Abstract: The present disclosure provides a magnetron sputtering apparatus, including a process chamber, a bias power supply assembly, and an excitation power supply assembly. The process chamber is provided with a base assembly and a bias guide assembly. A target is arranged at a top of the process chamber. The base assembly is arranged at a bottom of the process chamber and is configured to support a wafer carrier, drive the wafer carrier to move, and heat the wafer carrier. The bias guide assembly is arranged at the base assembly and configured to support the wafer carrier. The bias guide assembly is electrically in contact with the wafer carrier. The bias power supply assembly is electrically connected to the bias guide assembly and configured to apply a bias voltage to the wafer carrier through the bias guide assembly.

Abstract: Systems and methods for detecting a layer-to-layer transition of a lifting steel wire rope on a reel are described. The system includes a reel assembly for winding a steel wire rope on a reel and a tensioning assembly for tensioning a segment of said steel wire rope. The system further includes a loading assembly and a lead screw sliding assembly. The loading assembly provides a vertical loading to the tensioning assembly so as to generate a loading force between the tensioned steel wire rope and the steel wire rope wound around the reel. The lead screw sliding assembly drives the tensioning assembly so as to move on a horizontal guide rail to generate a relative displacement between the tensioned steel wire rope and the steel wire rope wound around the reel. The tensioning assembly is connected to the loading assembly via a first threaded rod and a static torque sensor.

Abstract: Systems and methods for detecting a layer-to-layer transition of a lifting steel wire rope on a reel are described. The system includes a reel assembly for winding a steel wire rope on a reel and a tensioning assembly for tensioning a segment of said steel wire rope. The system further includes a loading assembly and a lead screw sliding assembly. The loading assembly provides a vertical loading to the tensioning assembly so as to generate a loading force between the tensioned steel wire rope and the steel wire rope wound around the reel. The lead screw sliding assembly drives the tensioning assembly so as to move on a horizontal guide rail to generate a relative displacement between the tensioned steel wire rope and the steel wire rope wound around the reel. The tensioning assembly is connected to the loading assembly via a first threaded rod and a static torque sensor.