Abstract: This invention discloses an adaptive low-power method, device, and medium for the MAC layer of a wireless sensor network. The method includes: determining the environmental traffic based on the number of packets sent and received by nodes within a set timeframe; obtaining the remaining battery energy percentage; establishing the average node frequency based on the power of all nodes; setting the maximum duty cycle frequency (RDCmax) and minimum duty cycle frequency (RDCmin). When the remaining battery energy percentage is above 50%, adjusting the current duty cycle frequency based on the environmental traffic; when the remaining battery energy percentage is approximately 20% to 50%, reducing the maximum duty cycle frequency (RDCmax) to limit the maximum change in duty cycle frequency while adjusting the current duty cycle frequency based on environmental traffic.

Abstract: A MEMS microphone and a manufacturing method thereof. The method comprises: sequentially forming a first isolation layer, a diaphragm, and a second isolation layer on a substrate; sequentially forming a first protective layer, a backplate electrode, and a second protective layer on the second isolation layer; forming a release hole penetrating through the first protective layer, the backplate electrode, and the second protective layer; forming an acoustic cavity penetrating through the substrate; releasing the diaphragm through the acoustic cavity and the release hole; and forming a groove on a surface of the first isolation layer, wherein the diaphragm conformally covers the surface of the first isolation layer, thereby forming a spring structure at a position of the groove.

Abstract: A MEMS microphone and a manufacturing method thereof. The method comprises: sequentially forming a first isolation layer, a diaphragm, and a second isolation layer on a substrate; sequentially forming a first protective layer, a backplate electrode, and a second protective layer on the second isolation layer; forming a release hole penetrating through the first protective layer, the backplate electrode, and the second protective layer; forming an acoustic cavity penetrating through the substrate; releasing the diaphragm through the acoustic cavity and the release hole; and forming a groove on a surface of the first isolation layer, wherein the diaphragm conformally covers the surface of the first isolation layer, thereby forming a spring structure at a position of the groove.