Patents by Inventor Wenxiang Xu

Wenxiang Xu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11971326
    Abstract: A dynamic simulation test platform for ultra-high-speed evacuated tube magnetic levitation (maglev) transportation includes an evacuated tube having a transition section and a vacuum section, a vacuum maintaining system, a motor supporting platform, and a model train. One end of the evacuated tube is provided with a first isolation door, and the other end is closed. A second isolation door is provided inside the evacuated tube. The vacuum maintaining system is connected to the transition section and the vacuum section. The motor supporting platform is provided in the evacuated tube and extends outside the transition section. The motor supporting platform is provided with a stator winding and a permanent-magnet track. A mover and a cryogenic dewar are provided at a bottom of the model train. The cryogenic dewar is provided with a superconducting bulk. A test method using the test platform is further provided.
    Type: Grant
    Filed: October 9, 2023
    Date of Patent: April 30, 2024
    Assignee: Southwest Jiaotong University
    Inventors: Weihua Zhang, Zigang Deng, Haiquan Bi, Wenxiang Zhou, Jun Guo, Zhigen Xu, Yinchuan Li, Le Liang
  • Publication number: 20240038856
    Abstract: A semiconductor device includes a first vertically-oriented semiconductor pillar having one or more sidewalls, and a top surface, the first vertically-oriented semiconductor pillar having a first width, a first dielectric material abutted to the one or more sidewalls of the first vertically-oriented semiconductor pillar, and a first conductive structure having a first surface, and having a second width that is greater than the first width, the first conductive structure disposed such that a second portion of its first surface is in electrical contact with the top surface of the first vertically-oriented semiconductor pillar, wherein a first portion of the first surface of the first conductive structure extends laterally beyond the top surface of the first vertically-oriented semiconductor pillar, and the second portion of the first surface is disposed on the first dielectric material.
    Type: Application
    Filed: July 24, 2023
    Publication date: February 1, 2024
    Inventors: Wenxiang Xu, Fandong Liu, Wenyu Hua, Ya Wang, Dongmen Song
  • Publication number: 20240032285
    Abstract: A memory device, having a plurality of first-word-lines, each first-word-line having a first portion, a second portion, and a third portion; a plurality of second-word-lines, each second-word-line having a first portion, a second portion, and a third portion; and a memory array having a first side, a second side laterally opposite the first side, and a third side. The first portions of each first-word-line and each second-word-line are spaced apart from their respective third portions. The second portion of each first-word-line and the second portion of each second-word-line are non-parallel and non-co-linear with their respective first portions and third portions. Each first-word-line is disposed such that its second portion is adjacent to the first side, and each second-word-line is disposed such that its second portion is adjacent to the second side. The memory device further has a plurality of first-side-word-line-pickup-structures, and a plurality of second-side-word-line-pickup-structures.
    Type: Application
    Filed: August 3, 2023
    Publication date: January 25, 2024
    Inventors: Dongmen SONG, Fandong LIU, Wenxiang XU, Mingli DU
  • Patent number: 11805650
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a method for forming a 3D memory device includes the following operations. First, a slit structure and a support structure are formed in a stack structure having interleaved a plurality of sacrificial material layers and a plurality of insulating material layers, the initial support structure between adjacent slit openings of the slit structure. A source structure is formed to include a source portion in each of the slit openings. A pair of first portions of a connection layer is formed in contact with and conductively connected to the source portion. A second portion of the connection layer is formed in contact with and conductively to the pair of first portions of the connection layer.
    Type: Grant
    Filed: December 14, 2021
    Date of Patent: October 31, 2023
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Wenxiang Xu, Wei Xu, Pan Huang, Ji Xia
  • Patent number: 11792980
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a method for forming a 3D memory device includes forming a first source contact portion in a substrate, forming a dielectric stack over the first source contact portion, and forming a slit opening extending in the dielectric stack and exposing the first source contact portion. The method also includes forming a plurality of conductor layers through the slit opening and form a second source contact portion in the slit opening and in contact with the first source contact portion.
    Type: Grant
    Filed: November 22, 2021
    Date of Patent: October 17, 2023
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Ji Xia, Wei Xu, Pan Huang, Wenxiang Xu, Beihan Wang
  • Patent number: 11785772
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a 3D memory device includes a memory stack having interleaved a plurality of conductor layers and a plurality of insulating layers, a plurality of channel structures extending in the memory stack, and a source structure extending in the memory stack. The source structure includes a plurality of source contacts each in a respective insulating structure. Two adjacent source contacts are conductively connected to one another by a connection layer, the connection layer includes a pair of first portions being over the two adjacent ones of the plurality of source contacts and a second portion between the pair of first portions. A support structure is between the two adjacent source contacts. The support structure includes a cut structure over interleaved a plurality of conductor portions and a plurality of insulating portions.
    Type: Grant
    Filed: November 16, 2021
    Date of Patent: October 10, 2023
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Wenxiang Xu, Wei Xu, Pan Huang, Ping Yan, Zongliang Huo, Wenbin Zhou, Ji Xia
  • Patent number: 11653495
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a method for forming a 3D memory device includes the following operations. A cut structure is first formed in a stack structure. The stack structure includes interleaved initial sacrificial layers and initial insulating layers. A patterned cap material layer is formed over the stack structure. The patterned cap material layer includes an opening over the cut structure. Portions of the stack structure and the patterned cap material layer adjacent to the opening are removed to form a slit structure and an initial support structure. The initial support structure divides the slit structure into slit openings. Conductor portions are formed through the plurality of slit openings to form a support structure. A source contact is formed in each slit opening. A connection layer is formed over the source contact in each slit opening and over the support structure.
    Type: Grant
    Filed: February 26, 2021
    Date of Patent: May 16, 2023
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Wenxiang Xu, Wei Xu, Pan Huang, Ping Yan, Zongliang Huo, Wenbin Zhou, Ji Xia
  • Patent number: 11437398
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a 3D memory device includes a memory stack over a substrate, a plurality of channel structures, a source structure, and a support structure. The memory stack includes interleaved a plurality of conductor layers and a plurality of insulating layers. The plurality of channel structures extend vertically in the memory stack. The source structure includes a plurality of source portions and extending in the memory stack. The support structure is between adjacent ones of the source portions and has a plurality of interleaved conductor portions and insulating portions. A top one of the conductor portions is in contact with a top one of the conductor layers. Adjacent ones of the source portions are conductively connected to one another.
    Type: Grant
    Filed: April 30, 2020
    Date of Patent: September 6, 2022
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Wenxiang Xu, Wei Xu, Pan Huang, Ji Xia
  • Patent number: 11411014
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a 3D memory device includes a substrate, a memory stack on the substrate; and a source contact structure extending vertically through the memory stack. The source contact structure includes a first source contact portion in the substrate and having a conductive material different from the substrate. The source contact structure also includes a second source contact portion above, in contact with, and conductively connected to the first source contact portion.
    Type: Grant
    Filed: January 10, 2020
    Date of Patent: August 9, 2022
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Ji Xia, Wei Xu, Pan Huang, Wenxiang Xu, Beihan Wang
  • Publication number: 20220102377
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a method for forming a 3D memory device includes the following operations. First, a slit structure and a support structure are formed in a stack structure having interleaved a plurality of sacrificial material layers and a plurality of insulating material layers, the initial support structure between adjacent slit openings of the slit structure. A source structure is formed to include a source portion in each of the slit openings. A pair of first portions of a connection layer is formed in contact with and conductively connected to the source portion. A second portion of the connection layer is formed in contact with and conductively to the pair of first portions of the connection layer.
    Type: Application
    Filed: December 14, 2021
    Publication date: March 31, 2022
    Inventors: Wenxiang Xu, Wei Xu, Pan Huang, Ji Xia
  • Publication number: 20220085044
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a method for forming a 3D memory device includes forming a first source contact portion in a substrate, forming a dielectric stack over the first source contact portion, and forming a slit opening extending in the dielectric stack and exposing the first source contact portion. The method also includes forming a plurality of conductor layers through the slit opening and form a second source contact portion in the slit opening and in contact with the first source contact portion.
    Type: Application
    Filed: November 22, 2021
    Publication date: March 17, 2022
    Inventors: Ji Xia, Wei Xu, Pan Huang, Wenxiang Xu, Beihan Wang
  • Publication number: 20220085042
    Abstract: Embodiments of three-dimensional (3D) memory devices and fabricating methods thereof are disclosed. The method includes: forming an alternating dielectric stack on a substrate; forming a structure strengthen plug in an upper portion of the alternating dielectric stack, wherein the structure strengthen plug has a narrow support body and two enlarged connecting portions; forming a gate line silt in the alternating dielectric stack to expose a sidewall of one enlarged connecting portion of the structure strengthen plug; and forming a gate line slit structure in the gate line slit including an enlarged end portion connected to the one enlarged connecting portion of the structure strengthen plug.
    Type: Application
    Filed: November 22, 2021
    Publication date: March 17, 2022
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Wenxiang XU, Haohao Yang, Pan Huang, Ping Yan, Zongliang Huo, Wenbin Zhou, Wei Xu
  • Publication number: 20220077171
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a 3D memory device includes a memory stack having interleaved a plurality of conductor layers and a plurality of insulating layers, a plurality of channel structures extending in the memory stack, and a source structure extending in the memory stack. The source structure includes a plurality of source contacts each in a respective insulating structure. Two adjacent source contacts are conductively connected to one another by a connection layer, the connection layer includes a pair of first portions being over the two adjacent ones of the plurality of source contacts and a second portion between the pair of first portions. A support structure is between the two adjacent source contacts. The support structure includes a cut structure over interleaved a plurality of conductor portions and a plurality of insulating portions.
    Type: Application
    Filed: November 16, 2021
    Publication date: March 10, 2022
    Inventors: Wenxiang Xu, Wei Xu, Pan Huang, Ping Yan, Zongliang Huo, Wenbin Zhou, Ji Xia
  • Patent number: 11271007
    Abstract: Embodiments of a three-dimensional (3D) memory device and fabrication methods are disclosed. In some embodiments, the method for forming the 3D memory device includes forming an alternating dielectric stack on a substrate, and forming channel holes that penetrate the alternating dielectric stack and expose at least a portion of the substrate. The method further includes forming top select gate openings that penetrate vertically an upper portion of the alternating dielectric stack and extend laterally. The method also includes forming slit openings parallel to the top select gate openings, wherein the slit openings penetrate vertically the alternating dielectric stack. The method also includes replacing the alternating dielectric stack with a film stack of alternating conductive and dielectric layers, forming top select gate cuts in the top select gate openings, and forming slit structures in the slit openings.
    Type: Grant
    Filed: December 30, 2019
    Date of Patent: March 8, 2022
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Ji Xia, Zongliang Huo, Wenbin Zhou, Wei Xu, Pan Huang, Wenxiang Xu
  • Patent number: 11257831
    Abstract: Embodiments of three-dimensional (3D) memory devices and fabricating methods thereof are disclosed. The method includes: forming an alternating dielectric stack on a substrate; forming a top selective gate cut and two structure strengthen plugs in an upper portion of the alternating dielectric stack, wherein each structure strengthen plug has a narrow support body and two enlarged connecting portions; forming a plurality of channel structures in the alternating dielectric stack; forming a plurality of gate line silts in the alternating dielectric stack, wherein each gate line slit exposes a sidewall of one enlarged connecting portion of a corresponding structure strengthen plug; transforming the alternating dielectric stack into an alternating conductive/dielectric stack; and forming a gate line slit structure in each gate line slit including an enlarged end portion connected to one enlarged connecting portion of a corresponding structure strengthen plug.
    Type: Grant
    Filed: February 21, 2020
    Date of Patent: February 22, 2022
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Wenxiang Xu, Haohao Yang, Pan Huang, Ping Yan, Zongliang Huo, Wenbin Zhou, Wei Xu
  • Publication number: 20220028890
    Abstract: Embodiments of a three-dimensional (3D) memory device and fabrication methods are disclosed. In some embodiments, the method for forming the 3D memory device includes forming an alternating dielectric stack on a substrate, and forming channel holes that penetrate the alternating dielectric stack and expose at least a portion of the substrate. The method further includes forming top select gate openings that penetrate vertically an upper portion of the alternating dielectric stack and extend laterally. The method also includes forming slit openings parallel to the top select gate openings, wherein the slit openings penetrate vertically the alternating dielectric stack. The method also includes replacing the alternating dielectric stack with a film stack of alternating conductive and dielectric layers, forming top select gate cuts in the top select gate openings, and forming slit structures in the slit openings.
    Type: Application
    Filed: October 7, 2021
    Publication date: January 27, 2022
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Ji XIA, Zongliang HUO, Wenbin ZHOU, Wei XU, Pan HUANG, Wenxiang XU
  • Patent number: 11211394
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a 3D memory device includes a memory stack, a plurality of channel structures, and a source structure. The memory stack is over a substrate and includes interleaved a plurality of conductor layers and a plurality of insulating layers. The source structure includes a plurality of source contacts, and two adjacent ones of the plurality of source contacts are conductively connected to one another by a connection layer. A pair of first portions of the connection layer are over the two adjacent ones of the plurality of source contacts and a second portion of the connection layer being between the two adjacent ones of the plurality of source contacts. Top surfaces of the pair of first portions of the connection are coplanar with a top surface of the second portion.
    Type: Grant
    Filed: October 16, 2019
    Date of Patent: December 28, 2021
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Wenxiang Xu, Wei Xu, Pan Huang, Ping Yan, Zongliang Huo, Wenbin Zhou, Ji Xia
  • Patent number: 11195853
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a 3D memory device includes a substrate, a memory stack above the substrate, and a peripheral contact structure outside of the memory stack and in contact with the substrate. The peripheral contact structure includes a first peripheral contact portion in the substrate and having a conductive material different from the substrate. The peripheral contact structure also includes a second peripheral contact above, in contact with, and conductively connected to the first peripheral contact portion.
    Type: Grant
    Filed: January 10, 2020
    Date of Patent: December 7, 2021
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Ji Xia, Wei Xu, Pan Huang, Wenxiang Xu, Beihan Wang
  • Patent number: 11127757
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a 3D memory device includes a memory stack, a plurality of channel structures, and a source structure. The memory stack is over a substrate and includes interleaved a plurality of conductor layers and a plurality of insulating layers. The plurality of channel structures extend vertically in the memory stack. The source structure extend in the memory stack. The source structure includes a plurality of source contacts each in a respective insulating structure, and two adjacent ones of the plurality of source contacts are conductively connected to one another.
    Type: Grant
    Filed: October 16, 2019
    Date of Patent: September 21, 2021
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Wenxiang Xu, Wei Xu, Pan Huang, Ping Yan, Zongliang Huo, Wenbin Zhou, Ji Xia
  • Publication number: 20210272978
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a 3D memory device includes a memory stack over a substrate, a plurality of channel structures, a source structure, and a support structure. The memory stack includes interleaved a plurality of conductor layers and a plurality of insulating layers. The plurality of channel structures extend vertically in the memory stack. The source structure includes a plurality of source portions and extending in the memory stack. The support structure is between adjacent ones of the source portions and has a plurality of interleaved conductor portions and insulating portions. A top one of the conductor portions is in contact with a top one of the conductor layers. Adjacent ones of the source portions are conductively connected to one another.
    Type: Application
    Filed: April 30, 2020
    Publication date: September 2, 2021
    Inventors: Wenxiang Xu, Wei Xu, Pan Huang, Ji Xia