Abstract: The primary objective of the present invention is to provide a positioning device for surgical operation, which could allow a surgical tool to be positioned precisely at a specific operating spot or a specific operating angle by providing a three axial free-moving function and a vertical and horizontal free-rotating function. Furthermore, the present invention is able to be electrically connected to and controlled by an automatic control system to achieve a more precise and efficient positioning function.

Abstract: The primary objective of the present invention is to provide a positioning device for surgical operation, which could allow a surgical tool to be positioned precisely at a specific operating spot or a specific operating angle by providing a three axial free-moving function and a vertical and horizontal free-rotating function. Furthermore, the present invention is able to be electrically connected to and controlled by an automatic control system to achieve a more precise and efficient positioning function.

Abstract: A method for monitoring a step motor is provided, wherein the step motor rotates from a start position to an end position and then back to the start position repeatedly. The monitoring method includes: detecting a status signal of the step motor and a command signal received by the step motor in real time; recording a variation of the difference between the command signal and the status signal vs. time as an error data; and determining whether the step motor is starting from the start position, in action, reaching the end position, or returning to the start position according to the status signal and the command signal. If it is determined that the step motor is in action, the error data is recorded as a tracking error, and whether an alarm is issued is determined according to the tracking error.

Abstract: The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.

Abstract: A supervisory parallel switching device is designed for use with a CIM system including a host computer unit connected via an extended computer integrated unit to at least one equipment unit through an SECS-compliant (Semiconductor Equipment Communication Standard) serial communication link, for the purpose of allowing the equipment unit to be continuously under computer control even in the event of an unanticipated shutdown to the extended computer integrated unit.