Abstract: A method for automatic probe offset compensation in a machine for measuring coordinates of a workpiece surface by contacting points on the surface with a probe having a prescribed diameter and sensing and recording the coordinates of the probe. The method can be applied to planar surfaces and circularly curved surfaces. The method includes determining a direction point in space just prior to contact with the workpiece surface, determining a directional vector between the direction point and the first contact point, and determining the angle of the directional vector relative to a normal to the surface. When the angle is within a predetermined range of acceptance, the direction point is considered valid. In the case of a planar surface, the measured surface is shifted by the probe offset in a direction opposite the normal vector so that the measured surface and the workpiece surface coincide.