Abstract: An acoustic wave sensing device integrated with micro-channels and a method for the same are described. The present invention uses a piezoelectric substrate with a thinner portion serving as a sensing area and formed via a micromaching or chemical process. An inter-digital transducer (IDT) is located on the thinner portion to produce flexural plate waves (FPW). The micro-channels can be formed together with the thinner portion via the same manufacturing process, or integrated into the piezoelectric substrate via linkage. In the present invention, a novel manufacturing process and design are proposed for fabrication of the acoustic wave sensing devices with a good piezoelectric characteristic, a stable temperature compensation property, and a robust structure. Thereby, the techniques of flexural plate waves can be applied for liquid sensors. In this way, the drawbacks of the conventional acoustic wave sensing devices, such as poor piezoelectric properties and fragile film structures, are removed.

Abstract: An acoustic wave sensing device integrated with micro-channels and a method for the same are described. The present invention uses a piezoelectric substrate with a thinner portion serving as a sensing area and formed via a micromaching or chemical process. An inter-digital transducer (IDT) is located on the thinner portion to produce flexural plate waves (FPW). The micro-channels can be formed together with the thinner portion via the same manufacturing process, or integrated into the piezoelectric substrate via linkage. In the present invention, a novel manufacturing process and design are proposed for fabrication of the acoustic wave sensing devices with a good piezoelectric characteristic, a stable temperature compensation property, and a robust structure. Thereby, the techniques of flexural plate waves can be applied for liquid sensors. In this way, the drawbacks of the conventional acoustic wave sensing devices, such as poor piezoelectric properties and fragile film structures, are removed.

Abstract: A method for manufacturing chemical sensors is provided for the process of the wafer level chemical sensor. The method is to form a frame around a certain area on the chemical sensor for locating sensing material, and then to fill the Sol-Gel sensing material into the frame. Besides, the present invention further provides a method for dividing the chemical sensor chips employed in such wafer level chemical sensor. The character of such method is to stick an adhesion object such as blue tape on the backside of the substrate, and then to cut in advance a scribe line around the rim of the chemical sensor before filling the sensing material into the sensor. Finally, the plurality of the chemical sensors will be divided into individual ones after the process of calcining or furnacing.

Abstract: A method for determining the thermal resistance constant of a modular heat sink. The method can be carried out by first providing a heat capacity tank formed of a high thermal conductivity metal. A modular heat sink is then mounted on top of the heat capacity tank and heated together with the tank to a temperature of at least 40° C. The heating is then stopped and the heat sink/heat capacity tank is allowed to cool for at least 30 seconds before the temperature and the cooling time of the heat capacity tank is monitored and recorded. The function of dT/dt is then calculated. The amount of heat dissipated is then calculated from the equation of Q=W·Cp·(dT/dt), while the thermal resistance constant is calculated by the equation of R=(T−Tamb)/Q.