Abstract: A gas sampler includes a connection portion connectable to an introduction piping connected to a sample tank, a switching valve for switching a connection state between the connection portion and a sample loop, a pump, and a control device. A buffer flow path between the sample loop and the pump is configured to be selectively connectable to any one of a plurality of buffer tanks different in volume. A volume of the buffer flow path is greater than a volume of the introduction piping by a predetermined amount. The control device operates the pump in a state in which the switching valve is in a closed state to set an inside of the buffer flow path to a negative pressure, and thereafter stops the pump and make the switching valve in an open state to fill the sample loop with a sample gas by using the negative pressure of the buffer flow path.

Abstract: A gas sampler (30) is provided with a connection portion (C1) connectable to a sample tank (20), a sample loop (PL) for holding a sample gas introduced from the sample tank (20) to the connection portion (C1), pneumatic switching valves (V1 to V6) for switching a flow path connected to the sample loop (PL), a control piping (81) for transmitting a driving pressure to the switching valves (V1 to V6), a pump (31) for suctioning an inside of the sample loop (PL), and a pressure accumulation tank (80) for accumulating the pressure generated by the operation of the pump (31) as a source pressure.

Abstract: Provided is a micro-valve having a laminate structure capable of improving sealing performance when a foreign substance is mixed. The micro-valve 10 has a laminate structure and includes a base layer 20 and a diaphragm layer 30. The base layer is formed with an inlet port 23 for introducing a gas into the micro-valve and an outlet port for allowing the gas to flow outside. The diaphragm layer is arranged to face the base layer. The diaphragm layer switches the flowing and blocking of the gas from the inlet port to the outlet port by elastic deformation thereof. The diaphragm layer has a configuration in which a plurality of deformation regions 33 and a plurality of rigid body regions 34 are alternately formed, the deformation region being elastically deformable in accordance with an inflow of a pneumatic fluid into the micro-valve. The diaphragm layer closes at least one of the inlet port and the outlet port by elastic deformation of at least a part of the plurality of deformation regions.

Abstract: A first flow path is connected to an inlet for introducing gas into a microvalve. A second flow path is connected to an outlet for allowing gas to flow out of the microvalve. A third flow path is for introducing a pneumatic fluid into the microvalve. A negative pressure generation mechanism (a pump) is for generating a negative pressure on the second flow path to suck gas from the first flow path forward the second flow path via the microvalve. A pressure adjustment mechanism (a connection flow path and a valve) is for reducing a pressure difference between the second flow path and the third flow path to prevent the inlet and the outlet from being blocked by a diaphragm layer in response to the negative pressure generated on the second flow path side.

Abstract: A gas sampler (30) is provided with a connection portion (C1) connectable to a sample tank (20), a sample loop (PL) for holding a sample gas introduced from the sample tank (20) to the connection portion (C1), pneumatic switching valves (V1 to V6) for switching a flow path connected to the sample loop (PL), a control piping (81) for transmitting a driving pressure to the switching valves (V1 to V6), a pump (31) for suctioning an inside of the sample loop (PL), and a pressure accumulation tank (80) for accumulating the pressure generated by the operation of the pump (31) as a source pressure.

Abstract: Provided is a micro-valve having a laminate structure capable of improving sealing performance when a foreign substance is mixed. The micro-valve 10 has a laminate structure and includes a base layer 20 and a diaphragm layer 30. The base layer is formed with an inlet port 23 for introducing a gas into the micro-valve and an outlet port for allowing the gas to flow outside. The diaphragm layer is arranged to face the base layer. The diaphragm layer switches the flowing and blocking of the gas from the inlet port to the outlet port by elastic deformation thereof. The diaphragm layer has a configuration in which a plurality of deformation regions 33 and a plurality of rigid body regions 34 are alternately formed, the deformation region being elastically deformable in accordance with an inflow of a pneumatic fluid into the micro-valve. The diaphragm layer closes at least one of the inlet port and the outlet port by elastic deformation of at least a part of the plurality of deformation regions.

Abstract: A gas sampler includes a connection portion connectable to an introduction piping connected to a sample tank, a switching valve for switching a connection state between the connection portion and a sample loop, a pump, and a control device. A buffer flow path between the sample loop and the pump is configured to be selectively connectable to any one of a plurality of buffer tanks different in volume. A volume of the buffer flow path is greater than a volume of the introduction piping by a predetermined amount. The control device operates the pump in a state in which the switching valve is in a closed state to set an inside of the buffer flow path to a negative pressure, and thereafter stops the pump and make the switching valve in an open state to fill the sample loop with a sample gas by using the negative pressure of the buffer flow path.

Abstract: A first flow path is connected to an inlet for introducing gas into a microvalve. A second flow path is connected to an outlet for allowing gas to flow out of the microvalve. A third flow path is for introducing a pneumatic fluid into the microvalve. A negative pressure generation mechanism (a pump) is for generating a negative pressure on the second flow path to suck gas from the first flow path forward the second flow path via the microvalve. A pressure adjustment mechanism (a connection flow path and a valve) is for reducing a pressure difference between the second flow path and the third flow path to prevent the inlet and the outlet from being blocked by a diaphragm layer in response to the negative pressure generated on the second flow path side.