Abstract: A diffractive MEMS device has an in-plane binary reflective diffraction pattern formed in an outer surface of a tiltable platform. The binary reflective diffraction pattern includes rectangular or trapezoidal ridges and valleys, or grooves, of a same depth. The binary reflective diffractive pattern has a high diffraction efficiency even though the surfaces of the “grooves” or “ridges” are not perpendicular to the incoming optical beam. The diffractive pattern is supported by a pair of torsional hinges and is tiltable by an electrostatic actuator. The electrostatic actuator can include at least one side electrode for linearization of dependence of tilt angle on the voltage applied to the actuator.

Abstract: A wavelength selective device including an arrayed waveguide grating is disclosed. The wavelength selective device includes a MEMS mirror, which couples light from an input port to an elongate aperture of an input star coupler or slab of the arrayed waveguide grating. A controller tilts the MEMS mirror in response to a sensed temperature change of the arrayed waveguide grating, thereby lessening a sensitivity of the arrayed waveguide grating to the temperature change. The MEMS mirror can also be tilted to shift wavelengths of the wavelength channels of the arrayed waveguide grating by pre-defined amounts upon receiving a corresponding remote command.

Abstract: A wavelength selective device including an arrayed waveguide grating is disclosed. The wavelength selective device includes a MEMS mirror, which couples light from an input port to an elongate aperture of an input star coupler or slab of the arrayed waveguide grating. A controller tilts the MEMS mirror in response to a sensed temperature change of the arrayed waveguide grating, thereby lessening a sensitivity of the arrayed waveguide grating to the temperature change. The MEMS mirror can also be tilted to shift wavelengths of the wavelength channels of the arrayed waveguide grating by pre-defined amounts upon receiving a corresponding remote command.

Abstract: A micro-electro-mechanical (MEMs) devices including a compound hot electrode, which increases the tilting range of the MEMs device. A substantially vertical hot electrode is mounted adjacent to the end or the sides of a pivoting ground electrode, formed of the underside of a pivoting mirror, and combine with a conventional horizontal hot electrode to make up the compound hot electrode.

Abstract: A diffractive MEMS device has an in-plane binary reflective diffraction pattern formed in an outer surface of a tiltable platform. The binary reflective diffraction pattern includes rectangular or trapezoidal ridges and valleys, or grooves, of a same depth. The binary reflective diffractive pattern has a high diffraction efficiency even though the surfaces of the “grooves” or “ridges” are not perpendicular to the incoming optical beam. The diffractive pattern is supported by a pair of torsional hinges and is tiltable by an electrostatic actuator. The electrostatic actuator can include at least one side electrode for linearization of dependence of tilt angle on the voltage applied to the actuator.

Abstract: The invention relates to a hermetic feedthrough of an optical fiber into a package for an optical module, that includes a package ferrule hermetically attached to the package or integral therewith, a fiber ferrule hermetically sealed around the optical fiber, and a compression sleeve hermetically sealed around the package ferrule. The compression sleeve is hermetically sealed to the fiber ferrule or integral therewith, and wherein a coefficient of thermal expansion (CTE) of the compression sleeve is greater than a CTE of the package ferrule so that a joint between the compression sleeve and the package ferrule is under compressive stress.

Abstract: The invention relates to a hermetic feedthrough of an optical fiber into a package for an optical module, that includes a package ferrule hermetically attached to the package or integral therewith, a fiber ferrule hermetically sealed around the optical fiber, and a compression sleeve hermetically sealed around the package ferrule. The compression sleeve is hermetically sealed to the fiber ferrule or integral therewith, and wherein a coefficient of thermal expansion (CTE) of the compression sleeve is greater than a CTE of the package ferrule so that a joint between the compression sleeve and the package ferrule is under compressive stress.

Abstract: A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) based on a silicon-on-insulator (SOI) process with wafer bonding and coarsely aligned orthogonal vertical comb and/or parallel plate actuator. Each micro-mirror in the MEMS linear piano micro-mirror array comprises a micro-mirror layer, a hinge layer and an electrode/substrate layer. Preferably, the roll and tilt electrodes are substantially disposed along the roll axis to provide a high fill factor. The structure is formed by fabricating the layers separately in SOI structure and then bonding them together.

Abstract: A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) based on a silicon-on-insulator (SOI) process with wafer bonding and coarsely aligned orthogonal vertical comb and/or parallel plate actuator. Each micro-mirror in the MEMS linear piano micro-mirror array comprises a micro-mirror layer, a hinge layer and an electrode/substrate layer. Preferably, the roll and tilt electrodes are substantially disposed along the roll axis to provide a high fill factor. The structure is formed by fabricating the layers separately in SOI structure and then bonding them together.

Abstract: A micro-electro-mechanical (MEMS) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention the spacing between electrodes is increased without effecting the fill factor of the mirrors by interlacing two sets of tilting platforms, whereby the reflecting portions of both sets of tilting platforms are adjacent one another, while the non-reflecting portions of adjacent platforms are remote from each other.

Abstract: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes.

Abstract: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes.

Abstract: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes.

Abstract: A micro-electro-mechanical (MEMS) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention the spacing between electrodes is increased without effecting the fill factor of the mirrors by interlacing two sets of tilting platforms, whereby the reflecting portions of both sets of tilting platforms are adjacent one another, while the non-reflecting portions of adjacent platforms are remote from each other.

Abstract: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes.

Abstract: A hermetic package useful in optical communications, for example to house a MEMS switch, a semiconductor laser or a dynamic gain equalizer, has at least one vent opening that is sealed, following the assembly of the package, by inserting a solder plug into the vent opening and cold-pressing the solder by into the opening, preferably by screwing-in a bolt into a threaded part of the vent opening, until the solder is deformed to seal the vent opening. Preferably, the indium-tin or bismuth-tin solder is pushed down until it partially exits from a narrower portion of the vent opening into the package cavity. Following the plug deformation, the bolt may be withdrawn or left in place. The approach is simple and eliminates the conventional step of melting the solder.

Abstract: A hermetically sealed package for an electro-optical device has a two-part casing with a fiber feedthrough. The feedthrough defines a gap and is assembled using fastening means, typically bolts or screws, that are placed such that the walls of the feedthrough are prestressed before a molten solder is injected into the feedthrough to seal the casing. The material of the bolts has a greater coefficient of thermal expansion (CTE) than the CTE of the casing, whereby the mismatching between the CTE of the casing and the solder is at least partly compensated.

Abstract: A hermetically sealed package for an electro-optical device has a two-part casing with a fiber feedthrough. The feedthrough defines a gap and is assembled using fastening means, typically bolts or screws, that are placed such that the walls of the feedthrough are prestressed before a molten solder is injected into the feedthrough to seal the casing. The material of the bolts has a greater coefficient of thermal expansion (CTE) than the CTE of the casing, whereby the mismatching between the CTE of the casing and the solder is at least partly compensated.

Abstract: A device for compensating for changes of a center wavelength of a fiber optic grating due to temperature variations comprising a holder including a first and second connector for securing a fiber optic grating, the first connector is fixed, the second connector is movable to increase or decrease a strain in the grating, a source of force applied to the second connector, and the source of force varies with changes in temperature, such that with and increase in temperature the second connector moves toward the first connector to decrease the strain in the fiber optic grating; and, a method for compensating for changes of a center wavelength of a fiber optic grating due to temperature variations.