Patents by Inventor Wen-Yuh Peng

Wen-Yuh Peng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7385208
    Abstract: A system for implantation dosage control. A first interface receives scan position information. A second interface receives beam current information specifying a first beam current value between scans and a plurality of second beam current values during one of the scans. A controller, determines a tolerance range according to the first beam current value, determines whether the second beam current values exceeds the tolerance range, and calculates number of the second beam current values exceeding the tolerance range.
    Type: Grant
    Filed: July 7, 2005
    Date of Patent: June 10, 2008
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Nai-Han Cheng, Stock Chang, Wen-Yuh Peng
  • Publication number: 20070023695
    Abstract: A system for implantation dosage control. A first interface receives scan position information. A second interface receives beam current information specifying a first beam current value between scans and a plurality of second beam current values during one of the scans. A controller, determines a tolerance range according to the first beam current value, determines whether the second beam current values exceeds the tolerance range, and calculates number of the second beam current values exceeding the tolerance range.
    Type: Application
    Filed: July 7, 2005
    Publication date: February 1, 2007
    Inventors: Nai-Han Cheng, Stock Chang, Wen-Yuh Peng