsien WU
  • Publication number: 20150059850
    Abstract: A device and method of improving efficiency of a thin film solar cell by providing a back reflector between a back electrode layer and an absorber layer. Back reflector reflects sunlight photons back into the absorber layer to generate additional electrical energy. The device is a photovoltaic device comprising a substrate, a back electrode layer, a back reflector, an absorber layer, a buffer layer, and a front contact layer. The back reflector is formed as a plurality of parallel lines.
    Type: Application
    Filed: August 29, 2013
    Publication date: March 5, 2015
    Applicant: TSMC SOLAR LTD.
    Inventors: Jyh-Lih WU, Li XU, Wen-Tsai YEN, Chung-Hsien WU
  • Publication number: 20150044814
    Abstract: A method and system for forming chalcogenide semiconductor absorber materials with sodium impurities is provided. The system includes a sodium vaporizer in which a solid sodium source material is vaporized. The sodium vapor is added to reactant gases and/or annealing gases and directed to a furnace that includes a substrate with a metal precursor material. The precursor material reacts with reactant gases such as S-containing gases and Se-containing gases according to various process sequences. In one embodiment, a selenization operation is followed by an annealing operation and a sulfurization operation and the sodium vapor is caused to react with the metal precursor during at least one of the annealing and the sulfurization steps to produce a chalcogenide semiconductor absorber material that includes sodium dopant impurities.
    Type: Application
    Filed: August 9, 2013
    Publication date: February 12, 2015
    Applicant: TSMC Solar Ltd.
    Inventors: Chung-Hsien WU, Wen-Tsai YEN, Jyh-Lih WU
  • Publication number: 20150034160
    Abstract: A photovoltaic device includes a substrate; a back contact layer disposed on the substrate; an absorber layer for photo absorption disposed above the back contact layer; a buffer layer disposed above the absorber layer; a front contact layer disposed above the buffer layer; and a plasmonic nanostructured layer having a plurality of nano-particles, wherein the plasmonic nanostructured layer is between a topmost back contact layer surface and the absorber layer.
    Type: Application
    Filed: August 2, 2013
    Publication date: February 5, 2015
    Applicant: TSMC SOLAR LTD.
    Inventors: Jyh-Lih WU, Wen-Tsai YEN
  • Publication number: 20150011025
    Abstract: A system for depositing selenium on a substrate comprises includes a substrate carrier including a body, means for holding the substrate, and a plurality of selenium vapor outlets formed in the body to direct a flux of selenium vapor onto the substrate. A selenium supply container provides selenium vapor to the selenium vapor outlets. At least one temperature sensor is coupled to the substrate carrier to sense temperature of the substrate. A heat source is positioned to heat the substrate. A controller is coupled to the temperature sensor and the heat source.
    Type: Application
    Filed: July 3, 2013
    Publication date: January 8, 2015
    Inventors: Wei-Lun LU, Jyh-Lih WU, Wen-Tsai YEN
  • Publication number: 20140366935
    Abstract: A solar cell device with improved performance and a method of fabricating the same is described. The solar cell includes a back contact layer formed on a substrate, an absorber layer formed on the back contact layer, a buffer layer formed on the absorber layer, and a front contact layer formed by depositing a transparent conductive oxide layer on the buffer layer and annealing the deposited TCO layer.
    Type: Application
    Filed: June 14, 2013
    Publication date: December 18, 2014
    Inventors: Chi-Yu CHIANG, Yung-Sheng CHIU, Wen-Tsai YEN
  • Publication number: 20140370623
    Abstract: An evaporation apparatus comprises a chamber configured to contain at least one dispensing nozzle and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one dispensing nozzle and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape. The at least one adjustable shielding member has a heater.
    Type: Application
    Filed: June 13, 2013
    Publication date: December 18, 2014
    Inventors: Chung-Hsien WU, Chi-Yu CHIANG, Shih-Wei CHEN, Wen-Tsai YEN