Abstract: To provide a vibration-damping positioning controller capable of effecting stable positioning operation within a short period of time.

Abstract: In a feedback control apparatus comprising a controller, a control object to be controlled by the controller, and an observer for inputting a control output from the control object and an output of the controller and setting an output of a control object model to be a feedback signal, the observer includes an observer compensator for inputting a difference between the control output and an output of an element model and inputs, to the control object model, a sum of an output of the observer compensator and the output of the controller. Consequently, a control system having an excellent response performance can be constituted and a stable observer can easily be constituted.

Abstract: A position controller for motors for increasing the position loop gain of a full-close control system without causing recurrence of vibration. The controller where a position signal representing the position of a movable table and outputted from straight-line motion position sensing means attached to a straight-line motion mechanism is used as a position feedback signal comprises differentiating means (2) for differentiating a straight-line motion position signal and outputting a straight-line motion speed signal, subtracting means (4) for calculating the difference between a speed command signal and the straight-line motion speed signal, integrating means (3) for integrating a difference signal outputted form the subtracting means, proportional gain means (1) for receiving the output signal from the integrating means, and adding means (19) for adding the output signal form the proportional gain means to the speed command signal and outputting a new speed command Vr.

Abstract: To overcome the problem of a low frequency disturbance causing minute vibrations affecting response attributable to the difficulty of adaption to the phase of the vibrations, the present invention provides a position controller, which includes a subtracter for subtracting a motor position signal from a movement position signal to produce an angle-of-twist signal; a high-pass filter for advancing the phase of the angle-of-twist signal; a low pass filter for eliminating only high-frequency components of the signal received from the high-pass filter; a circuit for multiplying the signal from a low-pass filter by a torque-corrective gain to produce a torque-corrected signal; a torque correction evaluation section for varying the torque-corrective gain according to the position deviation signal that is the difference between a position command and the movement position signal; and a subtracter for combining the torque-corrective signal and the torque command to produce a new torque command.