Patents by Inventor Wen Zen Chiu

Wen Zen Chiu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of detecting and controlling in-situ faults in rapid thermal processing systems
    Patent number: 6577926
    Abstract: Faults occurring in the operation of a rapid thermal process system are detected and dynamically controlled in-situ. A data set is generated which represents the power applied to heating elements which are spatially arranged in a plurality of zones. The data is converted to a sequence of fractions respectively representing the power applied to each zone relative to the total applied power. The fractions are sequentially arranged and a least squares straight line fit for the fractions is calculated. The slope of the calculated straight line fit is used in a statistical process control system to determine whether a fault has occurred, and to make appropriate corrections in process control parameters, such as the length of time the process is carried out.
    Type: Grant
    Filed: March 30, 1999
    Date of Patent: June 10, 2003
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shih Hui Chang, Kuo-Hsien Cheng, Cheng Kun Lin, Wen Zen Chiu